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    • 5. 发明授权
    • Micromechanical component and manufacturing method for a micromechanical component
    • 微机械部件的微机械部件和制造方法
    • US09038466B2
    • 2015-05-26
    • US13431613
    • 2012-03-27
    • Jochen Reinmuth
    • Jochen Reinmuth
    • G01P15/125B81B3/00G01P15/08G01L9/00
    • B81B3/0021B81B2201/0235B81B2201/0264G01L9/0005G01P15/0802G01P15/125G01P2015/0831Y10T29/49009
    • A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component.
    • 描述了一种微机械部件,其具有相对于基板固定地安装有至少一个定子电极的基板,具有至少一个致动器电极相对于可移动质量块固定地安装的可移动质量块,以及至少一个弹簧, 质量是可移位的。 借助于至少一个分离沟槽,可移动质量体由衬底构成,至少一个外部定子电极跨越至少一个分离沟槽和/或可移动质量块的至少一个部分,至少一个致动器电极 突出在所述至少一个外部定子电极和所述基板之间,并且至少一个内部定子电极在所述至少一个致动器电极和所述基板之间突出。 还描述了用于微机械部件的相关制造方法。
    • 10. 发明申请
    • ACCELERATION SENSOR METHOD FOR OPERATING AN ACCELERATION SENSOR
    • 用于加速传感器的加速传感器方法
    • US20120017681A1
    • 2012-01-26
    • US13148038
    • 2009-12-11
    • Jochen ReinmuthHarald Emmerich
    • Jochen ReinmuthHarald Emmerich
    • G01P15/08
    • G01P15/125G01P2015/0831
    • An acceleration sensor includes a housing, a first seismic mass which is formed as a first asymmetrical rocker and is disposed in the housing via at least one first spring, a second seismic mass which is formed as a second asymmetrical rocker and is disposed in the housing via at least one second spring, and a sensor and evaluation unit which is designed to ascertain information regarding corresponding rotational movements of the first seismic mass and the second seismic mass in relation to the housing and to determine acceleration information with respect to an acceleration of the acceleration sensor, taking the ascertained information into account. In addition, a method for operating an acceleration sensor is disclosed. The rockers execute opposite rotational movements in response to the presence of an acceleration. A differential evaluation of the signals makes it possible to free the measuring signal of any existing interference signals.
    • 加速度传感器包括壳体,第一抗震块,其形成为第一不对称摇臂,并且经由至少一个第一弹簧设置在壳体中,第二抗震块形成为第二不对称摇臂并设置在壳体中 经由至少一个第二弹簧以及传感器和评估单元,该传感器和评估单元被设计成确定关于第一地震质量块和第二地震质量块相对于壳体的相应旋转运动的信息,并且确定相对于壳体的加速度的加速度信息 加速度传感器,考虑确定的信息。 此外,公开了一种用于操作加速度传感器的方法。 响应于加速度的存在,摇臂执行相反的旋转运动。 信号的差分评估使得可以释放任何现有干扰信号的测量信号。