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1. 发明申请

US20090278214A1 Microelectromechanical Systems Encapsulation Process 有权
标题翻译：微机电系统封装工艺
公开(公告)号：US20090278214A1
公开(公告)日：2009-11-12
申请号：US12506219
申请日：2009-07-20
申请人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
发明人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
IPC分类号： H01L29/84
CPC分类号： B81C1/0096 , B81B3/0005
摘要： An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
摘要翻译：描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。涂层在器件释放后，但在封装层封口之前应用。或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

2. 发明授权

US07414351B2 Energy harvesting device manufactured by print forming processes 有权
公开(公告)号：US07414351B2
公开(公告)日：2008-08-19
申请号：US11541966
申请日：2006-10-02
申请人： Markus Ulm , Brian Stark , Matthias Metz
发明人： Markus Ulm , Brian Stark , Matthias Metz
IPC分类号： H01L31/00
CPC分类号： B60C23/0411 , H01L41/1136 , H01L41/331 , H01L41/43 , H02N2/186 , H02N2/22 , Y10T29/42 , Y10T29/435 , Y10T29/49007 , Y10T29/49172 , Y10T29/49176 , Y10T29/49224
摘要： Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

3. 发明申请

US20060246631A1 Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权
公开(公告)号：US20060246631A1
公开(公告)日：2006-11-02
申请号：US11115828
申请日：2005-04-27
申请人： Markus Lutz , Aaron Partridge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
发明人： Markus Lutz , Aaron Partridge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
IPC分类号： H01L21/44
CPC分类号： B81C1/0096 , B81B3/0005 , B81C2201/112 , B82Y30/00 , H01L2224/13 , H01L2924/1461 , H01L2924/00
摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

4. 发明申请

US20100225500A1 METHOD FOR CONTROLLING A DEVICE AND A DEVICE FOR CONTROLLING THE DEVICE 有权
标题翻译：用于控制设备的方法和用于控制设备的设备
公开(公告)号：US20100225500A1
公开(公告)日：2010-09-09
申请号：US12611662
申请日：2009-11-03
申请人： Markus ULM , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
发明人： Markus ULM , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
IPC分类号： G05B11/01
CPC分类号： B60R21/0132 , B60R2021/01327 , G01C19/5726 , G01C19/574 , G01P15/14 , G01P21/00
摘要： A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.
摘要翻译：一种用于通过使用旋转速率传感器来控制设备的装置。为了提供一种用于确定安全装置的触发信号的装置，其允许特别紧凑的装置的实现，该装置被设置为基于第一传感器信号来确定加速度变量，该第一传感器信号用于旋转速率传感器和用于旋转速率传感器的第二地震质量的第二传感器信号，并且根据加速度变量来控制该装置。

5. 发明申请

US20080053228A1 Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
标题翻译：三轴加速度计具有单个检测质量和全差分输出信号
公开(公告)号：US20080053228A1
公开(公告)日：2008-03-06
申请号：US11513669
申请日：2006-08-30
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/00
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译：三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧包括感测单元。

6. 发明申请

US20080050845A1 Microelectromechanical systems encapsulation process 有权
标题翻译：微机电系统封装工艺
公开(公告)号：US20080050845A1
公开(公告)日：2008-02-28
申请号：US11510040
申请日：2006-08-25
申请人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
发明人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
IPC分类号： H01L21/00
CPC分类号： B81C1/0096 , B81B3/0005
摘要： An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
摘要翻译：描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。涂层在器件释放后，但在封装层封口之前应用。或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

