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1. 发明申请

US20100124726A1 SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND TEMPERATURE CONTROLLING METHOD 有权
标题翻译：基板加工装置，半导体装置制造方法及温度控制方法
公开(公告)号：US20100124726A1
公开(公告)日：2010-05-20
申请号：US12609541
申请日：2009-10-30
申请人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
发明人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
IPC分类号： H01L21/477
CPC分类号： H01L21/67248
摘要： Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers. Product and filler wafers are accommodated and heat-treated in the reaction vessel while controlling a heating unit using calculation results obtained using at least the calculation parameter and deviation between a set temperature and a temperature detected in the heating unit by a temperature detector.
摘要翻译：提供了适于提高设备运行速率的基板处理装置，半导体装置制造方法和温度控制方法。计算参数计算单元使用由第一计算参数设定单元确定的至少第一计算参数校正值，基于反应容器上累积的膜厚计算计算参数，由第二计算参数设定确定的第二计算参数校正值基于填充晶片上的累积膜厚的单位和由第三计算参数设定单元基于填充晶片的数量确定的第三计算参数校正值。使用至少计算参数获得的计算结果和通过温度检测器在加热单元中检测到的设定温度和温度之间的偏差来控制加热单元，从而在反应容器中容纳和热处理产物和填料晶片。

2. 发明授权

US08417394B2 Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method 有权
标题翻译：基板加工装置，半导体装置的制造方法以及温度控制方法
公开(公告)号：US08417394B2
公开(公告)日：2013-04-09
申请号：US12609541
申请日：2009-10-30
申请人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
发明人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
IPC分类号： H01L21/67
CPC分类号： H01L21/67248
摘要： Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers. Product and filler wafers are accommodated and heat-treated in the reaction vessel while controlling a heating unit using calculation results obtained using at least the calculation parameter and deviation between a set temperature and a temperature detected in the heating unit by a temperature detector.
摘要翻译：提供了适于提高设备运行速率的基板处理装置，半导体装置制造方法和温度控制方法。计算参数计算单元使用由第一计算参数设定单元确定的至少第一计算参数校正值，基于反应容器上累积的膜厚计算计算参数，由第二计算参数设定确定的第二计算参数校正值基于填充晶片上的累积膜厚的单位和由第三计算参数设定单元基于填充晶片的数量确定的第三计算参数校正值。使用至少计算参数获得的计算结果和通过温度检测器在加热单元中检测到的设定温度和温度之间的偏差来控制加热单元，从而在反应容器中容纳和热处理产物和填料晶片。

3. 发明授权

US07654538B2 Gasket 有权
标题翻译：垫片
公开(公告)号：US07654538B2
公开(公告)日：2010-02-02
申请号：US10527480
申请日：2003-08-29
申请人： Nobuyuki Oka , Yoshifumi Kojima , Atsushi Koga , Kenichi Fujimoto , Kazuhisa Senda , Masayuki Kishimoto , Shunji Ueda , Nobuyuki Shintaku
发明人： Nobuyuki Oka , Yoshifumi Kojima , Atsushi Koga , Kenichi Fujimoto , Kazuhisa Senda , Masayuki Kishimoto , Shunji Ueda , Nobuyuki Shintaku
IPC分类号： F16J15/02 , G11B17/02
CPC分类号： F16J15/22 , F16J15/022
摘要： A high-performance gasket (1) capable of coping with a reduction in size and developing a sealing property without producing a squeeze-out at the time of attachment and using a material having a hardness range of 30 to 80 degrees (JIS durometer type A), wherein the requirement of W1/W0 =3 is satisfied where the length of the non-bonded portion of the base part (1a) around the cross-section thereof excluding the bonded portion is (L), and the compressibility of the gasket when compressed is 13.5% or higher.
摘要翻译：一种高性能垫圈（1），其能够在附着时使用硬度范围为30〜80度的材料（JIS硬度型A型）能够应对尺寸的减小和密封性的发展而不产生挤出），其中W1 / W0a）的要求为（W0），并且在从基部（1a）的接合部到主胎圈部（2）的前端的一半高度的位置处的宽度为（W1 ），主胎圈部（2）的前端部的要求为（1.15a）为（H），满足L /W0≥3的要求，其中，基部的非接合部的长度 1a）除了接合部分的横截面为（L）以外，压缩时的垫片的压缩率为13.5％以上。

