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    • 2. 发明申请
    • BOUNDARY ACOUSTIC WAVE DEVICE
    • 边界声波装置
    • US20090174284A1
    • 2009-07-09
    • US12409702
    • 2009-03-24
    • Masakazu MIMURAYasuhisa FUJIIMasaru YATANorihiko NAKAHASHI
    • Masakazu MIMURAYasuhisa FUJIIMasaru YATANorihiko NAKAHASHI
    • H03H9/25H01L41/04
    • H03H9/0222H03H9/02559H03H9/14541
    • A boundary acoustic wave device includes a piezoelectric substance made of LiNbO3 having a surface obtained by rotating a Y axis by about 15°±10° as a primary surface, a dielectric substance which is made of a silicon oxide and which is laminated to the piezoelectric substance, and an electrode structure which is disposed at a boundary between the piezoelectric substance and the dielectric substance and which includes an IDT arranged to utilize a boundary acoustic wave propagating along the boundary. When the density of the IDT, the thickness thereof, the wavelength determined by the period of electrode fingers of the IDT, and the duty ratio thereof are represented by ρ (kg/m3), H (μm), λ(μm), and x, respectively, x and the product of H/λ and ρ are set in a range that satisfies the following formula (1): (H/λ)×ρ>70.7924(x+0.055)(−2.0884)+797.09  Formula (1).
    • 一种弹性边界波装置包括由具有通过使Y轴旋转大约15°±10°获得的表面的LiNbO 3制成的压电物质作为主表面,由氧化硅制成并且被压电 物质和设置在压电体和电介质物质之间的边界处的电极结构,并且包括设置成利用沿边界传播的边界声波的IDT。 当IDT的密度,其厚度,由IDT的电极指的周期确定的波长及其占空比由rho(kg / m3),H(mum),λ(mum)和 x,并且H /λ和rho的乘积被设定在满足下式(1)的范围内:<?in-line-formula description =“In-line Formulas”end =“lead”?> (H /λ)×70.7924(x + 0.055)( - 2.0884)+797.09式(1)。<?in-line-formula description =“In-line Formulas”end =“tail”?>
    • 4. 发明申请
    • ACOUSTIC WAVE DEVICE
    • 声波设备
    • US20100187947A1
    • 2010-07-29
    • US12691791
    • 2010-01-22
    • Masakazu MIMURA
    • Masakazu MIMURA
    • H01L41/04H01L41/047H01L41/08
    • H03H9/02669H03H9/0222H03H9/02559H03H9/02834H03H9/131
    • An acoustic wave device having an improved frequency-temperature characteristic and in which a spurious response of the higher order mode is suppressed includes a piezoelectric substrate made of LiNbO3, a SiO2 layer laminated on the piezoelectric substrate, and an IDT electrode disposed in an interface of the piezoelectric substrate and the SiO2 layer, wherein φ and θ of Euler angles expressed by (φ, θ, ψ) of LiNbO3 substrate satisfy φ=0° and 80°≦θ≦130°, respectively. The acoustic wave device using an acoustic wave primarily having an SH wave, wherein ψ is set to satisfy 5°≦ψ≦30°.
    • 具有改善的频率 - 温度特性并且其中高阶模式的杂散响应被抑制的声波装置包括由LiNbO 3制成的压电基板,层叠在压电基板上的SiO 2层和设置在压电基板的界面中的IDT电极 压电衬底和SiO 2层,其中&phgr; 和&thetas; 由LiNbO3衬底的(&phgr;&amp; tt;ψ)表示的欧拉角分别满足&= = 0°和80°&nlE;&amp; the; nlE; 130°。 使用主要具有SH波的声波的声波装置,其中ψ被设定为满足5°&lt; nlE;ψ&nlE; 30°。
    • 5. 发明申请
    • BOUNDARY ACOUSTIC WAVE DEVICE
    • 边界声波装置
    • US20090302709A1
    • 2009-12-10
    • US12545229
    • 2009-08-21
    • Masakazu MIMURA
    • Masakazu MIMURA
    • H01L41/04
    • H03H9/0222H03H9/02559H03H9/14538
    • A boundary acoustic wave device is capable of reducing insertion loss and the absolute value of the temperature coefficient of frequency (TCF). The boundary acoustic wave device utilizes a boundary acoustic wave propagating along the interface between a piezoelectric substance and a dielectric substance. The piezoelectric substance has a negative temperature coefficient of frequency and the dielectric substance has a positive temperature coefficient of frequency. IDT electrodes include a first conductive layer arranged on a side of the piezoelectric substance, a third conductive layer arranged on a side of the dielectric substance, and a second conductive layer arranged between the first and third conductive layers and composed of a metal having a lower density than those of the first and third conductive layers or an alloy primarily containing the metal. If thicknesses of the first, second, and third conductive layers are H1, H2, and H3, and a period of the IDT electrodes is λ, 0.04λ 0.009λ, H3>0.022λ, and 0.05λ
    • 一种边界声波装置能够降低插入损耗和频率温度系数(TCF)的绝对值。 弹性边界波装置利用沿着压电物质和介电物质之间的界面传播的边界声波。 压电体具有负温度系数,电介质具有正温度系数。 IDT电极包括布置在压电体的一侧的第一导电层,布置在电介质物质一侧的第三导电层,以及布置在第一和第三导电层之间的第二导电层,并且由具有较低 密度高于第一和第三导电层或主要含有金属的合金。 如果第一,第二和第三导电层的厚度为H1,H2和H3,并且IDT电极的周期为λ,则λλ

      0.009λ,H3>0.022λ, 和0.05λ