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    • 3. 发明授权
    • Method and apparatus for reviewing defect
    • 检查缺陷的方法和装置
    • US09342879B2
    • 2016-05-17
    • US14347127
    • 2012-07-06
    • Yohei MinekawaKenji NakahiraMinoru HaradaTakehiro HiraiRyo Nakagaki
    • Yohei MinekawaKenji NakahiraMinoru HaradaTakehiro HiraiRyo Nakagaki
    • G06K9/00G06T7/00
    • G06T7/0004G06T7/001G06T2207/10061G06T2207/20016G06T2207/30148
    • A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.
    • 一种检查缺陷的方法,包括以下步骤:作为图像获取步骤,使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤,进行通过图像获取步骤获得的缺陷图像,并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤,获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤,确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时,再次从多个图像获取条件中选择图像获取条件,并且图像获取步骤,缺陷 位置计算步骤,重复缺陷检测精度计算步骤和结论确定步骤。
    • 4. 发明授权
    • Method and system for observing a specimen using a scanning electron microscope
    • 使用扫描电子显微镜观察样品的方法和系统
    • US07932493B2
    • 2011-04-26
    • US12153333
    • 2008-05-16
    • Minoru HaradaRyo NakagakiKenji Obara
    • Minoru HaradaRyo NakagakiKenji Obara
    • G01N23/22G06K9/00
    • G01N23/225H01J2237/216
    • It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusing are set in an imaging region or its neighborhood on the basis of semiconductor design information. A target focusing position in the imaging region is determined by performing auto focusing using the thus-set regions. The determined target focusing position is used for low-magnification imaging and high-magnification imaging. An auto focusing mode that is suitable for each imaging region is selected on the basis of the semiconductor design information.
    • 为了减少自动聚焦时间,并且通过使用扫描电子显微镜来观察检查装置检测到的检体的缺陷的情况下的稳定性。 用于自动聚焦的一个或多个区域基于半导体设计信息设置在成像区域或其邻域中。 通过使用如此设定的区域进行自动聚焦来确定成像区域中的目标对焦位置。 所确定的目标对焦位置用于低倍率成像和高倍率成像。 基于半导体设计信息选择适合于每个成像区域的自动对焦模式。
    • 5. 发明申请
    • METHOD AND ITS APPARATUS FOR REVIEWING DEFECTS
    • 用于评估缺陷的方法及其设备
    • US20090252403A1
    • 2009-10-08
    • US12416273
    • 2009-04-01
    • Minoru HaradaRyo NakagakiKenji Obara
    • Minoru HaradaRyo NakagakiKenji Obara
    • G06K9/00
    • G06K9/033G06K2209/19G06T7/001G06T2207/10056G06T2207/30148
    • A method for reviewing a defect on a sample involves the steps of imaging a defect image containing the defect in first magnification by using an image acquisition unit, synthesizing a reference image not containing the defect from the defect image, comparing the defect image acquired with the reference image synthesized to detect a defect applicant, executing a processing for classifying the defect applicant into a defect and a normal portion and imaging only the portion identified as the detect in second magnification. The method makes it possible to specify a defect position without error from the image taken in the first magnification and to image the defect in the second magnification when a large number of defects are observed within a short time by using the image acquisition unit.
    • 一种用于检查样本缺陷的方法包括以下步骤:通过使用图像获取单元对包含缺陷的缺陷图像进行成像,从缺陷图像合成不包含缺陷的参考图像,将获得的缺陷图像与 用于检测缺陷申请人的参考图像,执行将缺陷申请人分类为缺陷和法线部分的处理,并且仅成像第二倍率中仅识别为检测的部分。 该方法使得可以从第一倍率中拍摄的图像指定缺陷位置,并且在通过使用图像获取单元在短时间内观察到大量缺陷时,以第二倍率对缺陷进行成像。
    • 6. 发明申请
    • Electronic apparatus having security function
    • 具有安全功能的电子设备
    • US20070209079A1
    • 2007-09-06
    • US11653902
    • 2007-01-17
    • Minoru HaradaHiroyuki WatabeMasaru Kamino
    • Minoru HaradaHiroyuki WatabeMasaru Kamino
    • H04L9/32G08B13/00
    • G08B21/0213B60R25/00G08B13/1409G08B15/00G08B25/001
    • In the event that an electronic apparatus having a security function is forcibly put into an inoperable state because electric power is shut off once by an operation equivalent to theft, the inoperable state can be canceled by using a code notified by the dealer by telephone, without carrying the electronic apparatus into its dealer. After electric power is supplied again, the vehicle-mounted compact disc (abbreviated as CD) reproduction apparatus is used to play back a CD, and its TOC information is used as a judgment identification code C1. When the code C1 is identical to the authorized identification code A21, the electronic apparatus is made operable. In order to cancel the inoperable state after the number of inconsistencies becomes 10 or more, the individual code A22 of an EEPROM 21 is indicated and notified to the dealer. The dealer carries out calculation by using the individual code A22, and a result B2 of the calculation is notified to the user. The user inputs the calculation result B2. Individual code calculating means carries out the same calculation as the above-mentioned calculation and obtains the calculation result B3. When the calculation result B2 coincides with the calculation result B3, the inoperable state can be canceled.
