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1. 发明授权

US08786419B2 Method for controlling a device and a device for controlling the device 有权
标题翻译：用于控制设备的方法和用于控制设备的设备
公开(公告)号：US08786419B2
公开(公告)日：2014-07-22
申请号：US12611662
申请日：2009-11-03
申请人： Markus Ulm , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
发明人： Markus Ulm , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
IPC分类号： G01C19/00 , G01P3/44 , G01P15/08 , B60Q1/00 , G08G1/09
CPC分类号： B60R21/0132 , B60R2021/01327 , G01C19/5726 , G01C19/574 , G01P15/14 , G01P21/00
摘要： A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.
摘要翻译：一种用于通过使用旋转速率传感器来控制设备的装置。为了提供一种用于确定安全装置的触发信号的装置，其允许特别紧凑的装置的实现，该装置被设置为基于第一传感器信号来确定加速度变量，该第一传感器信号用于旋转速率传感器和用于旋转速率传感器的第二地震质量的第二传感器信号，并且根据加速度变量来控制该装置。

2. 发明申请

US20100225500A1 METHOD FOR CONTROLLING A DEVICE AND A DEVICE FOR CONTROLLING THE DEVICE 有权
标题翻译：用于控制设备的方法和用于控制设备的设备
公开(公告)号：US20100225500A1
公开(公告)日：2010-09-09
申请号：US12611662
申请日：2009-11-03
申请人： Markus ULM , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
发明人： Markus ULM , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
IPC分类号： G05B11/01
CPC分类号： B60R21/0132 , B60R2021/01327 , G01C19/5726 , G01C19/574 , G01P15/14 , G01P21/00
摘要： A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.
摘要翻译：一种用于通过使用旋转速率传感器来控制设备的装置。为了提供一种用于确定安全装置的触发信号的装置，其允许特别紧凑的装置的实现，该装置被设置为基于第一传感器信号来确定加速度变量，该第一传感器信号用于旋转速率传感器和用于旋转速率传感器的第二地震质量的第二传感器信号，并且根据加速度变量来控制该装置。

3. 发明授权

US08910518B2 Self-test for yaw rate sensors 有权
标题翻译：偏航率传感器自检
公开(公告)号：US08910518B2
公开(公告)日：2014-12-16
申请号：US13266408
申请日：2010-04-06
申请人： Wolfram Bauer , Johannes Classen , Rainer Willig , Matthias Meier , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Hans-Dieter Schwarz , Michael Veith , Christoph Lang , Udo-Martin Gomez
发明人： Wolfram Bauer , Johannes Classen , Rainer Willig , Matthias Meier , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Hans-Dieter Schwarz , Michael Veith , Christoph Lang , Udo-Martin Gomez
IPC分类号： G01C19/00 , G01C19/5726
CPC分类号： G01C25/00 , G01C19/56 , G01C19/5726
摘要： A yaw rate sensor (10) includes a movable mass structure (12) and a drive component (13) which is suitable for setting the movable mass structure (12) in motion (14), and an analysis component (15) which is suitable for detecting a response (40) of the movable mass structure (12) to a yaw rate (Ω). A method for functional testing of a yaw rate sensor (10) includes the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed point (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), detecting a measure of the feedback of the movable mass structure (12), and reading out the response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, the readout of the response signal (47) in relation to a processing direction (45) of the test signal (42) is provided between a feed point (48) for a test signal (42) and an actuator (38) for feeding back a deflection (40) of the movable mass structure (12).
摘要翻译：横摆率传感器（10）包括可移动质量结构（12）和适于设置可移动质量结构（12）运动（14）的驱动部件（13），以及适合的分析部件（15）用于将所述可移动质量结构（12）的响应（40）检测到偏航率（＆lt; OHgr）。一种用于横摆角速度传感器（10）的功能测试的方法包括以下步骤：驱动可移动质量结构（12），将测试信号（42）馈送到正交控制回路（44）正交控制回路（44），反馈可移动质量结构（12）的偏转（40），检测可移动质量结构（12）的反馈的测量值，并从正交控制回路（44）。在偏航率传感器（10）中，并且在该方法中，响应信号（47）相对于测试信号（42）的处理方向（45）的读出被提供在用于测试信号（42）和用于反馈可移动质量结构（12）的偏转（40）的致动器（38）。

