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    • 4. 发明授权
    • Semiconductor apparatus
    • 半导体装置
    • US08242572B2
    • 2012-08-14
    • US12917719
    • 2010-11-02
    • Masaharu Yamaji
    • Masaharu Yamaji
    • H01L23/58
    • H01L27/1203H01L21/76264H01L29/0615H01L29/0619H01L29/0696H01L29/0878H01L29/402H01L29/41758H01L29/7824H01L29/8611H01L2924/0002H01L2924/00
    • A semiconductor apparatus includes, below a high-voltage wiring, a p− diffusion layer in contact with an n drain buffer layer and a p+ diffusion layer in contact with a p− diffusion layer for reducing the electric field strength in an insulator film, which the high-voltage wiring crosses over. Reducing electric field strength in the insulator film prevents lowering of breakdown voltage of a high-voltage NMOSFET, break down of an interlayer insulator film, and impairment of isolation breakdown voltage of a device isolation trench. The semiconductor apparatus according to the invention facilitates bridging a high-voltage wiring from a high-voltage NMOSFET and such a level-shifting device to a high-voltage floating region crossing over a device isolation trench without impairing the breakdown voltage of the high-voltage NMOSFET, without breaking down the interlayer insulator film and without impairing the isolation breakdown voltage of the device isolation trench.
    • 半导体装置包括在高电压布线下面,与n漏极缓冲层接触的扩散层和与扩散层接触的p +扩散层,用于降低绝缘膜中的电场强度,其中高 电压接线越过。 降低绝缘膜中的电场强度可防止高压NMOSFET的击穿电压降低,层间绝缘膜的分解,以及器件隔离沟槽的隔离击穿电压的损害。 根据本发明的半导体装置有助于从高压NMOSFET和这种电平移位装置将高电压布线桥接到跨越器件隔离沟槽的高电压浮动区,而不会损害高电压的击穿电压 NMOSFET,而不会破坏层间绝缘膜,而不损害器件隔离沟槽的隔离击穿电压。
    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08507998B2
    • 2013-08-13
    • US13408101
    • 2012-02-29
    • Masaharu YamajiAkio Kitamura
    • Masaharu YamajiAkio Kitamura
    • H01L29/76
    • H01L27/0883
    • A semiconductor device can output a reference voltage for an arbitrary potential and can detect the voltage of each cell in a battery including multiple cells very precisely. The device includes a depletion-type MOSFET 21 and an enhancement type MOSFET 22, and has a floating structure that isolates depletion-type MOSFET 21 and enhancement type MOSFET 22 from a ground terminal. The depletion-type MOSFET 21 and enhancement type MOSFET 22 are connected in series to each other, wherein the depletion-type MOSFET 21 is connected to high-potential-side terminal and the enhancement type MOSFET 22 is connected to low-potential-side terminal. The semiconductor device having the configuration described above is disposed in a voltage detecting circuit section in a control IC for a battery including multiple cells.
    • 半导体器件可以输出用于任意电位的参考电压,并且可以非常精确地检测包括多个单元的电池中的每个单元的电压。 该器件包括耗尽型MOSFET21和增强型MOSFET22,并且具有从耗尽型MOSFET21和增强型MOSFET22与接地端子隔离的浮置结构。 耗尽型MOSFET21和增强型MOSFET22彼此串联连接,其中耗尽型MOSFET21连接到高电位侧端子,增强型MOSFET22连接到低电位侧端子 。 具有上述结构的半导体器件设置在包括多个单元的电池的控制IC中的电压检测电路部分中。
    • 6. 发明申请
    • HIGH-VOLTAGE INTEGRATED CIRCUIT DEVICE
    • 高电压集成电路设备
    • US20130001736A1
    • 2013-01-03
    • US13515546
    • 2011-09-12
    • Masaharu Yamaji
    • Masaharu Yamaji
    • H01L23/48
    • H01L21/823481H01L21/823493H01L27/0203H01L27/088H01L2924/0002H01L2924/00
    • A high-voltage integrated circuit device has formed therein a high-voltage junction terminating region that is configured by a breakdown voltage region formed of an n-well region, a ground potential region formed of a p-region, a first contact region and a second contact region. An opposition section of the high-voltage junction terminating region, whose distance to an intermediate-potential region formed of a p-drain region is shorter than those of other sections, is provided with a resistance higher than those of the other sections. Accordingly, a cathode resistance of a parasitic diode formed of the p-region and the n-well region increases, locally reducing the amount of electron holes injected at the time of the input of a negative-voltage surge. As a result, an erroneous operation or destruction of a logic part of a high-side circuit can be prevented when the negative-voltage surge is applied to an H-VDD terminal or a Vs terminal.
