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    • 1. 发明授权
    • Semiconductor processing apparatus
    • 半导体处理装置
    • US5445675A
    • 1995-08-29
    • US87873
    • 1993-07-09
    • Masao KuboderaShigeru KasaiHatsuo Osada
    • Masao KuboderaShigeru KasaiHatsuo Osada
    • C23C16/48C23C16/52C23C16/00
    • C23C16/52C23C16/48C23C16/481
    • A semiconductor processing apparatus comprises a vacuum processing chamber and a lamp house provided thereunder. A susceptor is provided in the processing chamber, and a semiconductor wafer is mounted thereon. The processing chamber and the lamp house are partitioned by a widow plate made of quartz glass in an airtight state. Eight light sources for heating are arranged in a circumferential form on a rotatable table at the portion which is in the lamp house and under the window plate. A sensor comprising a thermocouple for detecting energy of transmitted light is provided between the susceptor and the window plate. The sensor is connected to a measuring section comprising an A/D converter, and thereby detected data is converted from a digital signal to an observed value. The observed value is sent to a comparator to be compared with a predetermined reference model. A comparative result obtained by the comparator is transmitted to a controlling section. The control section induces the state of the window plate from the comparative result, and stops the power supply to the light source when the detected energy of the transmitted light is lower than a predetermined limit.
    • 半导体处理装置包括设在其下方的真空处理室和灯室。 在处理室中设置感受体,并且在其上安装半导体晶片。 处理室和灯室由密封状态的石英玻璃制成的寡妇隔板。 八个用于加热的光源以圆周形式布置在位于灯室中的部分和窗板下方的可旋转台上。 包括用于检测透射光能量的热电偶的传感器设置在基座和窗板之间。 传感器连接到包括A / D转换器的测量部分,从而将数据从数字信号转换成观测值。 观察值被发送到比较器以与预定的参考模型进行比较。 由比较器获得的比较结果被传送到控制部分。 控制部从比较结果引导窗板的状态,当检测到的透射光的能量低于预定极限时,停止对光源的供电。
    • 6. 发明授权
    • EGR control system for internal combustion engine
    • 内燃机EGR控制系统
    • US06298835B1
    • 2001-10-09
    • US09580455
    • 2000-05-30
    • Kaoru HorieHitoshi TakahashiMichio ShinoharaMasao KuboderaHiromi Matsuura
    • Kaoru HorieHitoshi TakahashiMichio ShinoharaMasao KuboderaHiromi Matsuura
    • F02M2507
    • F02D21/08F02B17/005F02D41/3029F02D41/307F02M26/39F02M26/48F02M26/53
    • An EGR control system for a direct injection spark ignition engine operated at a plurality of the combustion modes comprising stratified-charge combustion and premix-charge combustion. The system includes a flow rate control valve equipped at the EGR passage to regulate flow rate of the exhaust gas to be recirculated which is operated when the one combustion mode is determined to be changed to another of a plurality of the combustion modes, thereby ensuring an EGR amount that is neither deficient nor excessive for the combustion mode, while preventing misfire from happening and preventing the degradation of drivability, fuel economy and emission performance from occurring. Alternatively, the system includes an actuator for regulating an opening of a throttle valve or a second EGR control valve installed in a branch passage and a passage switching valve for switching the EGR passage and the branch passage.
    • 一种用于直接喷射火花点火发动机的EGR控制系统,其以多个燃烧模式操作,包括分层充气燃烧和预混燃料燃烧。 该系统包括设置在EGR通道处的流量控制阀,以调节当将一个燃烧模式改变为多个燃烧模式中的另一个时操作的待循环废气的流量,从而确保 EGR量对于燃烧模式既不缺乏也不过度,同时防止发生失火,并且防止发生驾驶性能,燃料经济性和排放性能的劣化。 或者,该系统包括用于调节安装在分支通道中的节流阀或第二EGR控制阀的开度的致动器和用于切换EGR通道和分支通道的通道切换阀。
    • 7. 发明授权
    • Multi-chamber system provided with carrier units
    • 多室系统配有承载单元
    • US5474410A
    • 1995-12-12
    • US212821
    • 1994-03-14
    • Masahito OzawaMasami MizukamiMasanobu KanazashiToshihiko TakasoeMasaki NarushimaMasao Kubodera
    • Masahito OzawaMasami MizukamiMasanobu KanazashiToshihiko TakasoeMasaki NarushimaMasao Kubodera
    • H01L21/00H01L21/677H01L21/68B65G1/06
    • H01L21/67167H01L21/67766H01L21/67775H01L21/681Y10S414/136Y10S414/137Y10S414/139Y10S414/14
    • A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof. A second arm is arranged substantially parallel to the first arm and fixed to the third shaft member at the front end thereof and to the fourth shaft member at the base end thereof. When the first and second arms are swung, the hand is swung in a direction reverse to the direction in which the first and second arms are swung.
    • 用于将容纳多个基板的盒带入和插入多室系统的盒室中的盒式载体单元,其包括安装有盒的手。 用于支撑可摆动的手的多连接臂,以及支撑多重可摆动臂的基座。 所述多接合臂包括可旋转地附接到所述手的第一轴构件,可旋转地附接到所述基座的第二轴构件,与所述第一轴构件旋转相关联但与所述第一轴构件的方向相反的方向旋转的第三轴构件 构件旋转,第四轴构件可旋转地安装到基座并且传递旋转驱动力。 第一臂在其前端处可旋转地附接到第一轴构件,并且在其基端处可旋转地附接到第二轴构件。 第二臂基本上平行于第一臂布置并在其前端固定到第三轴构件,并在其基端固定到第四轴构件。 当第一和第二臂摆动时,手沿与第一和第二臂摆动的方向相反的方向摆动。
    • 10. 发明授权
    • Engine control apparatus
    • 发动机控制装置
    • US06283086B1
    • 2001-09-04
    • US09672056
    • 2000-09-29
    • Kazuhisa YamamotoMasao KuboderaTakeo Kiuchi
    • Kazuhisa YamamotoMasao KuboderaTakeo Kiuchi
    • F02D2902
    • B60K6/543B60W2550/20F02D17/04F02D29/02F02N11/0837F02N2200/123F02N2200/125Y02T10/48Y10S903/903Y10S903/918
    • An engine control apparatus is provided that is capable of improving drivability and reducing the volume of exhaust gas expelled. In the engine control apparatus of the present invention, it is determined whether or not a vehicle is stopped. When the vehicle has stopped, it is determined whether or not it is possible to acquire road traffic information, for example, including traffic congestion information and the like, and traveling conditions information, for example, including the current position of the vehicle and information on a route to a destination. When it is possible to acquire this information, a determination is made as to whether or not the current position of the vehicle is within a traffic congested area based on the road traffic information and the traveling conditions information. If the vehicle is within a traffic congested area, stopping of the operation of the engine is prohibited.
    • 提供一种发动机控制装置,其能够改善驱动能力并减少排出的废气的体积。 在本发明的发动机控制装置中,判断车辆是否停止。 当车辆停止时,判定是否可以获取例如包括交通拥堵信息等的道路交通信息,以及行驶条件信息,例如包括车辆的当前位置和关于 到达目的地的路线。 当可以获取该信息时,基于道路交通信息和行驶条件信息确定车辆的当前位置是否在交通拥堵区域内。 如果车辆在交通拥堵区域内,则禁止​​停止发动机的运转。