4. 发明授权

US08938364B2 Sensor device with self-test capability 有权
标题翻译：具有自检能力的传感器装置
公开(公告)号：US08938364B2
公开(公告)日：2015-01-20
申请号：US12803910
申请日：2010-07-09
申请人： Patrick Goerlich , Riad Stefo , Wolfram Bauer , Rainer Willig , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Michael Baus , Gregor Wetekam , Michael Veith , Emma Abel , Wolfgang Fuerst
发明人： Patrick Goerlich , Riad Stefo , Wolfram Bauer , Rainer Willig , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Michael Baus , Gregor Wetekam , Michael Veith , Emma Abel , Wolfgang Fuerst
IPC分类号： G01R31/28 , G01D18/00 , G06F11/27 , G01D3/08 , G01R31/3185
CPC分类号： G01D18/00 , G01D3/08 , G01R31/2834 , G01R31/318511 , G06F11/27 , Y10T29/49004
摘要： A sensor device includes: a sensor module mounted on a conductor board; a sensitive element which is sensitive to a variable; a self-test control unit implementing a self-test program, the self-test control unit applying a self-test variable to the sensitive element, taking the self-test program into account; a detection unit detecting a characteristic of the sensitive element which is altered as a result of the applied self-test variable and providing an actual self-test response, taking the altered characteristic into account; and a comparator unit provided on or in the sensor module, the comparator unit comparing the actual self-test response to at least one specified setpoint self-test response and providing comparative information.
摘要翻译：传感器装置包括：安装在导体板上的传感器模块; 对变量敏感的敏感元素; 实施自检程序的自检控制单元，将自检变量应用于敏感元件的自检控制单元，考虑自检程序; 检测单元，其检测作为所应用的自检变量的结果而改变的敏感元件的特性，并提供实际的自检响应，考虑改变的特性; 以及设置在传感器模块上或传感器模块中的比较器单元，比较器单元将实际自检响应与至少一个指定的设定点自检响应进行比较并提供比较信息。

5. 发明授权

US07535325B2 Component for impedance change in a coplanar waveguide and method for producing a component 失效
标题翻译：共面波导中的阻抗变化的分量和用于制造组件的方法
公开(公告)号：US07535325B2
公开(公告)日：2009-05-19
申请号：US10572220
申请日：2004-07-24
申请人： Roland Mueller-Fiedler , Markus Ulm , Mathias Reimann , Thomas Buck
发明人： Roland Mueller-Fiedler , Markus Ulm , Mathias Reimann , Thomas Buck
IPC分类号： H01P1/10 , H01H59/00
CPC分类号： H01H59/0009 , Y10T29/49105
摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.
摘要翻译：提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件，并且是电绝缘的，使得在每种情况下都形成电容器。连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。此外，还提供了这种组分的制造方法。

6. 发明申请

US20060097388A1 Electrical system, especially a microelectronic or microelectromechanical high frequency system 审中-公开
标题翻译：电气系统，特别是微电子或微机电高频系统
公开(公告)号：US20060097388A1
公开(公告)日：2006-05-11
申请号：US10520218
申请日：2003-06-24
申请人： Klaus Breitschwerdt , Markus Ulm , Andrea Urban , Mathias Reimann
发明人： Klaus Breitschwerdt , Markus Ulm , Andrea Urban , Mathias Reimann
IPC分类号： H01L23/34
CPC分类号： H01L23/66 , H01L2223/6616 , H01L2223/6627 , H01L2924/15313 , H01L2924/16152 , H01L2924/1903 , H01L2924/3011 , H01P1/047 , H01P11/00
摘要： An electrical component is proposed, in particular a high-frequency microelectronic or microelectromechanical component having a base element that is provided with a feedthrough, a first conductive structure extending on an upper side of the base element being connected by the feedthrough, continuously for high-frequency electromagnetic waves, to a second conductive structure extending on a lower side of the base element. The feedthrough has the form of a right prism or cylinder, and the first and/or the second conductive structure is embodied as a planar waveguide, in particular as a coplanar waveguide. Also proposed is a method for producing an electrical component having a feedthrough for high-frequency electromagnetic waves through a base element, an electrically conductive layer being applied on an upper side of the base element and an etching mask being applied on a lower side of the base element; a trench, having at least almost perpendicular sidewalls and penetrating through the base element, then being etched into the base element in a plasma etching step; an electrically conductive layer being applied on the lower side after the etching and after removal of the etching mask; and the trench lastly being filled or lined with an electrically conductive material.
摘要翻译：提出了一种电气元件，特别是具有设置有馈通的基座元件的高频微电子或微机电元件，在基座元件的上侧延伸的第一导电结构，通过馈通连接，到基底元件的下侧延伸的第二导电结构。馈通具有右棱镜或圆筒的形式，并且第一和/或第二导电结构被实施为平面波导，特别是作为共面波导。还提出了一种用于制造具有通过基底元件的高频电磁波的馈通的电气元件的方法，将导电层施加在基底元件的上侧，并且将蚀刻掩模施加在基底元件的下侧基本元素沟槽，具有至少几乎垂直的侧壁并穿过基底元件，然后在等离子体蚀刻步骤中蚀刻到基底元件中; 在蚀刻之后和去除蚀刻掩模之后，在下侧施加导电层; 并且沟槽最后被填充或衬有导电材料。

