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1. 发明申请

US20060033389A1 Driving mechanism and micro-mirror device provided with the same 失效
标题翻译：驱动机构和微镜装置相同
公开(公告)号：US20060033389A1
公开(公告)日：2006-02-16
申请号：US11201316
申请日：2005-08-11
申请人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
发明人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
IPC分类号： H02K7/00 , G02B7/198
CPC分类号： H02N1/008 , G02B26/0841 , H02K2201/18
摘要： A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.
摘要翻译：相对于框架构件围绕预定转动轴线转动板状构件的驱动机构包括支撑板构件的一对支撑构件，设置在相对于转动轴线的两侧和相同表面上的一对致动器侧板。每个致动器包括固定到框架构件的固定电极单元和固定到板构件的可动电极单元。固定电极单元包括基板，设置在基板的两个表面侧上的一对固定梳电极。可动电极单元包括一对可动梳状电极，每一个可动梳状电极与对应的固定梳状电极接合，并在其间具有间隙。固定梳状电极和对应的可动梳状电极的两对被配置成可以独立地施加电压。

2. 发明申请

US20050179981A1 Micromirror device 失效
标题翻译：微镜装置
公开(公告)号：US20050179981A1
公开(公告)日：2005-08-18
申请号：US11036983
申请日：2005-01-19
申请人： Masanori Maeda , Satoshi Karasawa , Rogerio Mizuno , Naoki Kikuchi
发明人： Masanori Maeda , Satoshi Karasawa , Rogerio Mizuno , Naoki Kikuchi
IPC分类号： G02B26/08 , B81B3/00 , G02B26/00
CPC分类号： G02B26/0841 , G02B21/0048 , Y10S359/904
摘要： There is provided a micromirror device, which is provided with a mirror layer including a mirror surface which is supported to be rotatable around a first axis passing through a center of the mirror surface, and an upper substrate having transparency including a first upper electrode part and a second upper electrode part arranged on its surface facing the mirror layer to face each other via a first upper boundary passing through a center of the surface and parallel to the first axis, and a lower substrate including a first lower electrode part and a second lower electrode part arranged on its surface facing the mirror layer to face each other via a first lower boundary passing through a center of the surface and parallel to the first axis. The upper substrate is stacked on one side of the mirror layer while securing a first space between the center of the mirror surface and the first and second upper electrode parts, while the lower substrate is stacked on the other side of the mirror layer while securing a second space between the center of the mirror surface and the first and second lower electrode parts. The mirror surface is rotated around the first axis by applying voltage to a pair of the electrodes placed diagonally with respect to the first axis.
摘要翻译：提供了一种微反射镜装置，该微反射镜装置具有：镜面，该反射镜层被支撑为能够围绕通过反射镜表面的中心的第一轴线旋转;以及上部基板，具有包括第一上部电极部分和第二上电极部分，其布置在其面向镜层的表面上，经由穿过表面的中心并平行于第一轴线的第一上边界彼此面对;以及下基板，包括第一下电极部分和第二下电极部分电极部分布置在其面向镜子层的表面上，经由穿过表面的中心并平行于第一轴线的第一下边界彼此面对。将上基板堆叠在镜面层的一侧，同时确保镜面中心与第一和第二上电极部分之间的第一空间，同时将下基板层叠在镜层的另一侧上，同时确保镜面中心与第一和第二下部电极部分之间的第二空间。通过向相对于第一轴线对角放置的一对电极施加电压，使镜面围绕第一轴旋转。

