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1. 发明授权

US08373147B2 Exposure apparatus and device manufacturing method 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US08373147B2
公开(公告)日：2013-02-12
申请号：US12566293
申请日：2009-09-24
申请人： Daisuke Itai , Kunitaka Ozawa
发明人： Daisuke Itai , Kunitaka Ozawa
IPC分类号： G01N21/84 , G06F17/00
CPC分类号： H01L21/67288 , G03F7/70508 , G03F7/707 , G03F7/7085 , G03F7/70916
摘要： An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.
摘要翻译：一种用于处理分别对应于由卡盘保持的基板的表面上的多个测量点的多个测量高度的信息的信息处理设备，包括处理器和输出设备。处理器被配置为相对于表面指定排列的多个区域和由多个区域中的多个区域构成的多个区段，提取分别对应于多个区域的多个倾斜度的至少两个倾斜度基于多个测量高度的多个区域的数量相对于多个区间中的每一个，并且使得输出设备输出指定满足第一条件的多个区段的一部分的信息，该第一条件是两个倾斜度的乘积在所述至少两个倾斜度中超过预定阈值。

2. 发明申请

US20100235384A1 INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM 有权
标题翻译：信息处理系统，信息处理方法和计算机可读存储介质
公开(公告)号：US20100235384A1
公开(公告)日：2010-09-16
申请号：US12716393
申请日：2010-03-03
申请人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
发明人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
IPC分类号： G06F7/10 , G06F17/30
CPC分类号： G06F17/30286 , G03F7/70508 , G03F7/70525
摘要： An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface.
摘要翻译：一种信息处理系统，其利用与可根据需要进行更新的数据定义一致地记录在数据库中的装置数据，包括：存储单元，被配置为存储数据定义历史，其中数据定义版本与其中的使用数据定义版本中的数据定义，数据定义库被配置为相关联地在数据定义版本中注册数据定义版本和数据定义，提取器被配置为从数据库中提取遇到的设备数据提取条件，包括通过用户界面指定的提取周期，以及转换器，被配置为将由提取器提取的装置数据的表达式转换为符合通过用户界面指定的数据定义的表达式。

3. 发明申请

US20090187379A1 INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND MEMORY MEDIUM 有权
标题翻译：信息处理设备，信息处理方法和存储介质
公开(公告)号：US20090187379A1
公开(公告)日：2009-07-23
申请号：US12356251
申请日：2009-01-20
申请人： Daisuke Itai , Yoshihiro Kawauchi , Kunitaka Ozawa
发明人： Daisuke Itai , Yoshihiro Kawauchi , Kunitaka Ozawa
IPC分类号： G06F17/18
CPC分类号： G03F7/70525
摘要： An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit.
摘要翻译：一种信息处理设备，用于处理由曝光基板产生的辐射能量的曝光装置产生的信息，包括信息收集单元，被配置为收集由曝光装置获得的第一装置信息，该信息通过其对多个第一区域其形成在所述基板上限定的第一阵列，转换单元，被配置为将由所述信息收集单元将针对所述多个第一区域中的每一个收集的所述第一装置信息的至少一部分转换为关于每个所述第一装置信息的第二装置信息形成第二阵列的多个第二区域，统计处理单元，被配置为统计处理第二装置信息;以及分析单元，被配置为分析由统计处理单元获得的统计处理结果。

4. 发明申请

US20100081096A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20100081096A1
公开(公告)日：2010-04-01
申请号：US12566293
申请日：2009-09-24
申请人： Daisuke Itai , Kunitaka Ozawa
发明人： Daisuke Itai , Kunitaka Ozawa
IPC分类号： G03F7/20 , G03B27/42 , G06F17/00
CPC分类号： H01L21/67288 , G03F7/70508 , G03F7/707 , G03F7/7085 , G03F7/70916
摘要： An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.
摘要翻译：一种用于处理分别对应于由卡盘保持的基板的表面上的多个测量点的多个测量高度的信息的信息处理设备，包括处理器和输出设备。处理器被配置为相对于表面指定排列的多个区域和由多个区域中的多个区域构成的多个区段，提取分别对应于多个区域的多个倾斜度的至少两个倾斜度基于多个测量高度的多个区域的数量相对于多个区间中的每一个，并且使得输出设备输出指定满足第一条件的多个区段的一部分的信息，该第一条件是两个倾斜度的乘积在所述至少两个倾斜度中超过预定阈值。

