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1. 发明申请

US20140186162A1 ROTATION MECHANISM FOR GAS EXHAUST PUMP, MANUFACTURING METHOD OF THE SAME, GAS EXHAUST PUMP HAVING ROTATION MECHANISM, AND MANUFACTURING METHOD OF THE SAME 审中-公开
标题翻译：用于排气泵的旋转机构，其制造方法，具有旋转机构的气体排气泵及其制造方法
公开(公告)号：US20140186162A1
公开(公告)日：2014-07-03
申请号：US14131299
申请日：2012-06-27
申请人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu , Hajime Iizuka
发明人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu , Hajime Iizuka
IPC分类号： F01D5/02
CPC分类号： F01D5/02 , F04C18/16 , F04C25/02 , F04C27/009 , F04C29/023 , F04C2220/30 , F04C2230/91 , Y10T29/49236
摘要： In a gas exhaust pump, there is provided a rotation mechanism that can ensure safe rotation and can greatly reduce the usage of a seal gas. A rotation mechanism of the present invention is formed of a rotating shaft and a seal housing. Between the rotating shaft and the seal housing, there is provided a predetermined gap. On at least one of an outer surface of the rotating shaft and an inner surface of the seal housing, there is provided a PFA film. As to a PFA film on a surface of at least one of the rotating shaft and the seal housing, after coating with PFA the wall surface of the rotation mechanism member defining at least the gap, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.
摘要翻译：在排气泵中，设置有能够确保安全旋转的旋转机构，能够大幅度减少密封气体的使用。本发明的旋转机构由旋转轴和密封壳构成。在旋转轴和密封壳体之间，提供预定间隙。在旋转轴的外表面和密封壳体的内表面中的至少一个上，设置有PFA膜。对于至少一个旋转轴和密封壳体的表面上的PFA膜，在用PFA涂覆之后，旋转机构构件的壁表面至少限定间隙，然后熔融和重熔过程，PFA膜是形成在其自由表面上具有高平滑度。

2. 发明申请

US20140161600A1 STATOR FOR GAS EXHAUST PUMP, METHOD FOR MANUFACTURING THE SAME, PUMP HAVING THE STATOR, AND MANUFACTURING METHOD AND ASSEMBLING METHOD OF THE SAME 审中-公开
标题翻译：用于排气泵的定子，其制造方法，具有定子的泵以及制造方法及其组装方法
公开(公告)号：US20140161600A1
公开(公告)日：2014-06-12
申请号：US14233475
申请日：2012-06-27
申请人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
发明人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
IPC分类号： F04D3/02
CPC分类号： F04D3/02 , F04C18/086 , F04C18/16 , F04C25/02 , F04C27/004 , F04C2230/602 , F04C2230/91 , F05C2225/00 , Y10T29/49236
摘要： There is provided a stator that can ensure safe rotation even if a width of a gap between a screw rotor and a stator is particularly smaller than that of a conventional one and can greatly increase a pumping performance of a pump. A stator of the present invention is formed of a metal and a PFA film is provided on an inner wall surface of a top end surface of a screw rotor. After coating the inner wall surface with PFA, followed by melting and remelting processes, the PFA film is formed to have a high smoothness. The stator is placed with a gap between the inner wall surface and the top end surface. If the PFA film of the present invention is provided in a predetermined manner, the width of the gap can be made significantly smaller than that of a conventional one.
摘要翻译：即使螺杆转子和定子之间的间隙的宽度特别小于常规的定子，也能够确保安全旋转的定子，能够大大提高泵的泵送性能。本发明的定子由金属形成，PFA膜设置在螺杆转子的顶端面的内壁面上。在用PFA涂覆内壁表面之后，再熔化和重熔工艺，形成PFA膜具有高平滑度。定子以内壁表面和顶端表面之间的间隙放置。如果以预定的方式设置本发明的PFA膜，则可以使间隙的宽度显着小于常规宽度。

3. 发明授权

US09957406B2 Method for smoothing a perfluoro alkoxy alkane film surface 有权
公开(公告)号：US09957406B2
公开(公告)日：2018-05-01
申请号：US14638391
申请日：2015-03-04
申请人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
发明人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
IPC分类号： C09D129/10 , B05D3/02 , F04C18/16 , F01C21/08 , F04C2/12 , F04C27/00
CPC分类号： C09D129/10 , B05D3/0209 , B05D3/0254 , F01C21/08 , F04C2/126 , F04C18/16 , F04C27/001 , F04C2230/602 , F04C2230/91 , F05C2225/04
摘要： Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.