4. 发明申请

US20080139357A1 Eccentric Oscillating-Typr Planetary Gear Device 有权
标题翻译：偏心振荡式行星齿轮装置
公开(公告)号：US20080139357A1
公开(公告)日：2008-06-12
申请号：US10597534
申请日：2005-01-28
申请人： Kenichi Fujimoto
发明人： Kenichi Fujimoto
IPC分类号： F16H1/32
CPC分类号： F16H1/32
摘要： Elastic deformation of bridge portions in an externally toothed gear and external teeth is suppressed, and this extends the life of tooth surfaces of external teeth 19, improves vibration characteristics, and markedly increases output torque while preventing a planetary gear device 11 from becoming large in size. To achieve the above, a ratio obtained by dividing the diameter D of each of pins constituting internal teeth 14 by the pitch P of the internal teeth 14 is made smaller to an extent where tooth tops 19a of the external teeth 19 are radially outside the inner periphery 15a of an internally toothed gear 15. Alternatively, a meeting point C where action lines S of reaction force K of drive force components meet is moved more radially outward compared with a known eccentric oscillating-type planetary gear device so as to be positioned between a pin circle P passing the centers of all the internal teeth (pins) 14 and an outer end passing circle G passing radially outer ends of through holes 22. In addition, the amount H of eccentricity of an externally toothed gear 18 relative to an internally toothed gear is set not less than 0.5 times the radius R of the internal teeth (pins) 14.
摘要翻译：抑制外齿齿轮和外齿的桥接部的弹性变形，延长外齿19的齿面的寿命，提高振动特性，显着提高输出转矩，同时防止行星齿轮装置11尺寸变大。为了实现上述目的，通过将构成内齿14的每个销的直径D除以内齿14的间距P而获得的比例被减小到外齿19的齿顶部19a径向地位于内齿齿轮15的内周15a。或者，与已知的偏心摆动型行星齿轮装置相比，驱动力分量的反作用力K的动作线S相遇的会合点C比已知的偏心摆动型行星齿轮装置更向径向向外移动，以便位于通过所有中心的销圈P之间内齿（销）14和外通过圆G通过通孔22的径向外端。此外，外齿齿轮18相对于内齿轮的偏心量H设定为不小于内齿（销）14的半径R的0.5倍。

5. 发明申请

US20070221448A1 Sealing material 审中-公开
公开(公告)号：US20070221448A1
公开(公告)日：2007-09-27
申请号：US11804513
申请日：2007-05-18
申请人： Masashi Kudo , Kenichi Fujimoto , Atsushi Koga , Yoshifumi Kojima , Osamu Ando , Yoshiki Nakagawa
发明人： Masashi Kudo , Kenichi Fujimoto , Atsushi Koga , Yoshifumi Kojima , Osamu Ando , Yoshiki Nakagawa
IPC分类号： C09K3/10 , F01M11/00
CPC分类号： F16J15/102 , C08F220/18 , C08G77/12 , C08L33/14 , C08L57/04 , C08L83/04 , C09J133/08 , C09K3/10 , C09K2200/0208 , C09K2200/0625 , F01M2011/0091 , F16J15/14 , C08L2666/04 , C08F2220/285 , C08F236/02
摘要： A sealing material, which comprises a curing product of a composition comprising (A) an acrylic polymer having at least one alkenyl group capable of undergoing hydrosilylation reaction, (B) a hydrosilyl group-containing compound and (C) a hydrosilylation catalyst as essential components, is suitable for use as cam cover seals and oil pan seals for automobile engines, fuel cell cooling medium seals, automobile wire harnesses seals, HDD cover gasket or vibration-insulating HDD cover gasket seals, etc.