    • 在具有安全功能的电子设备被强制投入不能操作状态的情况下,由于通过与盗窃相同的操作关闭一次电力,可以通过使用由经销商通过电话通知的代码来取消不可操作状态,而不用 将电子设备运送到其经销商。 在再次供电之后,使用车载光盘(简写为CD)再现装置来播放CD,并将其TOC信息用作判断识别码C 1。 当代码C 1与授权识别码A21相同时,电子设备可操作。 为了在不一致的数量变为10以上之后取消不可操作状态,EEPROM 21的各个代码A 22被指示并通知给经销商。 经销商通过使用单独的代码A22执行计算,并且向用户通知该计算的结果B 2。 用户输入计算结果B 2。 个别代码计算装置执行与上述计算相同的计算,并获得计算结果B 3。 当计算结果B 2与计算结果B 3一致时,可以取消不可操作的状态。
    • 7. 发明授权
    • Power supply control device, apparatus equipped therewith and recording medium
    • 电源控制装置,配备的装置和记录介质
    • US07058480B1
    • 2006-06-06
    • US09706859
    • 2000-11-07
    • Toshiharu KawanishiNaoki IzutaSatoshi KajiyashikiHitoshi MatsumoriMasato SemiiMinoru Harada
    • Toshiharu KawanishiNaoki IzutaSatoshi KajiyashikiHitoshi MatsumoriMasato SemiiMinoru Harada
    • G06F19/00
    • G06F1/3203
    • A power supply control apparatus is provided in which it is possible to easily calculate and predict a necessary and sufficient power consumption value in a device which consumes electric power. As a result, it can positively prevent a shortage or surplus of the power supply capacity, thus saving unnecessary costs for power supply equipment. Still further, it is also prevent the occurrence of critical situations such as missing or loss of stored information due to a shortage of the power supply capacity. To this end, in a device which is supplied with electric power from a power supply unit, configuration units constituting the device are stored as configuration information, and an amount of power consumed by each configuration unit is also stored as power consumption information. Based on the configuration information and the power consumption information thus stored, there is obtained a power consumption value of the device, on the basis of which a prescribed processing is carried out.
    • 提供了一种电源控制装置,其中可以容易地计算和预测在消耗电力的装置中必需且足够的功率消耗值。 因此,可以有效防止供电能力不足或过剩,从而节省供电设备的不必要成本。 此外,还防止由于电力供应能力不足而导致的存储信息丢失或丢失等关键情况的发生。 为此,在从供电单元供给电力的设备中,构成设备的配置单元被存储为配置信息,并且每个配置单元消耗的功率量也被存储为功耗信息。 基于这样存储的配置信息和功耗信息,获得设备的功耗值,并基于此进行规定的处理。
    • 8. 发明授权
    • Method and apparatus for generating ozone and methods of its use
    • 用于生成臭氧的方法和装置及其使用方法
    • US5632868A
    • 1997-05-27
    • US518418
    • 1995-08-23
    • Minoru HaradaRyoichi ShinjoManabu TsujimuraRempei NakataKunihiro MiyazakiNaruhiko KajiYutaka Nakano
    • Minoru HaradaRyoichi ShinjoManabu TsujimuraRempei NakataKunihiro MiyazakiNaruhiko KajiYutaka Nakano
    • C01B13/10C01B13/11C23C8/12C23C16/40C23C16/44C23C16/448
    • C23C16/448C01B13/10C01B13/11C23C16/402C23C16/4402C23C8/12C01B2201/60
    • Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.
    • 臭氧发生器(10),其在施加高压下向臭氧发生电池(11)供应进料气体,并且通过臭氧气体输送路径(由管道(14)和(15)组成)输送臭氧气体) 在臭氧发生电池(11)中产生的臭氧气体输送路径的特征在于,臭氧气体输送路径具有用于除去NOx,HF和SO x中的至少一种的装置(在附图中,用于除去NOx的装置),臭氧气体 从臭氧发生电池(11)通过所述去除装置,由此在所述臭氧气体中的NOx,HF和SO x中的至少一种在被输送到后续阶段之前被去除。 产物臭氧根本不被Cr化合物污染或污染不足,导致制造高度集成的半导体器件的任何实际问题。 或者,臭​​氧发生器(10)包括具有用于供应进料气体的入口(8)的臭氧发生电池(11),用于排出产生的臭氧的高压施加装置(35)和出口(29),以及臭氧输送路径 (30)和(31)用于输送生成的臭氧的特征在于,使用补充有10〜20体积%的二氧化碳和/或一氧化碳(2)的氧(1)作为原料气。 这样生成的臭氧在Cr化合物的含量上显着地很低,因此可以适当地用于形成金属氧化物,特别是氧化硅。
    • 9. 发明授权
    • Discharge reactor
    • 放电反应堆
    • US5549874A
    • 1996-08-27
    • US49866
    • 1993-04-20
    • Ichiro KamiyaRyoichi ShinjoTakeshi MurakamiYukiko NishiokaMinoru Harada
    • Ichiro KamiyaRyoichi ShinjoTakeshi MurakamiYukiko NishiokaMinoru Harada
    • H01J49/02C01B13/11B01J19/08
    • C01B13/11C01B2201/34Y10S422/907
    • A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO.sub.2) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.
    • 一种在电介质和高电压电极和/或接地电极之间产生静电放电和/或爬电放电的放电反应器,所述电介质位于高电压电极和接地电极之间,并且在放电空间1中通过时产生干净的臭氧 所述放电空间1或其保持在所述放电空间1内,该放电反应器的特征在于电介质由高度纯化的石英玻璃(SiO 2)或单晶蓝宝石制成,其是高度纯化的结晶的氧化铝或高纯度的结晶的氧化铝, 纯度高的氧化铝陶瓷,是高纯度氧化铝的烧制。 此外,为了获得更清洁和高浓度的臭氧,至少要放电的放电空间区域中的电极或电极由高纯度铝材料制成,并且至少放电空间的区域 进一步用阳极氧化膜进行曝光。