4. 发明申请

US20150225593A1 METHOD FOR SMOOTHING A PERFLUORO ALKOXY ALKANE FILM SURFACE 有权
标题翻译：用于吸收全氟烷氧基烷烃薄膜表面的方法
公开(公告)号：US20150225593A1
公开(公告)日：2015-08-13
申请号：US14638391
申请日：2015-03-04
申请人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
发明人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
IPC分类号： C09D129/10 , B05D3/02 , F04C18/16
CPC分类号： C09D129/10 , B05D3/0209 , B05D3/0254 , F01C21/08 , F04C2/126 , F04C18/16 , F04C27/001 , F04C2230/602 , F04C2230/91 , F05C2225/04
摘要： Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.
摘要翻译：通过将组分依次暴露于高于其熔融温度的温度，以至少熔化自由表面积，降低温度以使熔融部分固化，从而提高PFA膜的自由表面积的平滑度，通过将其暴露于至少PFA熔融温度的温度并再次降低温度来重熔自由表面积。 PFA膜可以设置在Al 2 O 3，Ni或NiF 2膜上。

5. 发明申请

US20140193283A1 GAS EXHAUST PUMP SYSTEM AND GAS EXHAUST METHOD 审中-公开
标题翻译：气体排气泵系统和气体排放方法
公开(公告)号：US20140193283A1
公开(公告)日：2014-07-10
申请号：US14235860
申请日：2012-06-27
申请人： Kenji Ohyama , Isao Akutsu , Masamichi Iwaki , Tadahiro Ohmi
发明人： Kenji Ohyama , Isao Akutsu , Masamichi Iwaki , Tadahiro Ohmi
IPC分类号： F04C18/12
CPC分类号： F04C18/12 , F04C18/16 , F04C25/02 , F04C27/009 , F04C29/0007 , F04C29/023 , F04C2220/30 , F04C2230/91
摘要： There is provided a gas exhaust pump system capable of suppressing the inclusion of a seal gas into a process gas. The gas exhaust pump system has a main and sub pumps. The main pump has a screw rotor, a rotating shaft, a holding unit, a lubricating oil supply path, a seal housing for covering a periphery of a non-held portion by the holding unit with a predetermined gap formed with an outer periphery of the rotating shaft, a seal member interposed between the rotating shaft and the seal housing, a seal gas supply path for supplying a seal gas to the gap, and a seal gas exhaust path for exhausting the seal gas from the gap to the outside of the main pump. The sub pump is configured to reduce a pressure in the seal gas exhaust path.
摘要翻译：提供了能够抑制将密封气体包含在工艺气体中的排气泵系统。排气泵系统具有主泵和副泵。主泵具有螺杆转子，旋转轴，保持单元，润滑油供给路径，用于通过保持单元以预定的间隙覆盖非保持部的周围的密封壳体，形成有外周的旋转轴，设置在所述旋转轴和所述密封壳体之间的密封构件，用于向所述间隙供给密封气体的密封气体供给路径，以及用于从所述间隙向所述主体的外部排出所述密封气体的密封气体排出路径泵。副泵被构造成减小密封气体排气路径中的压力。