5. 发明授权

US09057966B2 Information processing apparatus, information processing method, and memory medium 有权
标题翻译：信息处理装置，信息处理方法和存储介质
公开(公告)号：US09057966B2
公开(公告)日：2015-06-16
申请号：US12356251
申请日：2009-01-20
申请人： Daisuke Itai , Yoshihiro Kawauchi , Kunitaka Ozawa
发明人： Daisuke Itai , Yoshihiro Kawauchi , Kunitaka Ozawa
IPC分类号： G06F17/18 , G03F7/20
CPC分类号： G03F7/70525
摘要： An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit.
摘要翻译：一种信息处理设备，用于处理由曝光基板产生的辐射能量的曝光装置产生的信息，包括信息收集单元，被配置为收集由曝光装置获得的第一装置信息，该信息通过其对多个第一区域其形成在所述基板上限定的第一阵列，转换单元，被配置为将由所述信息收集单元将针对所述多个第一区域中的每一个收集的所述第一装置信息的至少一部分转换为关于每个所述第一装置信息的第二装置信息形成第二阵列的多个第二区域，统计处理单元，被配置为统计处理第二装置信息;以及分析单元，被配置为分析由统计处理单元获得的统计处理结果。

6. 发明授权

US08516145B2 Information processing method and information processing apparatus for transmitting data generated by device manufacturing apparatus 有权
标题翻译：用于发送由装置制造装置生成的数据的信息处理方法和信息处理装置
公开(公告)号：US08516145B2
公开(公告)日：2013-08-20
申请号：US12838210
申请日：2010-07-16
申请人： Daisuke Itai , Hiroaki Fujiwara , Mitsuhiro Masuda , Kunitaka Ozawa
发明人： Daisuke Itai , Hiroaki Fujiwara , Mitsuhiro Masuda , Kunitaka Ozawa
IPC分类号： G06F15/16
CPC分类号： G03F7/70525 , G03F7/70508 , G03F7/70991
摘要： An apparatus which transmits data generated by a device manufacturing apparatus to at least one terminal, comprises a communication unit, a transmission request processor configured to accept or reject a transmission request which the communication unit has received from the terminal, and a transmission controller configured to control the communication unit to transmit, in response to a transmission request accepted by the transmission request processor, data corresponding to the transmission request to a terminal, of the at least one terminal, which has transmitted the transmission request, wherein the transmission request processor accepts a new transmission request if a sum of transmission rates of the respective data concurrently transmitted from the communication unit in response to transmission requests which the transmission request processor has already accepted and a transmission rate at which data is transmitted in response to the new transmission request does not exceed a preset allowable transmission rate.
摘要翻译：将由装置制造装置生成的数据发送到至少一个终端的装置包括通信单元，被配置为接收或拒绝通信单元从终端接收到的发送请求的发送请求处理器，以及配置为控制所述通信单元响应于所述传输请求处理器接受的传输请求，将已经发送了所述传输请求的所述至少一个终端的发送请求的数据发送到终端，其中，所述传输请求处理器接受如果根据传输请求处理器已经接受的传输请求以及响应于新的传输请求发送数据的传输速率而从通信单元同时发送的各个数据的传输速率的总和，则发送新的传输请求不超过复位允许传输速率。

7. 发明申请

US20110029685A1 INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS FOR TRANSMITTING DATA GENERATED BY DEVICE MANUFACTURING APPARATUS 有权
标题翻译：信息处理方法和信息处理装置，用于发送设备制造设备生成的数据
公开(公告)号：US20110029685A1
公开(公告)日：2011-02-03
申请号：US12838210
申请日：2010-07-16
申请人： Daisuke Itai , Hiroaki Fujiwara , Mitsuhiro Masuda , Kunitaka Ozawa
发明人： Daisuke Itai , Hiroaki Fujiwara , Mitsuhiro Masuda , Kunitaka Ozawa
IPC分类号： G06F15/16
CPC分类号： G03F7/70525 , G03F7/70508 , G03F7/70991
摘要： An apparatus which transmits data generated by a device manufacturing apparatus to at least one terminal, comprises a communication unit, a transmission request processor configured to accept or reject a transmission request which the communication unit has received from the terminal, and a transmission controller configured to control the communication unit to transmit, in response to a transmission request accepted by the transmission request processor, data corresponding to the transmission request to a terminal, of the at least one terminal, which has transmitted the transmission request, wherein the transmission request processor accepts a new transmission request if a sum of transmission rates of the respective data concurrently transmitted from the communication unit in response to transmission requests which the transmission request processor has already accepted and a transmission rate at which data is transmitted in response to the new transmission request does not exceed a preset allowable transmission rate.
摘要翻译：将由装置制造装置生成的数据发送到至少一个终端的装置包括通信单元，被配置为接收或拒绝通信单元从终端接收到的发送请求的发送请求处理器，以及配置为控制所述通信单元响应于所述传输请求处理器接受的传输请求，将已经发送了所述传输请求的所述至少一个终端的发送请求的数据发送到终端，其中，所述传输请求处理器接受如果根据传输请求处理器已经接受的传输请求以及响应于新的传输请求发送数据的传输速率而从通信单元同时发送的各个数据的传输速率的总和，则新的传输请求不超过复位允许传输速率。

