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    • 1. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08507949B2
    • 2013-08-13
    • US13195190
    • 2011-08-01
    • Masato NishimoriAtsushi Yamada
    • Masato NishimoriAtsushi Yamada
    • H01L29/66
    • H01L29/66431H01L29/0657H01L29/2003H01L29/4175H01L29/66462H01L29/7787
    • A semiconductor device includes a substrate, a carrier transit layer disposed above the substrate, a compound semiconductor layer disposed on the carrier transit layer, a source electrode disposed on the compound semiconductor layer, a first groove disposed from the back of the substrate up to the inside of the carrier transit layer while penetrating the substrate, a drain electrode disposed in the inside of the first groove, a gate electrode located between the source electrode and the first groove and disposed on the compound semiconductor layer, and a second groove located diagonally under the source electrode and between the source electrode and the first groove and disposed from the back of the substrate up to the inside of the carrier transit layer while penetrating the substrate.
    • 半导体器件包括衬底,设置在衬底上的载流子迁移层,设置在载流子迁移层上的化合物半导体层,设置在化合物半导体层上的源电极,从衬底的背面设置到第一沟槽 在穿过基板的载体转移层的内部,设置在第一槽的内部的漏电极,位于源电极和第一槽之间并设置在化合物半导体层上的栅极,以及位于对角线下方的第二槽 源电极和源电极与第一沟槽之间,并且在穿透衬底的同时从衬底的背面直到载体转运层的内部布置。
    • 3. 发明授权
    • Semiconductor device and method for manufacturing semiconductor device
    • 半导体装置及半导体装置的制造方法
    • US08633494B2
    • 2014-01-21
    • US13552894
    • 2012-07-19
    • Masato NishimoriToshihide Kikkawa
    • Masato NishimoriToshihide Kikkawa
    • H01L31/0256H01L21/338
    • H01L29/1075H01L29/2003H01L29/42316H01L29/7787
    • A semiconductor device includes a buffer layer that is disposed over a substrate, a high-resistance layer that is disposed over the buffer layer, the high-resistance layer being doped with a transition metal for achieving high resistance, a low-resistance region that is disposed in a portion of the high-resistance layer or over the high-resistance layer, the low-resistance region being doped with an impurity element for achieving low resistance, an electron travel layer that is disposed over the high-resistance layer including the low-resistance region, an electron supply layer that is disposed over the electron travel layer, a gate electrode that is disposed over the electron supply layer, and a source electrode and a drain electrode that are disposed over the electron supply layer.
    • 半导体器件包括设置在衬底上的缓冲层,设置在缓冲层上的高电阻层,高电阻层掺杂有用于实现高电阻的过渡金属,低电阻区是 设置在高电阻层的一部分上或高电阻层的一部分上,低电阻区域掺杂有用于实现低电阻的杂质元素,设置在包含低电阻的高电阻层上的电子迁移层 设置在电子行进层上的电子供给层,设置在电子供给层上的栅电极以及设置在电子供给层上的源电极和漏电极。