6. 发明申请

US20140127031A1 SCREW ROTOR FOR EXHAUST PUMP, METHOD FOR MANUFACTURING THE SAME, GAS EXHAUST PUMP HAVING SCREW ROTOR, AND MANUFACTURING METHOD AND ASSEMBLY METHOD OF THE SAME 审中-公开
标题翻译：用于排气的螺杆转子，其制造方法，具有螺旋转子的气体排气泵及其制造方法及其组装方法
公开(公告)号：US20140127031A1
公开(公告)日：2014-05-08
申请号：US14233427
申请日：2012-06-27
申请人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
发明人： Masamichi Iwaki , Tadahiro Ohmi , Kenji Ohyama , Isao Akutsu
IPC分类号： F04C2/12
CPC分类号： C09D129/10 , B05D3/0209 , B05D3/0254 , F01C21/08 , F04C2/126 , F04C18/16 , F04C27/001 , F04C2230/602 , F04C2230/91 , F05C2225/04
摘要： There is provided a screw rotor that can ensure safe rotation and can greatly increase a pumping performance of a pump. The screw rotor is placed with a gap between a top end surface of a tooth of a screw portion and an inner wall surface of a stator. A PFA film is provided on the top end surface. If the PFA film of the present invention is provided in a predetermined manner, the width of a gap between a free surface of the PFA film and the inner wall surface of the stator can be made significantly smaller than that of a conventional one, so that the pumping performance is greatly improved. After coating at least the top end surface of the screw rotor with PFA, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.
摘要翻译：提供了一种可确保安全旋转的螺杆转子，并可大大提高泵的泵送性能。螺杆转子在螺钉部分的齿的顶端表面和定子的内壁表面之间具有间隙。在顶端表面设置有PFA膜。如果以预定的方式设置本发明的PFA膜，则可以使PFA膜的自由表面与定子的内壁表面之间的间隙的宽度显着小于常规的宽度，从而泵送性能大大提高。至少使用PFA涂覆螺杆转子的顶端表面，然后进行熔融和重熔工艺，形成PFA膜在其自由表面上具有高平滑度。

7. 发明申请

US20120273133A1 SURFACE PROTECTIVE FILM, GAS CONTACT MEMBER, GAS PROCESSING APPARATUS, AND MECHANICAL PUMP 审中-公开
标题翻译：表面保护膜，气体接触构件，气体加工装置和机械泵
公开(公告)号：US20120273133A1
公开(公告)日：2012-11-01
申请号：US13511677
申请日：2010-11-09
申请人： Tadahiro Ohmi , Toshiya Umeki , Isao Akutsu
发明人： Tadahiro Ohmi , Toshiya Umeki , Isao Akutsu
IPC分类号： C09D1/00 , F04B53/00 , B05C11/00
CPC分类号： F04C25/02 , C01F17/0043 , F04B15/04 , F04B53/00 , F04C18/16 , F04C29/12 , F04C2230/91 , F04C2280/02 , F05C2201/043 , F05C2211/00 , F05C2253/12
摘要： An object of this invention is to provide a surface protective film which is capable of suppressing the entry of a corrosive gas as compared with conventional surface protective films. A surface protective film according to this invention is a film which contains yttria (Y2O3) as a main component and also contains cerium. Since the surface protective film contains cerium, defects such as micropores in the film are reduced, thereby enabling suppression of the entry of a corrosive gas.
摘要翻译：本发明的目的是提供一种与常规表面保护膜相比能够抑制腐蚀性气体进入的表面保护膜。根据本发明的表面保护膜是以氧化钇（Y2O3）为主要成分并含有铈的膜。由于表面保护膜含有铈，因此膜中的微孔等缺陷减少，能够抑制腐蚀性气体的进入。

