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    • 3. 发明申请
    • SEMICONDUCTOR LASER DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体激光器件及其制造方法
    • US20080008220A1
    • 2008-01-10
    • US11850603
    • 2007-09-05
    • Tetsuzo UEDAMasaaki YURI
    • Tetsuzo UEDAMasaaki YURI
    • H01S5/20
    • H01S5/34333B82Y20/00H01S5/0208H01S5/0425H01S5/2009H01S5/2214H01S5/2231H01S5/3214H01S2304/12Y10S438/973Y10S438/977
    • It is an object of the present invention to provide a semiconductor laser device with high-yielding in which a clack generated in an epitaxial growth layer is restrained and to the manufacturing method thereof, the semiconductor laser device includes a GaN substrate 1, an n-type GaN layer 2, an n-type AlGaN cladding layer 3, a n-type GaN guide layer 4, an InGaN multiple quantum well active layer 5, an undoped-GaN guide layer 6, a p-type AlGaN electron overflow suppression layer 7, a p-type GaN guide layer 8, a SiO2 blocking layer 9, an Ni/ITO cladding layer electrode 10 as a transparent electrode, a Ti/Au pad electrode 11, and a Ti/Al/Ni/Au electrode 12. The SiO2 blocking layer 9 is formed above the InGaN multiple quantum well active layer 5 so as to have an opening. The Ni/ITO cladding layer electrode 10 is formed inside the opening, and which is transparent for the light from the InGaN multiple quantum well active layer, and serves as a cladding layer.
    • 本发明的目的是提供一种具有高产量的半导体激光器件,其中在外延生长层中产生的夹克被抑制,并且其制造方法,半导体激光器件包括GaN衬底1, 型GaN层2,n型AlGaN包覆层3,n型GaN引导层4,InGaN多量子阱有源层5,未掺杂GaN引导层6,p型AlGaN电子溢出抑制层7 p型GaN引导层8,SiO 2阻挡层9,作为透明电极的Ni / ITO包层电极10,Ti / Au焊盘电极11和Ti / Al / Ni / Au电极12.SiO 2阻挡层9形成在InGaN多量子阱有源层5上方以具有开口。 Ni / ITO包层电极10形成在开口内部,对于来自InGaN多量子阱有源层的光是透明的,并且用作覆层。