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    • 8. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20080036042A1
    • 2008-02-14
    • US11889210
    • 2007-08-09
    • Hikari SanoMasao TakahashiHiroshige HiranoKoji Takemura
    • Hikari SanoMasao TakahashiHiroshige HiranoKoji Takemura
    • H01L23/544
    • H01L23/585H01L21/78H01L2924/0002H01L2924/00
    • A semiconductor device includes: a circuit region having a function element formed on a semiconductor substrate; a scribe region located between the circuit region and another circuit region formed spaced from the circuit region, the scribe region including a cutting region and non-cutting regions provided at both sides of the cutting region; a first interlayer insulating film formed in the scribe region on the semiconductor substrate; a first dummy pattern made of conductive material and formed in the first interlayer insulating film in the cutting region; and a second dummy pattern made of conductive material and formed in the first interlayer insulating film in each of the non-cutting regions. The ratio, per unit area, of the area of the first dummy pattern to the area of the cutting region is lower than the ratio, per unit area, of the area of the second dummy pattern to the area of the non-cutting regions.
    • 半导体器件包括:具有形成在半导体衬底上的功能元件的电路区域; 位于所述电路区域和与所述电路区域间隔开的另一电路区域之间的划线区域,所述划线区域包括切割区域和设置在所述切割区域两侧的非切割区域; 形成在半导体衬底上的划线区域中的第一层间绝缘膜; 由导电材料制成并形成在切割区域中的第一层间绝缘膜中的第一虚设图形; 以及由导电材料制成并形成在每个非切割区域中的第一层间绝缘膜中的第二虚设图案。 第一虚设图形的面积与切割区域的面积的单位面积的比率低于第二虚拟图案的面积与非切割区域的面积的每单位面积的比率。