8. 发明授权

US08065270B2 Information processing system, information processing method, and memory medium 有权
标题翻译：信息处理系统，信息处理方法和存储介质
公开(公告)号：US08065270B2
公开(公告)日：2011-11-22
申请号：US12716384
申请日：2010-03-03
申请人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
发明人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
IPC分类号： G06F7/00
CPC分类号： G06F17/30356
摘要： An information processing system using apparatus data recorded in a database in accordance with a data definition updated as needed, comprises a storage unit configured to store a data definition history that makes a data definition version and a period during which a data definition for the data definition version was used to correspond to each other, a data definition library in which the data definition version and the data definition for the data definition version are registered in correspondence with each other, and a detection unit configured to detect, from the data definition history, a data definition version of a data definition used in a period designated via a user interface, to detect a data definition for the detected data definition version from the data definition library, and to provide the detected data definition version and data definition to the user interface.
摘要翻译：一种使用根据需要更新的数据定义记录在数据库中的装置数据的信息处理系统，包括：存储单元，被配置为存储数据定义历史，该数据定义历史使数据定义版本和数据定义的数据定义期间版本被用于彼此对应，其中数据定义版本和数据定义版本的数据定义彼此对应地登记的数据定义库，以及检测单元，被配置为从数据定义历史中检测数据，在经由用户界面指定的时段中使用的数据定义的数据定义版本，以从数据定义库检测检测到的数据定义版本的数据定义，并将检测到的数据定义版本和数据定义提供给用户界面。

9. 发明授权

US08060472B2 Information processing system, information processing method, and computer-readable storage medium 有权
标题翻译：信息处理系统，信息处理方法和计算机可读存储介质
公开(公告)号：US08060472B2
公开(公告)日：2011-11-15
申请号：US12716393
申请日：2010-03-03
申请人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
发明人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
IPC分类号： G06F7/00
CPC分类号： G06F17/30286 , G03F7/70508 , G03F7/70525
摘要： An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface.
摘要翻译：一种信息处理系统，其利用与可根据需要进行更新的数据定义一致地记录在数据库中的装置数据，包括：存储单元，被配置为存储数据定义历史，其中数据定义版本与其中的使用数据定义版本中的数据定义，数据定义库被配置为相关联地在数据定义版本中注册数据定义版本和数据定义，提取器被配置为从数据库中提取遇到的设备数据提取条件，包括通过用户界面指定的提取周期，以及转换器，被配置为将由提取器提取的装置数据的表达式转换为符合通过用户界面指定的数据定义的表达式。

10. 发明申请

US20100248165A1 INFORMATION PROCESSING METHOD, EXPOSURE PROCESSING SYSTEM USING SAME, DEVICE MANUFACTURING METHOD, AND INFORMATION PROCESSING APPARATUS 审中-公开
标题翻译：信息处理方法，使用相同的曝光处理系统，装置制造方法和信息处理装置
公开(公告)号：US20100248165A1
公开(公告)日：2010-09-30
申请号：US12730843
申请日：2010-03-24
申请人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
发明人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
IPC分类号： G03F7/20 , G06F15/00 , G03B27/32
CPC分类号： G03B27/32 , G03F7/70525
摘要： The information processing method of the present invention is provided that specifies an extraction period for extracting apparatus data to be generated by an industrial apparatus and analyzes a state of the industrial apparatus based on the apparatus data having an occurrence time within the extraction period. The information processing method includes a period changing step of changing the extraction period so as to enable the apparatus data required for the analysis of the state to be included, when the apparatus data required for the analysis of the state is not included within the extraction period.
摘要翻译：提供本发明的信息处理方法，其指定用于提取由工业设备生成的设备数据的提取周期，并且基于在提取周期内具有发生时间的设备数据来分析工业设备的状态。所述信息处理方法包括：当所述状态分析所需的装置数据不包括在所述提取周期内时，改变所述提取周期以使能够包括所述状态分析所需的装置数据的周期变更步骤。

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