8. 发明申请

US20130058823A1 SCREW VACUUM PUMP 审中-公开
标题翻译：螺丝真空泵
公开(公告)号：US20130058823A1
公开(公告)日：2013-03-07
申请号：US13698691
申请日：2010-05-13
申请人： Tadahiro Ohmi , Isao Akutsu
发明人： Tadahiro Ohmi , Isao Akutsu
IPC分类号： F01C1/16
CPC分类号： F04C25/02 , F04C18/084 , F04C18/16 , F04C23/008 , F04C2220/12 , F04C2240/402
摘要： A screw vacuum pump includes a male rotor, a female rotor, a stator, and a drive motor/motors. A screw gear portion of the male rotor, a screw gear portion of the female rotor, and the stator cooperatively form a gas working chamber. The stator has an inlet port and an outlet port. At least one of the male rotor and the female rotor has a rotor hollow portion which is opened on at least one end face side in a rotation-axis longitudinal direction of the male rotor and/or the female rotor. The drive motor is at least partially received in the rotor hollow portion.
摘要翻译：螺杆真空泵包括阳转子，阴转子，定子和驱动电动机/电动机。阳转子的螺旋齿轮部分，阴转子的螺旋齿轮部分和定子协同地形成气体工作室。定子具有入口和出口。阳转子和阴转子中的至少一个具有在阳转子和/或阴转子的旋转轴线方向上的至少一个端面侧开口的转子中空部。驱动马达至少部分地容纳在转子中空部分中。

9. 发明申请

US20080078503A1 Mechanical pump operating well for a long term and method of manufacturing the same 审中-公开
标题翻译：机械泵长期运行良好，制造方法相同
公开(公告)号：US20080078503A1
公开(公告)日：2008-04-03
申请号：US11905580
申请日：2007-10-02
申请人： Tadahiro OHMI , Isao Akutsu
发明人： Tadahiro OHMI , Isao Akutsu
IPC分类号： H01L21/00 , B05D3/00 , C30B35/00 , F04B53/00
CPC分类号： F04C18/16 , C23C16/4412 , C23C26/00 , F04C25/02 , F04C29/04 , F04C2220/12 , F04C2230/91 , F04C2280/02 , F05C2201/043 , Y10T117/10
摘要： A mechanical pump of the present invention is applied to, for example, a screw pump A for exhausting a gas from a processing chamber. The screw pump comprises a gas-exposed region exposed to the gas and an yttria (Y2O3) film formed on the gas-exposed region.
摘要翻译：本发明的机械泵例如用于从处理室排出气体的螺杆泵A。螺杆泵包括暴露于气体的气体暴露区域和形成在气体暴露区域上的氧化钇（Y 2 O 3 O 3）膜。

10. 发明授权

US08920167B2 Surgical guide preparation tool and method for preparing surgical guide 有权
标题翻译：外科指南准备工具及手术指南准备方法
公开(公告)号：US08920167B2
公开(公告)日：2014-12-30
申请号：US13819749
申请日：2010-09-21
申请人： Isao Akutsu
发明人： Isao Akutsu
IPC分类号： A61C19/04 , A61C8/00 , A61C1/08 , A61B6/03 , A61B6/14
CPC分类号： A61C8/0089 , A61B6/032 , A61B6/145 , A61B6/506 , A61C1/084 , A61C2201/005
摘要： The present invention provides an inexpensive surgical guide preparation tool by which an insertion hole for implant can be correctly and easily formed at a predetermined position. The surgical guide preparation tool has a pair of marker members opposing to each other and a gauge body which has a support member for connecting the marker members, and the gauge body is attached to a surgical guide body. The surface of each marker member is provided with grid-like lines which are recognizable by a CT scanned image and disposed longitudinally and laterally at substantially regular intervals; predetermined marks are chosen from intersections of the grid-like lines, and a guide ring is attached to the surgical guide body so that a direction connecting the chosen marks is used as an axial direction of the guide ring. The axial direction of the guide ring is used as an insertion direction for implant.
摘要翻译：本发明提供了一种廉价的手术引导器准备工具，通过该工具可以在预定位置正确且容易地形成用于植入物的插入孔。手术引导器准备工具具有彼此相对的一对标记构件和具有用于连接标记构件的支撑构件的测量体，并且测量体附接到手术引导体。每个标记构件的表面设置有可由CT扫描图像识别并以基本上规则的间隔纵向和横向设置的格子状线; 从网格线的交叉点选择预定标记，并且将引导环附接到手术引导体，使得将所选择的标记连接的方向用作引导环的轴向。引导环的轴向用作植入物的插入方向。

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