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    • 5. 发明申请
    • SOLID-STATE IMAGING DEVICE AND METHOD OF MANUFACTURING SAME
    • 固态成像装置及其制造方法
    • US20070052056A1
    • 2007-03-08
    • US11470118
    • 2006-09-05
    • Takashi DoiToshihiko KitamuraTakayuki Sakai
    • Takashi DoiToshihiko KitamuraTakayuki Sakai
    • H01L31/06
    • H01L27/1463H01L27/14634H01L27/14689H01L27/1469
    • A solid-state imaging device includes: a semiconductor substrate; and a signal processing section provided on a backside of the semiconductor substrate. The semiconductor substrate has; a first impurity region of a first conductivity type, the first impurity region storing a signal charge produced through photoelectric conversion by a photoelectric conversion section formed in a surface portion of the semiconductor substrate; a second impurity region of the first conductivity type formed below the first impurity region; and a first gate electrode penetrating the semiconductor substrate in a thickness direction of the semiconductor substrate, the first gate electrode transferring the signal charge stored in the first impurity region to the second impurity region. The signal processing section receives the signal charge transferred to the second impurity region.
    • 固体摄像器件包括:半导体衬底; 以及设置在所述半导体衬底的背面上的信号处理部。 半导体衬底具有: 所述第一导电类型的第一杂质区域,所述第一杂质区域存储由形成在所述半导体衬底的表面部分中的光电转换部分通过光电转换产生的信号电荷; 形成在第一杂质区下面的第一导电类型的第二杂质区; 以及在所述半导体衬底的厚度方向上穿透所述半导体衬底的第一栅极电极,所述第一栅极电极将存储在所述第一杂质区域中的信号电荷转移到所述第二杂质区域。 信号处理部分接收转移到第二杂质区域的信号电荷。
    • 7. 发明授权
    • Charged particle beam device
    • 带电粒子束装置
    • US08933422B2
    • 2015-01-13
    • US13812842
    • 2011-06-08
    • Ryoichi IshiiTakashi DoiOsamu SatoYasushi Ebizuka
    • Ryoichi IshiiTakashi DoiOsamu SatoYasushi Ebizuka
    • H01J37/18H01J37/16
    • H01J37/18H01J37/16H01J37/185H01J2237/2001H01J2237/2802
    • The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.
    • 本发明的目的是提供一种带电粒子束装置,使得尖端部分可以有效地保持在清洁状态,同时阀体更换的频率也降低。 为了实现该目的,提供一种带电粒子束装置,包括:分隔件,位于带电粒子源侧真空空间和样品台侧真空空间之间,所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构,其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置,并且当挡板构件处于位于第一位置的状态时,控制装置执行在样本室和更换室之间打开阀的控制 位置。