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    • 8. 发明授权
    • Optical characteristic measuring apparatus and optical characteristic measuring method
    • 光学特性测量装置和光学特性测量方法
    • US08582124B2
    • 2013-11-12
    • US13548210
    • 2012-07-13
    • Yusuke YamazakiSota Okamoto
    • Yusuke YamazakiSota Okamoto
    • G01B11/28G01B11/06
    • G01B11/06G01B11/0625G01B11/0641G01N21/211G01N2021/213
    • An optical characteristic measuring apparatus includes a light source, a detector and a data processing unit. Data processing unit includes a modeling unit, an analyzing unit and a fitting unit. The plurality of film model equations are solved, and prescribed calculation is performed on the assumption that the optical constants included in the plurality of film model equations is identical. Fitting is performed between a waveform obtained by substituting the obtained film thickness and the obtained optical constants of the film into the film model equations and a waveform of the wavelength distribution characteristic obtained by detector, thereby determining that the optical constants included in the plurality of film model equations is identical and that the film thickness and the optical constants obtained by the analyzing unit are correct values.
    • 光学特性测量装置包括光源,检测器和数据处理单元。 数据处理单元包括建模单元,分析单元和装配单元。 解决了多个胶片模型方程式,并且在包含在多个胶片模型方程中的光学常数相同的假设下执行规定的计算。 在通过将获得的膜厚度取得的波形与所获得的膜的光学常数成膜为膜模型方程之间进行拟合的波形和由检测器获得的波长分布特性的波形,从而确定包含在多个膜中的光学常数 模型方程是相同的,并且由分析单元获得的膜厚度和光学常数是正确的值。