7. 发明授权

US07229694B2 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component 有权
标题翻译：微机械部件和在微机械部件上制造防粘层的方法
公开(公告)号：US07229694B2
公开(公告)日：2007-06-12
申请号：US10446583
申请日：2003-05-27
申请人： Lutz Mueller , Kersten Kehr , Markus Ulm
发明人： Lutz Mueller , Kersten Kehr , Markus Ulm
IPC分类号： B32B9/04
CPC分类号： B81B3/0005 , B05D1/62 , B05D5/083 , B81C2201/019 , B81C2201/112 , C09D4/00 , C09D183/08 , C23C28/00 , C23C28/42 , C23C28/44 , Y10T428/31663 , C08G77/24
摘要： A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.
摘要翻译：微机械部件包括由至少一种含氟硅烷形成的防粘层，其被施加到其表面的至少部分以减小表面力。为了增加机械和热负荷能力，抗粘剂层被提供为由至少一个金属氧化物层和至少一层由至少一种含氟硅烷组成的多层涂层。

8. 发明授权

US07224239B2 Structural element having a coplanar line 失效
标题翻译：具有共面线的结构元件
公开(公告)号：US07224239B2
公开(公告)日：2007-05-29
申请号：US10974621
申请日：2004-10-27
申请人： Markus Ulm , Joerg Schoebel
发明人： Markus Ulm , Joerg Schoebel
IPC分类号： H01P1/24
CPC分类号： H01P3/003 , H01P1/268
摘要： Novel concepts are proposed for line terminations of coplanar lines that are as anechoic as possible, having a neutral wire and two outer conductors that are situated at least from section to section on both sides of the neutral wire, the line termination including at least one resistor element, via which the neutral wire is connected at its end with the two outer conductors. A connection at the end between the two outer conductors exists independently of the at least one resistor element. Alternatively or in supplementation to this, at least one resistor element of the line termination is situated at a slanting angle to the neutral wire, i.e. at an angle which is either greater or less than 90°.
摘要翻译：提出了用于尽可能消音的共面线的线路终端的新概念，具有中性线和至少位于中性线的两侧上的截面的两个外部导体，线路终端包括至少一个电阻器元件，中性线在其端部与两个外导体连接。在两个外部导体之间的端部处的连接独立于至少一个电阻器元件存在。作为替代或补充，线路终端的至少一个电阻器元件以与中性线的倾斜角度定位，即以大于或小于90°的角度。

9. 发明授权

US06876268B2 Capacitive finger coupling element on a silicon support for coupling a strip line structure 失效
标题翻译：用于耦合带状线结构的硅支撑上的电容指状结合元件
公开(公告)号：US06876268B2
公开(公告)日：2005-04-05
申请号：US10381236
申请日：2002-05-07
申请人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
发明人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
IPC分类号： H01P1/00 , H01P1/203 , H01P5/02
CPC分类号： H01P1/203
摘要： A coupling element for an HF strip line structure on an HF substrate, implemented in thin-layer technology as a finger coupler structure on a silicon support is described. The bonding to the strip line tracks of the HF strip line structure is effected via metallizations, in particular in the form of spacers.
摘要翻译：描述了在作为硅载体上的手指耦合器结构的薄层技术中实现的HF衬底上的HF带状线结构的耦合元件。通过金属化，特别是以间隔物的形式，实现了与带状线路轨道的接合。

10. 发明授权

US08786419B2 Method for controlling a device and a device for controlling the device 有权
标题翻译：用于控制设备的方法和用于控制设备的设备
公开(公告)号：US08786419B2
公开(公告)日：2014-07-22
申请号：US12611662
申请日：2009-11-03
申请人： Markus Ulm , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
发明人： Markus Ulm , Mathias Reimann , Harald Emmerich , Udo-Martin Gomez , Emma Abel
IPC分类号： G01C19/00 , G01P3/44 , G01P15/08 , B60Q1/00 , G08G1/09
CPC分类号： B60R21/0132 , B60R2021/01327 , G01C19/5726 , G01C19/574 , G01P15/14 , G01P21/00
摘要： A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.
摘要翻译：一种用于通过使用旋转速率传感器来控制设备的装置。为了提供一种用于确定安全装置的触发信号的装置，其允许特别紧凑的装置的实现，该装置被设置为基于第一传感器信号来确定加速度变量，该第一传感器信号用于旋转速率传感器和用于旋转速率传感器的第二地震质量的第二传感器信号，并且根据加速度变量来控制该装置。

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