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    • 1. 发明授权
    • Process for preparing semiconductor device using a tunnel oxidized layer
    • 使用隧道氧化层制备半导体器件的方法
    • US5476799A
    • 1995-12-19
    • US67788
    • 1993-05-27
    • Masaru SakamotoMasakazu MorishitaShigeru Nishimura
    • Masaru SakamotoMasakazu MorishitaShigeru Nishimura
    • H01L21/20H01L21/225H01L21/285H01L21/3215H01L21/22
    • H01L21/32155H01L21/2022H01L21/2257H01L21/28525Y10S148/123Y10S438/923
    • A process for preparing a semiconductor device forms an insulating thin film capable of tunnelling phenomenon of carriers on a semiconductor substrate and forms a polycrystalline semiconductor layer on the thin film. An impurity is injected to the surface of the polycrystalline semiconductor layer, the diffusion coefficient to the thin film being smaller than that to the polycrystalline semiconductor layer. The process effects a first heat treatment at a temperature of 800.degree. C. or less to diffuse the impurity injected into the polycrystalline semiconductor layer in the polycrystalline semiconductor layer, thereby forming a uniform or substantially uniform impurity containing region at least at the thin film side of the polycrystalline semiconductor layer, and, effects a second heat treatment the temperature of which is 950.degree. C. or less and higher than the temperature of the first heat treatment to diffuse the impurity present in the polycrystalline semiconductor layer into the semiconductor substrate through the thin film, thereby forming a diffused layer.
    • 制备半导体器件的方法形成能够在半导体衬底上具有载流子隧道现象的绝缘薄膜,并在薄膜上形成多晶半导体层。 向多晶半导体层的表面注入杂质,对薄膜的扩散系数小于多晶半导体层的扩散系数。 该处理在800℃以下的温度下进行第一次热处理,以使在多晶半导体层中注入多晶半导体层的杂质扩散,至少在薄膜侧形成均匀或基本上均匀的含杂质区域 的多晶半导体层,并且进行第二热处理,其温度为950℃以下且高于第一热处理的温度,以将存在于多晶半导体层中的杂质扩散到半导体衬底中,通过 薄膜,从而形成扩散层。
    • 5. 发明授权
    • Photoelectric conversion apparatus and photoelectric conversion system having the apparatus
    • 具有该装置的光电转换装置和光电转换系统
    • US08488037B2
    • 2013-07-16
    • US13452755
    • 2012-04-20
    • Tadao EndoNoriyuki KaifuToshiaki SatoMasakazu Morishita
    • Tadao EndoNoriyuki KaifuToshiaki SatoMasakazu Morishita
    • H04N3/14
    • H04N5/363H01L27/14609H04N5/32H04N5/335H04N5/365H04N5/3742H04N5/378
    • In order to provide a photoelectric conversion apparatus, which is an apparatus excellent in reading speed, high S/N, high tone level, and low cost, the photoelectric conversion apparatus has a photoelectric conversion circuit section comprising a plurality of photoelectric conversion elements, switching elements, matrix signal wires, and gate drive wires arranged on a same substrate in order to output parallel signals, a driving circuit section for applying a driving signal to the gate drive wire, and a reading circuit section for converting the parallel signals transferred through the matrix signal wires to serial signals to output them, wherein the reading circuit section comprises at least one analog operational amplifier connected with each of the matrix signal wires, transfer switches for transferring output signals from the respective matrix signal wires, output through each amplifier, reading capacitors, and reading switches for successively reading the signals out of the reading capacitors in the form of serial signals.
    • 为了提供一种光电转换装置,其是读取速度高,S / N高,色调级高,成本低的装置,具有包含多个光电转换元件的光电转换电路部,切换 为了输出并行信号而配置在同一基板上的元件,矩阵信号线和栅极驱动线,用于向栅极驱动线施加驱动信号的驱动电路部,以及用于将通过 矩阵信号线连接到串行信号以输出它们,其中读取电路部分包括与每个矩阵信号线连接的至少一个模拟运算放大器,用于传送来自各个矩阵信号线的输出信号的转换开关,通过每个放大器输出的读数 电容器和读取开关,用于连续读取readi中的信号 串联信号形式的电容器。
    • 10. 发明授权
    • Image pickup apparatus and radiation image pickup apparatus
    • 图像拾取装置和放射线图像拾取装置
    • US07557355B2
    • 2009-07-07
    • US11229630
    • 2005-09-20
    • Chiori MochizukiMasakazu MorishitaKeiichi NomuraMinoru WatanabeTakamasa Ishii
    • Chiori MochizukiMasakazu MorishitaKeiichi NomuraMinoru WatanabeTakamasa Ishii
    • H01L27/146
    • H01L27/14609H01L27/14636H01L27/14676
    • To improve a sensor resetting method and thereby implement a high rate at which a moving image is read, the invention provides an image pickup apparatus and a radiation image pickup apparatus including: a plurality of pixels arranged on a substrate in row and column directions, each pixel having a conversion element and a transfer switching element; a drive wiring connected to a plurality of the transfer switching elements in the row direction; and a conversion element wiring connected to a plurality of the conversion elements in the row direction, wherein a reset switching element is disposed between the conversion element wiring and a reset wiring for supplying a reset voltage for resetting the conversion element, and a bias switching element is disposed between the conversion element wiring and a bias wiring for supplying a bias voltage for operating the conversion element.
    • 为了改善传感器复位方法,从而实现读取运动图像的高速率,本发明提供一种图像拾取装置和放射线图像拾取装置,包括:沿行和列方向排列在基板上的多个像素,每个 像素,具有转换元件和转印开关元件; 在行方向上与多个所述转印开关元件连接的驱动配线; 以及在行方向上连接到多个转换元件的转换元件布线,其中复位开关元件设置在转换元件布线和用于提供用于复位转换元件的复位电压的复位布线之间,偏置开关元件 设置在转换元件布线和用于提供用于操作转换元件的偏置电压的偏置布线之间。