    • 一种高电压集成电路器件,其中形成有由n-阱区形成的击穿电压区域,由p区形成的接地电位区域,第一接触区域和 第二接触区域。 与p型漏极区域形成的中间电位区域的距离比其他部分短的高压结终止区域的对置部分具有比其他部分高的电阻。 因此,由p区域和n阱区域形成的寄生二极管的阴极电阻增加,从而局部地减少在输入负电压浪涌时注入的电子空穴量。 结果,当向H-VDD端子或Vs端子施加负电压浪涌时,可以防止高侧电路的逻辑部分的错误操作或破坏。
    • 7. 发明授权
    • High-voltage integrated circuit device
    • 高压集成电路器件
    • US08704328B2
    • 2014-04-22
    • US13515546
    • 2011-09-12
    • Masaharu Yamaji
    • Masaharu Yamaji
    • H01L23/48
    • H01L21/823481H01L21/823493H01L27/0203H01L27/088H01L2924/0002H01L2924/00
    • A high-voltage integrated circuit device has formed therein a high-voltage junction terminating region that is configured by a breakdown voltage region formed of an n-well region, a ground potential region formed of a p-region, a first contact region and a second contact region. An opposition section of the high-voltage junction terminating region, whose distance to an intermediate-potential region formed of a p-drain region is shorter than those of other sections, is provided with a resistance higher than those of the other sections. Accordingly, a cathode resistance of a parasitic diode formed of the p-region and the n-well region increases, locally reducing the amount of electron holes injected at the time of the input of a negative-voltage surge. As a result, an erroneous operation or destruction of a logic part of a high-side circuit can be prevented when the negative-voltage surge is applied to an H-VDD terminal or a Vs terminal.
    • 一种高电压集成电路器件,其中形成有由n-阱区形成的击穿电压区域,由p区形成的接地电位区域,第一接触区域和 第二接触区域。 与p型漏极区域形成的中间电位区域的距离比其他部分短的高压结终止区域的对置部分具有比其他部分高的电阻。 因此,由p区域和n阱区域形成的寄生二极管的阴极电阻增加,从而局部地减少在输入负电压浪涌时注入的电子空穴量。 结果,当向H-VDD端子或Vs端子施加负电压浪涌时,可以防止高侧电路的逻辑部分的错误操作或破坏。
    • 8. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08148785B2
    • 2012-04-03
    • US12210775
    • 2008-09-15
    • Masaharu YamajiAkio Kitamura
    • Masaharu YamajiAkio Kitamura
    • H01L29/76
    • H01L27/0883
    • A semiconductor device can output a reference voltage for an arbitrary potential and can detect the voltage of each cell in a battery including multiple cells very precisely. The device includes a depletion-type MOSFET 21 and an enhancement type MOSFET 22, and has a floating structure that isolates depletion-type MOSFET 21 and enhancement type MOSFET 22 from a ground terminal. The depletion-type MOSFET 21 and enhancement type MOSFET 22 are connected in series to each other, wherein the depletion-type MOSFET 21 is connected to high-potential-side terminal and the enhancement type MOSFET 22 is connected to low-potential-side terminal. The semiconductor device having the configuration described above is disposed in a voltage detecting circuit section in a control IC for a battery including multiple cells.
    • 半导体器件可以输出用于任意电位的参考电压,并且可以非常精确地检测包括多个单元的电池中的每个单元的电压。 该器件包括耗尽型MOSFET21和增强型MOSFET22,并且具有从耗尽型MOSFET21和增强型MOSFET22与接地端子隔离的浮置结构。 耗尽型MOSFET21和增强型MOSFET22彼此串联连接,其中耗尽型MOSFET21连接到高电位侧端子,增强型MOSFET22连接到低电位侧端子 。 具有上述结构的半导体器件设置在包括多个单元的电池的控制IC中的电压检测电路部分中。
    • 9. 发明申请
    • Manufacturing method of a semiconductor device
    • 半导体器件的制造方法
    • US20050020040A1
    • 2005-01-27
    • US10867225
    • 2004-06-15
    • Masaharu YamajiAkio KitamuraNaoto Fujishima
    • Masaharu YamajiAkio KitamuraNaoto Fujishima
    • H01L21/265H01L21/336H01L29/06H01L29/78H01L21/425
    • H01L29/0653H01L21/26586H01L29/66659H01L29/7835
    • A plurality of trenches, about 1 μm long in the Z-direction that crosses the X-direction (source-drain direction), are formed in a semiconductor substrate, arranged in the Z-direction. Ion implantation is performed obliquely with respect to side faces of each trench that cross the X-direction. Then, ion implantation is performed perpendicularly to the bottom face of each trench. Then, oxidation and drive-in are performed, whereby semiconductor portions between adjacent trenches are oxidized and each trench is thereby filled with an oxide to establish a wide trench region as would be obtained by connecting the trenches. At the same time, the impurity ions implanted around the trenches are diffused also in the Z-direction, whereby a uniform offset drain region is formed around the trench so that an optimum concentration and diffusion of the impurity ions is obtained, and an oxide or the like is buried in a wide trench region.
    • 在沿Z方向排列的半导体衬底中形成有跨越X方向(源极 - 漏极方向)在Z方向上长约1m的多个沟槽。 离子注入相对于穿过X方向的每个沟槽的侧面倾斜地进行。 然后,垂直于每个沟槽的底面进行离子注入。 然后,执行氧化和驱入,由此相邻沟槽之间的半导体部分被氧化,并且每个沟槽由此填充氧化物以建立通过连接沟槽获得的宽沟槽区域。 同时,注入在沟槽周围的杂质离子也在Z方向上扩散,由此在沟槽周围形成均匀的偏移漏极区域,从而获得杂质离子的最佳浓度和扩散,以及氧化物或 类似物被埋在宽沟槽区域中。