6. 发明申请

US20050171288A1 Vibration absorption mount material 审中-公开
标题翻译：吸震安装材料
公开(公告)号：US20050171288A1
公开(公告)日：2005-08-04
申请号：US10506488
申请日：2003-10-03
申请人： Kenichi Fujimoto , Yoshifumi Kojima , Atsushi Koga , Yoshiki Nakagawa
发明人： Kenichi Fujimoto , Yoshifumi Kojima , Atsushi Koga , Yoshiki Nakagawa
IPC分类号： C08F8/42 , C08L83/04 , C08L83/05 , C08F2/00
CPC分类号： C08F8/42 , C08G77/12 , C08L33/00 , C08L83/04 , C08F20/00 , C08L83/00 , C08L2666/04
摘要： A material for vibration-absorbable mounts, which comprises a cured product of a composition comprising (A) an acrylic polymer having at least one alkenyl group capable of undergoing hydrosilylation reaction, (B) a hydrosilyl group-containing compound and (C) a hydrosilylation catalyst as essential components, has a distinguished vibration-absorbing characteristic such as a loss tangent (tan δ) of 0.5 or more, and also a distinguished heat resistance, and thus is sufficiently suitable for vibration-absorbable mounts for HDDs as mounted on automobiles. Furthermore, the material for vibration-absorbable mounts has distinguished heat resistance, oil resistance, vibration-absorbing characteristic, compression set characteristic, low hardness, cleanliness (out gassing property and non-corrosiveness), etc. and thus can be effectively used as vibration-absorbable mounts for electric and electronic parts provided with opto-magnetic drives, for example CD, DVD, HDD, etc. for automobiles, and also as vibration-absorbable pads, etc. for electric and electronic part units.
摘要翻译：一种用于可吸收吸收的安装件的材料，其包含组合物的固化产物，所述组合物包含（A）具有至少一个能够进行氢化硅烷化反应的烯基的丙烯酸聚合物，（B）含氢化硅烷基的化合物和（C）氢化硅烷化催化剂作为必要成分，具有显着的振动吸收特性，如损耗角正切（tanδ）为0.5以上，并且具有显着的耐热性，因此适用于安装在汽车上的HDD的吸振式安装。此外，吸振式安装用材料具有耐热性，耐油性，吸振特性，压缩永久变形特性，低硬度，清洁度（排气性，无腐蚀性）等优点，因此可有效地用作振动用于电气和电子部件的可吸收的安装件，其具有用于汽车的光磁驱动器，例如CD，DVD，HDD等，以及用于电气和电子部件单元的作为可吸振垫。

7. 发明申请

US20130250303A1 SPEED REDUCER FOR INDUSTRIAL ROBOT 有权
标题翻译：工业机器人减速机
公开(公告)号：US20130250303A1
公开(公告)日：2013-09-26
申请号：US13991132
申请日：2011-12-02
申请人： Takuya Shirata , Kenichi Fujimoto
发明人： Takuya Shirata , Kenichi Fujimoto
IPC分类号： G01N21/25
CPC分类号： G01N21/25 , B25J9/102 , B25J13/087 , B25J19/0062 , F16H57/0405 , G01N21/251 , G01N21/85 , G01N33/2888
摘要： A speed reducer for an industrial robot includes a speed reducer main body and a lubricant deterioration sensor for detecting deterioration of a lubricant in the speed reducer main body. The lubricant deterioration sensor includes a light emitting element for emitting light, a color light receiving element for detecting a color of received light, a clearance forming member forming an oil clearance in which the lubricant enters, and a support member supporting the light emitting element, the color light receiving element, and the clearance forming member. The clearance forming member is transmissive so that the light emitted from the light emitting element transmits therethrough. The oil clearance is provided on an optical path from the light emitting element to the color light receiving element
摘要翻译：用于工业机器人的减速器包括减速器主体和用于检测减速器主体中的润滑剂的劣化的润滑剂劣化传感器。润滑剂劣化传感器包括用于发光的发光元件，用于检测接收到的光的颜色的彩色光接收元件，形成润滑剂进入的油隙的间隙形成部件和支撑发光元件的支撑部件，彩色光接收元件和间隙形成元件。间隙形成构件是透射的，使得从发光元件发射的光透射通过。油间隙设置在从发光元件到彩色光接收元件的光路上

8. 发明申请

US20090014965A1 Sealing material 审中-公开
标题翻译：密封材料
公开(公告)号：US20090014965A1
公开(公告)日：2009-01-15
申请号：US12231978
申请日：2008-09-08
申请人： Masashi Kudo , Kenichi Fujimoto , Atsushi Koga , Yoshifumi Kojima , Osamu Ando , Yoshiki Nakagawa
发明人： Masashi Kudo , Kenichi Fujimoto , Atsushi Koga , Yoshifumi Kojima , Osamu Ando , Yoshiki Nakagawa
IPC分类号： F02F11/00 , C08F20/06
CPC分类号： F16J15/102 , C08F220/18 , C08G77/12 , C08L33/14 , C08L57/04 , C08L83/04 , C09J133/08 , C09K3/10 , C09K2200/0208 , C09K2200/0625 , F01M2011/0091 , F16J15/14 , C08L2666/04 , C08F2220/285 , C08F236/02
摘要： A sealing material, which comprises a curing product of a composition comprising (A) an acrylic polymer having at least one alkenyl group capable of undergoing hydrosilylation reaction, (B) a hydrosilyl group-containing compound and (C) a hydrosilylation catalyst as essential components, is suitable for use as cam cover seals and oil pan seals for automobile engines, fuel cell cooling medium seals, automobile wire harnesses seals, HDD cover gasket or vibration-insulating HDD cover gasket seals, etc.
摘要翻译：一种密封材料，其包含组合物的固化产物，所述组合物包含（A）具有至少一个能够进行氢化硅烷化反应的烯基的丙烯酸类聚合物，（B）含氢化硅烷基的化合物和（C）氢化硅烷化催化剂作为必需组分适用于汽车发动机的凸轮盖密封件和油盘密封件，燃料电池冷却介质密封件，汽车线束密封件，HDD盖垫片或隔振HDD盖垫圈密封件等。

