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    • 10. 发明授权
    • Exposure apparatus and device manufacturing method
    • 曝光装置和装置制造方法
    • US08373147B2
    • 2013-02-12
    • US12566293
    • 2009-09-24
    • Daisuke ItaiKunitaka Ozawa
    • Daisuke ItaiKunitaka Ozawa
    • G01N21/84G06F17/00
    • H01L21/67288G03F7/70508G03F7/707G03F7/7085G03F7/70916
    • An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.
    • 一种用于处理分别对应于由卡盘保持的基板的表面上的多个测量点的多个测量高度的信息的信息处理设备,包括处理器和输出设备。 处理器被配置为相对于表面指定排列的多个区域和由多个区域中的多个区域构成的多个区段,提取分别对应于多个区域的多个倾斜度的至少两个倾斜度 基于多个测量高度的多个区域的数量相对于多个区间中的每一个,并且使得输出设备输出指定满足第一条件的多个区段的一部分的信息,该第一条件是两个倾斜度的乘积 在所述至少两个倾斜度中超过预定阈值。