3. 发明申请

US20060152793A1 Micromirror device 失效
标题翻译：微镜装置
公开(公告)号：US20060152793A1
公开(公告)日：2006-07-13
申请号：US11373269
申请日：2006-03-13
申请人： Masanori Maeda , Satoshi Karasawa , Rogerio Mizuno , Naoki Kikuchi
发明人： Masanori Maeda , Satoshi Karasawa , Rogerio Mizuno , Naoki Kikuchi
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B21/0048 , Y10S359/904
摘要： There is provided a micromirror device, which is provided with a mirror layer including a mirror surface which is supported to be rotatable around a first axis passing through a center of the mirror surface, and an upper substrate having transparency including a first upper electrode part and a second upper electrode part arranged on its surface facing the mirror layer to face each other via a first upper boundary passing through a center of the surface and parallel to the first axis, and a lower substrate including a first lower electrode part and a second lower electrode part arranged on its surface facing the mirror layer to face each other via a first lower boundary passing through a center of the surface and parallel to the first axis. The upper substrate is stacked on one side of the mirror layer while securing a first space between the center of the mirror surface and the first and second upper electrode parts, while the lower substrate is stacked on the other side of the mirror layer while securing a second space between the center of the mirror surface and the first and second lower electrode parts. The mirror surface is rotated around the first axis by applying voltage to a pair of the electrodes placed diagonally with respect to the first axis.
摘要翻译：提供了一种微反射镜装置，该微反射镜装置具有：镜面，该反射镜层被支撑为能够围绕通过反射镜表面的中心的第一轴线旋转;以及上部基板，具有包括第一上部电极部分和第二上电极部分，其布置在其面向镜层的表面上，经由穿过表面的中心并平行于第一轴线的第一上边界彼此面对;以及下基板，包括第一下电极部分和第二下电极部分电极部分布置在其面向镜子层的表面上，经由穿过表面的中心并平行于第一轴线的第一下边界彼此面对。将上基板堆叠在镜面层的一侧，同时确保镜面中心与第一和第二上电极部分之间的第一空间，同时将下基板层叠在镜层的另一侧上，同时确保镜面中心与第一和第二下部电极部分之间的第二空间。通过向相对于第一轴线对角放置的一对电极施加电压，使镜面围绕第一轴旋转。

4. 发明申请

US20060018049A1 Hinge structure of micromirror device 失效
标题翻译：微镜装置的铰链结构
公开(公告)号：US20060018049A1
公开(公告)日：2006-01-26
申请号：US11187984
申请日：2005-07-25
申请人： Rogerio Mizuno
发明人： Rogerio Mizuno
IPC分类号： G02B7/182
CPC分类号： G02B26/0858 , G02B26/0841 , G02B26/085 , Y10T16/521 , Y10T16/525 , Y10T16/538 , Y10T16/5382 , Y10T16/5472
摘要： A hinge structure includes a rotatable plate member, a frame member, a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis. The spring member includes a first axial section, a second axial section. An end of the first axial section is connected to the frame member, and an end of the second axial section is connected to the rotatable plate member. The spring member includes a first zigzag section and a second zigzag section formed on opposite sides with respect to the rotation axis, each of the first and second zigzag sections including parallel portions which are parallel with each other and with the rotation axis and bent portions each connecting adjacent parallel portions. A predetermined gap between the first and second axial section is smaller than a length of the parallel portions.
摘要翻译：铰链结构包括可旋转板构件，框架构件，弹簧构件，其沿着旋转轴线在两个相对位置的每一个处将可旋转板构件与框架构件连接。弹簧构件包括第一轴向部分，第二轴向部分。第一轴向部分的端部连接到框架构件，并且第二轴向部分的端部连接到可旋转板构件。弹簧构件包括相对于旋转轴线形成在相对侧上的第一曲折部分和第二锯齿形部分，第一和第二锯齿形部分中的每一个包括平行部分，它们彼此平行并且具有旋转轴线和弯曲部分连接相邻的平行部分。第一和第二轴向部分之间的预定间隙小于平行部分的长度。

5. 发明申请

US20050162729A1 Hinge structure of micromirror device 失效
标题翻译：微镜装置的铰链结构
公开(公告)号：US20050162729A1
公开(公告)日：2005-07-28
申请号：US11042157
申请日：2005-01-26
申请人： Rogerio Mizuno
发明人： Rogerio Mizuno
IPC分类号： B41J2/44 , B81B3/00 , G02B26/08 , G02B26/10 , G02B26/00
CPC分类号： B81B3/0062 , B81B2201/042 , G02B26/0841
摘要： A hinge structure, for rotatably supporting a mirror surface of a micromirror device which rotates the mirror surface around at least an axis for scanning a beam, includes a linear body with one end joined to a surface which is rotated around the axis and the other end joined to a surface which does not rotate around the axis. The linear body includes a linear central part situated on the axis and a pair of extension parts extending from both ends of the central part to both ends of the linear body respectively to surround the central part in the same direction. The extension parts are formed so that space between them will be substantially constant. By the above composition, the hinge structure delivers high spring performance while being small-sized.
摘要翻译：一种用于可旋转地支撑微反射镜装置的镜面的铰链结构，所述微反射镜装置将镜表面围绕至少一个用于扫描光束的轴线旋转，所述微镜装置包括线性主体，其一端连接到围绕轴线旋转的表面，另一端连接到不围绕轴旋转的表面。线状体包括位于轴线上的直线中心部分和从中心部分两端延伸到线状体两端的一对延伸部分，以分别围绕相同方向的中心部分。延伸部分形成为使得它们之间的空间将基本恒定。通过上述组合，铰链结构在小尺寸的情况下提供高弹簧性能。

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