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1. 发明申请

US20120325797A1 HEATER UNIT, FAN FILTER UNIT, AND SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：加热器单元，风扇过滤器单元和基板处理设备
公开(公告)号：US20120325797A1
公开(公告)日：2012-12-27
申请号：US13529404
申请日：2012-06-21
申请人： Masaaki FURUYA , Munenori IWAMI , Takahiko WAKATSUKI , Masanori Kondo , Katsuya YAMADA
发明人： Masaaki FURUYA , Munenori IWAMI , Takahiko WAKATSUKI , Masanori Kondo , Katsuya YAMADA
IPC分类号： F27D11/00
CPC分类号： H01L21/67103 , B01D46/10 , B01D46/4263 , B01D2273/30 , H05B3/283 , H05B2203/022
摘要： A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.
摘要翻译：根据实施例的加热器单元包括：扁平加热器，其包括以平面图案布置的线性加热元件; 使用具有高导热性的材料以网格图案形成的第一网状体，并且至少放置在面向平面加热器的平面加热器的一侧上; 以及第二网状体，其使用比所述第一网状体的导热性低的材料以网状图案形成，并且与所述第一网状体的与所述第一网状体的面对所述扁平加热器的表面相对的表面放置。

2. 发明申请

US20120112084A1 RADIATION DETECTION APPARATUS 有权
标题翻译：辐射检测装置
公开(公告)号：US20120112084A1
公开(公告)日：2012-05-10
申请号：US13289481
申请日：2011-11-04
申请人： Katsuya YAMADA , Yasuaki Kawasaki , Hiroshi Iwata
发明人： Katsuya YAMADA , Yasuaki Kawasaki , Hiroshi Iwata
IPC分类号： G01T1/24
CPC分类号： G01T1/2018
摘要： According to one embodiment, a radiation detection apparatus includes a radiation detection panel, a support member, a circuit board, a flexible circuit board, a housing, a connecting member, a thermally radiative member, and a thermally conductive member. The support member supports the radiation detection panel on one surface thereof. The circuit board is supported by other surface of the support member, and drives the radiation detection panel. The flexible circuit board electrically connects the radiation detection panel with the circuit board, and on which an integrated circuit is mounted. The housing has thermal insulation, and a part of which is provided with an opening. The connecting member is connected to the support member and the housing. The thermally radiative member is located outside the housing and extends through the opening. The thermally radiative member is opposed to the integrated circuit, and shields an electromagnetic field that leaks from the opening.
摘要翻译：根据一个实施例，放射线检测装置包括放射线检测面板，支撑构件，电路板，柔性电路板，壳体，连接构件，热辐射构件和导热构件。支撑构件在其一个表面上支撑放射线检测面板。电路板由支撑构件的其他表面支撑，并驱动辐射检测面板。柔性电路板将辐射检测面板与电路板电连接，并且其上安装有集成电路。壳体具有绝热，其一部分设有开口。连接构件连接到支撑构件和壳体。热辐射构件位于壳体外部并延伸穿过开口。热辐射构件与集成电路相对，并屏蔽从开口泄漏的电磁场。

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