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    • 2. 发明授权
    • Microwave excitation plasma processing apparatus and microwave
excitation plasma processing method
    • 微波激发等离子体处理装置和微波激发等离子体处理方法
    • US5955382A
    • 1999-09-21
    • US5689
    • 1998-01-13
    • Takeshi YamauchiKatsuaki AokiMasashi Yamage
    • Takeshi YamauchiKatsuaki AokiMasashi Yamage
    • H01L21/00
    • H01J37/32229
    • A microwave excitation plasma processing apparatus comprises a vacuum container having a plasma generating chamber at an upper portion thereof and a processing chamber, a gas supply pipe for supplying a process gas into the plasma generating chamber, a dielectric window arranged in an opening of an upper wall portion of the vacuum container, a rectangular waveguide arranged on the upper wall portion of the vacuum container including the dielectric window and comprising a first wall having a first surface perpendicular to a direction of electric field of a microwave to oppose the dielectric window, second walls having second surfaces parallel to the direction of electric field of the microwave and extending in a direction perpendicular to the first surface, and a third wall having a third surface which is provided on a side opposite to a microwave introducing side perpendicular to the first and second surfaces to reflect the microwave, and a microwave oscillator for introducing the microwave into the waveguide, wherein the waveguide has two slits which are formed in the first wall and located in the vicinity of the second walls, and which extend in parallel or substantially parallel to the second walls, each of the slits having a width which is smaller on a side closer to the third surface.
    • 一种微波激发等离子体处理装置,包括:上部具有等离子体发生室的真空容器,以及处理室,用于将等离子体发生室内的工序气体供给的气体供给管,布置在上部 真空容器的壁部分,布置在包括电介质窗口的真空容器的上壁部分上的矩形波导,并且包括具有垂直于微波的电场方向的第一表面的第一壁以与电介质窗口相对的第二壁,第二 壁具有与微波的电场方向平行的第二表面,并且在垂直于第一表面的方向上延伸,第三壁具有第三表面,第三表面设置在与第一表面垂直的微波导入侧的相对侧上, 反射微波的第二表面和用于引入微波的微波振荡器 波导到波导中,其中波导具有形成在第一壁中并位于第二壁附近的两个狭缝,并且其平行或大致平行于第二壁延伸,每个狭缝的宽度为 在靠近第三表面的一侧较小。
    • 3. 发明授权
    • Pressure gauge
    • 压力计
    • US09134192B2
    • 2015-09-15
    • US13695978
    • 2011-01-25
    • Takeshi Yamauchi
    • Takeshi Yamauchi
    • G01D13/22G01L19/16G01L7/04
    • G01L7/04G01D13/22G01L7/043G01L19/16
    • A pressure gauge has an indicator needle and a scale plate. A preset pressure indicating member extending along a pressure scale in a circular arc pattern is slidably attached to a front wall of a case, and provided with a first display section. An opaque shield portion provided with a second display section at one end thereof is provided to a transparent cover rotatably attached to the front wall. The transparent cover drives the preset pressure indicating member to set a preset pressure range between the first display section and the second display section which is observable from the outside through the transparent cover.
    • 压力表有一个指针和一个刻度盘。 预定的压力指示构件沿着圆弧形图案的压力尺延伸,可滑动地附接到壳体的前壁,并且设置有第一显示部分。 在其一端设置有第二显示部的不透明屏蔽部分设置在可旋转地附接到前壁的透明盖上。 透明盖驱动预设压力指示构件,以通过透明盖从外部观察到的第一显示部分和第二显示部分之间设定预设压力范围。
    • 4. 发明授权
    • Connector
    • 连接器
    • US08523246B2
    • 2013-09-03
    • US12922606
    • 2009-02-06
    • Takeshi Yamauchi
    • Takeshi Yamauchi
    • F16L17/00
    • F15B21/048
    • Clamp portions (24) are provided on two sides in a vertical direction of each of flanges (21) and (22) of a filter (10) which is a fluid apparatus having a directionality, and guide grooves (28) and (29) are formed mutually different in shape between the other two sides of the flanges (21) and (22) and a coupling head (14). On the other hand, clamp portions (34) are provided on four sides of each of flanges (31) and (32) of a regulator (11) which is a fluid apparatus having no directionality, and clamp grooves (35) are formed between the clamp portions (34) and a coupling head (18). A connector (13) includes tongue portions (51) engaged with the clamp portions (24) and (34), guide protrusions (53) inserted into the guide groove (28) and the clamp groove (35), and guide protrusions (54) inserted into the guide groove (29) and the clamp groove (35), and the regulator (11) is coupled to the filter (10) in any posture.
    • 在作为具有方向性的流体设备的过滤器(10)的每个凸缘(21)和(22)的垂直方向的两侧设置有夹紧部分(24),以及引导槽(28)和(29) 在凸缘(21)和(22)的另外两侧和联接头(14)之间形成相互不同的形状。 另一方面,在作为不具有方向性的流体设备的调节器(11)的每个凸缘(31)和(32)的四个侧面上设有夹持部分(34),并且夹紧部分 夹紧部分(34)和联接头(18)。 连接器(13)包括与夹持部(24)和(34)接合的舌部(51),插入引导槽(28)和夹紧槽(35)中的引导突起(53)和引导突起 )插入到引导槽(29)和夹紧槽(35)中,并且调节器(11)以任何姿势联接到过滤器(10)。
    • 6. 发明申请
    • CONNECTOR
    • 连接器
    • US20110018261A1
    • 2011-01-27
    • US12922606
    • 2009-02-06
    • Takeshi Yamauchi
    • Takeshi Yamauchi
    • F16L25/00
    • F15B21/048
    • Clamp portions (24) are provided on two sides in a vertical direction of each of flanges (21) and (22) of a filter (10) which is a fluid apparatus having a directionality, and guide grooves (28) and (29) are formed mutually different in shape between the other two sides of the flanges (21) and (22) and a coupling head (14). On the other hand, clamp portions (34) are provided on four sides of each of flanges (31) and (32) of a regulator (11) which is a fluid apparatus having no directionality, and clamp grooves (35) are formed between the clamp portions (34) and a coupling head (18). A connector (13) includes tongue portions (51) engaged with the clamp portions (24) and (34), guide protrusions (53) inserted into the guide groove (28) and the clamp groove (35), and guide protrusions (54) inserted into the guide groove (29) and the clamp groove (35), and the regulator (11) is coupled to the filter (10) in any posture.
    • 在作为具有方向性的流体设备的过滤器(10)的每个凸缘(21)和(22)的垂直方向的两侧设置有夹紧部分(24),以及引导槽(28)和(29) 在凸缘(21)和(22)的另外两侧和联接头(14)之间形成彼此不同的形状。 另一方面,在作为不具有方向性的流体设备的调节器(11)的每个凸缘(31)和(32)的四个侧面上设有夹持部分(34),并且夹紧部分 夹紧部分(34)和联接头(18)。 连接器(13)包括与夹持部(24)和(34)接合的舌部(51),插入引导槽(28)和夹紧槽(35)中的引导突起(53)和引导突起 )插入到引导槽(29)和夹紧槽(35)中,并且调节器(11)以任何姿势联接到过滤器(10)。