7. 发明申请

US20070229198A1 Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component 失效
标题翻译：共面波导中的阻抗变化的组件和用于制造组件的方法
公开(公告)号：US20070229198A1
公开(公告)日：2007-10-04
申请号：US10572220
申请日：2004-07-24
申请人： Roland Mueller-Fiedler , Markus Ulm , Mathias Reimann , Thomas Buck
发明人： Roland Mueller-Fiedler , Markus Ulm , Mathias Reimann , Thomas Buck
IPC分类号： H01P1/10 , H01H65/00
CPC分类号： H01H59/0009 , Y10T29/49105
摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.
摘要翻译：提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件，并且是电绝缘的，使得在每种情况下都形成电容器。连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。此外，还提供了这种组分的制造方法。

8. 发明授权

US06876268B2 Capacitive finger coupling element on a silicon support for coupling a strip line structure 失效
标题翻译：用于耦合带状线结构的硅支撑上的电容指状结合元件
公开(公告)号：US06876268B2
公开(公告)日：2005-04-05
申请号：US10381236
申请日：2002-05-07
申请人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
发明人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
IPC分类号： H01P1/00 , H01P1/203 , H01P5/02
CPC分类号： H01P1/203
摘要： A coupling element for an HF strip line structure on an HF substrate, implemented in thin-layer technology as a finger coupler structure on a silicon support is described. The bonding to the strip line tracks of the HF strip line structure is effected via metallizations, in particular in the form of spacers.
摘要翻译：描述了在作为硅载体上的手指耦合器结构的薄层技术中实现的HF衬底上的HF带状线结构的耦合元件。通过金属化，特别是以间隔物的形式，实现了与带状线路轨道的接合。

9. 发明申请

US20110066396A1 Sensor device and manufacturing method for a sensor device 有权
标题翻译：用于传感器装置的传感器装置和制造方法
公开(公告)号：US20110066396A1
公开(公告)日：2011-03-17
申请号：US12803910
申请日：2010-07-09
申请人： Patrick Goerlich , Riad Stefo , Wolfram Bauer , Rainer Willig , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Michael Baus , Gregor Wetekam , Michael Veith , Emma Abel , Wolfgang Fuerst
发明人： Patrick Goerlich , Riad Stefo , Wolfram Bauer , Rainer Willig , Burkhard Kuhlmann , Mathias Reimann , Ermin Esch , Michael Baus , Gregor Wetekam , Michael Veith , Emma Abel , Wolfgang Fuerst
IPC分类号： G06F19/00 , G01R31/28
CPC分类号： G01D18/00 , G01D3/08 , G01R31/2834 , G01R31/318511 , G06F11/27 , Y10T29/49004
摘要： A sensor device includes: a sensor module mounted on a conductor board; a sensitive element which is sensitive to a variable; a self-test control unit implementing a self-test program, the self-test control unit applying a self-test variable to the sensitive element, taking the self-test program into account; a detection unit detecting a characteristic of the sensitive element which is altered as a result of the applied self-test variable and providing an actual self-test response, taking the altered characteristic into account; and a comparator unit provided on or in the sensor module, the comparator unit comparing the actual self-test response to at least one specified setpoint self-test response and providing comparative information.
摘要翻译：传感器装置包括：安装在导体板上的传感器模块; 对变量敏感的敏感元素; 实施自检程序的自检控制单元，将自检变量应用于敏感元件的自检控制单元，考虑自检程序; 检测单元，其检测作为所应用的自检变量的结果而改变的敏感元件的特性，并提供实际的自检响应，考虑改变的特性; 以及设置在传感器模块上或传感器模块中的比较器单元，比较器单元将实际自检响应与至少一个指定的设定点自检响应进行比较并提供比较信息。

10. 发明授权

US10107851B2 Arrangement and method for detecting connection loss at a circuit part having a capacitive behaviour 有权
公开(公告)号：US10107851B2
公开(公告)日：2018-10-23
申请号：US14000121
申请日：2011-12-22
申请人： Mathias Reimann
发明人： Mathias Reimann
IPC分类号： G01R31/04 , G01R31/02
摘要： The disclosure relates to an arrangement for detecting connection loss at a circuit part which has a capacitive behavior and is electrically connected to a useful signal source. The disclosure provides an evaluation circuit which is electrically connected to an input node of the circuit part having a capacitive behavior and detects the pulsed useful signal (UNUTZ), output by the useful signal source, at the input node of the circuit part having a capacitive behavior and evaluates the signal characteristics in order to detect connection loss.

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