9. 发明授权

US07099111B2 Hard disc drive cover-integrated gasket 有权
公开(公告)号：US07099111B2
公开(公告)日：2006-08-29
申请号：US11368875
申请日：2006-03-06
申请人： Yoshifumi Kojima , Kenichi Fujimoto , Atsushi Koga , Kazuhisa Senda
发明人： Yoshifumi Kojima , Kenichi Fujimoto , Atsushi Koga , Kazuhisa Senda
IPC分类号： G11B17/02
CPC分类号： G11B33/1466 , F16J15/102
摘要： A hard disc drive cover-integrated gasket, which comprises a metallic cover and a packing material integrated with the metallic cover, the packing material being a molding material from a mixture comprising 100 parts by weight of EPDM or a blend of EPDM and polystyrene type thermoplastic elastomer, 10–100 parts by weight of polypropylene type resin, 20–130 parts by weight of a plasticizer and 0.1–10 parts by weight of a cross-linking agent is easy to fabricate and has distinguished characteristics as low outgassing characteristics, low hardness, good sealability at elevated temperatures, etc.

10. 发明申请

US20060074170A1 Thermoplastic elastomer, composition, gasket, molded gasket and structure for sealing between two members 审中-公开
标题翻译：热塑性弹性体，组成，垫片，模压密封圈和两个构件之间的密封结构
公开(公告)号：US20060074170A1
公开(公告)日：2006-04-06
申请号：US10537918
申请日：2003-10-30
申请人： Yoshifumi Kojima , Atsushi Koga , Kenichi Fujimoto , Kazuhisa Senda
发明人： Yoshifumi Kojima , Atsushi Koga , Kenichi Fujimoto , Kazuhisa Senda
IPC分类号： C08K5/01
CPC分类号： G11B33/1466 , C08K5/14 , C08L23/02 , C08L23/16 , C08L2205/02 , F16J15/102 , F16J15/106 , F16J15/14 , C08L2666/06
摘要： According to the present invention, provided is a thermoplastic elastomer composition, comprising an ethylene-propylene-nonconjugated diene ternary copolymer or an ethylene-propylene binary copolymer, a crystalline polyolefin resin, a non-aromatic softening agent, and an organic peroxide, in which the crystalline polyolefin resin has from 0.1 g/10 min. to 100 g/10 min. of melt flow rate which is measured in accordance with JIS K7210 under conditions of 230° C. and 21.18 N and is contained in an amount of from 10 to 150 parts by weight every 100 parts by weight of the copolymer; the non-aromatic softening agent has a kinetic viscosity of 300 mm2/s or more at 40° C. and is contained in an amount of from 20 to 150 parts by weight every 100 parts by weight of the copolymer; the organic peroxide is contained in an amount of from 0.1 to 10 parts by weight every 100 parts by weight of the copolymer; and hardness measured by a JIS type A durometer is from 30 to 70 degrees. According to the present invention provided are a thermoplastic elastomer composition, a gasket, a molded gasket, and a sealing structure between two members, in which a quality such as sealability has been improved, and, further, provided are a molded gasket, and a sealing structure between two members, in which a production process has been simplified.
摘要翻译：根据本发明，提供一种热塑性弹性体组合物，其包含乙烯 - 丙烯 - 非共轭二烯三元共聚物或乙烯 - 丙烯二元共聚物，结晶聚烯烃树脂，非芳族软化剂和有机过氧化物，其中结晶聚烯烃树脂具有0.1g / 10min。至100g / 10分钟。的熔体流动速率，其在230℃和21.18N的条件下根据JIS K7210测量，并且每100重量份共聚物含有10至150重量份的量; 非芳香族软化剂在40℃下的动力粘度为300mm 2 / s以上，相对于每100重量份的非芳香族软化剂的含量为20〜150重量份共聚物; 有机过氧化物的含量为每100重量份共聚物0.1至10重量份; 并且通过JIS A型硬度计测量的硬度为30至70度。根据本发明，提供了两种构件之间的热塑性弹性体组合物，垫圈，模制垫圈和密封结构，其中诸如密封性的质量已被改善，并且还提供了模制垫圈，以及两个构件之间的密封结构，其中生产过程已被简化。

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