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    • 7. 发明授权
    • Semiconductor laser element and method of manufacturing thereof
    • 半导体激光元件及其制造方法
    • US08358674B2
    • 2013-01-22
    • US13051805
    • 2011-03-18
    • Shinya SonobeShingo MasuiTakashi Miyoshi
    • Shinya SonobeShingo MasuiTakashi Miyoshi
    • H01S5/00
    • H01S5/0425B82Y20/00H01S5/2086H01S5/22H01S5/221H01S5/2214H01S5/222H01S5/3202H01S5/3214H01S5/34333H01S2301/176
    • A semiconductor laser element having; a substrate, a semiconductor layer laminated a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer in that order on the substrate, a stripe-like ridge formed on the upper face of the second conductivity type semiconductor layer, a conductive oxide layer formed on the upper face of the ridge, a dielectric layer, with a refractive index that is lower than the refractive index of the semiconductor layer, formed on the side faces of the ridge, and a metal layer formed so as to cover the conductive oxide layer and the dielectric layer, the surface of the conductive oxide layer is exposed from the dielectric layer, and the side faces of the conductive oxide layer are sloped with respect to the upper face of the ridge, and the inclination angle of the side faces of the conductive oxide layer with respect to the normal direction is greater than the inclination angle of the side faces of the ridge with respect to the normal direction.
    • 一种半导体激光元件,具有: 衬底,在衬底上依次层叠第一导电型半导体层,有源层和第二导电类型半导体层的半导体层,形成在第二导电类型半导体层的上表面上的条状脊, 形成在脊的上表面上的导电氧化物层,形成在脊的侧面上的具有低于半导体层的折射率的折射率的介电层和形成为覆盖的金属层 导电氧化物层和电介质层,导电氧化物层的表面从电介质层露出,导电氧化物层的侧面相对于脊的上表面倾斜,并且倾斜角度 导电氧化物层相对于法线方向的侧面大于脊相对于法线方向的侧面的倾斜角度。
    • 9. 发明申请
    • SEMICONDUCTOR LASER DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体激光器件及其制造方法
    • US20080008220A1
    • 2008-01-10
    • US11850603
    • 2007-09-05
    • Tetsuzo UEDAMasaaki YURI
    • Tetsuzo UEDAMasaaki YURI
    • H01S5/20
    • H01S5/34333B82Y20/00H01S5/0208H01S5/0425H01S5/2009H01S5/2214H01S5/2231H01S5/3214H01S2304/12Y10S438/973Y10S438/977
    • It is an object of the present invention to provide a semiconductor laser device with high-yielding in which a clack generated in an epitaxial growth layer is restrained and to the manufacturing method thereof, the semiconductor laser device includes a GaN substrate 1, an n-type GaN layer 2, an n-type AlGaN cladding layer 3, a n-type GaN guide layer 4, an InGaN multiple quantum well active layer 5, an undoped-GaN guide layer 6, a p-type AlGaN electron overflow suppression layer 7, a p-type GaN guide layer 8, a SiO2 blocking layer 9, an Ni/ITO cladding layer electrode 10 as a transparent electrode, a Ti/Au pad electrode 11, and a Ti/Al/Ni/Au electrode 12. The SiO2 blocking layer 9 is formed above the InGaN multiple quantum well active layer 5 so as to have an opening. The Ni/ITO cladding layer electrode 10 is formed inside the opening, and which is transparent for the light from the InGaN multiple quantum well active layer, and serves as a cladding layer.
    • 本发明的目的是提供一种具有高产量的半导体激光器件,其中在外延生长层中产生的夹克被抑制,并且其制造方法,半导体激光器件包括GaN衬底1, 型GaN层2,n型AlGaN包覆层3,n型GaN引导层4,InGaN多量子阱有源层5,未掺杂GaN引导层6,p型AlGaN电子溢出抑制层7 p型GaN引导层8,SiO 2阻挡层9,作为透明电极的Ni / ITO包层电极10,Ti / Au焊盘电极11和Ti / Al / Ni / Au电极12.SiO 2阻挡层9形成在InGaN多量子阱有源层5上方以具有开口。 Ni / ITO包层电极10形成在开口内部,对于来自InGaN多量子阱有源层的光是透明的,并且用作覆层。