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1. 发明授权

US5844034A Surfactants to create dispersions in fluorinated liquids 失效
标题翻译：在氟化液体中产生分散体的表面活性剂
公开(公告)号：US5844034A
公开(公告)日：1998-12-01
申请号：US847192
申请日：1997-05-01
申请人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
发明人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
IPC分类号： C11D7/50 , C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C09D127/12 , C09D133/02 , C09D139/06 , C11D7/60 , C08K5/02 , C08K5/05 , C08K5/06 , C08L27/12
CPC分类号： C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C08J2327/12
摘要： This invention provides a fluoropolymer dispersion useful for coating applications. The dispersion is a homogeneous and non-ozone depleting dispersion comprising a lubricious fluoropolymer, an inert perfluorinated liquid, a polar solvent, and an effective amount of a surface active agent selected from the group consisting of a. perfluoroaliphatic amidoalkanols; b. polymerized products formed from the reaction of a mixture comprising a hydrophilic monomer and a monomer of the general formula: ##STR1## wherein p and q are integers between 1 and 4 inclusive, x and y are integers between 0 and 4 inclusive, m is 1 or 2, n is an integer between 3 and 10 inclusive, X' is either a methyl group or a single hydrogen atom, g is 0 or 1, and Q is a sulfonamido constituent group according to the formula: ##STR2## wherein R.sup.1 is a hydrogen or a lower alkyl group having from 1 to 6 carbon atoms and wherein the hydrophilic monomer is present in an amount constituting inclusively between five and twenty-five weight percent of the reactant mixture when the polar solvent employed is a polar organic solvent and wherein the hydrophilic monomer is present in an amount constituting inclusively between one and twenty-five weight percent of the reactant mixture when the polar solvent employed is water; and c. Perfluorinated ether acids according to the general formula: ##STR3## wherein z is between 1 and 10 inclusive, s is between 0 to 4, t is between 0 to 4, v between 0 to 5, w is 0 or 1, and Y is either F or CF.sub.3.
摘要翻译：本发明提供了一种可用于涂料应用的含氟聚合物分散体。分散体是均匀的和非消耗臭氧的分散体，其包含润滑的含氟聚合物，惰性全氟化液体，极性溶剂和有效量的选自a的表面活性剂。全氟脂族酰氨基链烷醇; b。由包含亲水单体和单体的混合物反应形成的由以下通式表示的聚合产物：其中p和q是包括1和4的整数，x和y是0和4之间的整数，其中m是1 或2，n为3〜10的整数，X'为甲基或单个氢原子，g为0或1，Q为根据下式的亚磺酰氨基成分基团：其中R1为氢或具有1至6个碳原子的低级烷基，并且当所用的极性溶剂是极性有机溶剂时，所述亲水性单体以占所述反应物混合物的5至25重量％的量包含在其中的量存在，并且其中当所使用的极性溶剂是水时，亲水性单体以包含在反应物混合物的一种和25重量％之间的量存在; 和c。全氟化醚酸，其通式如下：其中z在1和10之间，其中s在0至4之间，t在0至4之间，v在0至5之间，w为0或1，Y为 F或CF3。

2. 发明授权

US5660888A Surfactants to create fluoropolymer dispersions in fluorinated liquids 失效
标题翻译：在氟化液体中形成氟聚合物分散体的表面活性剂
公开(公告)号：US5660888A
公开(公告)日：1997-08-26
申请号：US646154
申请日：1996-05-07
申请人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
发明人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
IPC分类号： C11D7/50 , C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C09D127/12 , C09D133/02 , C09D139/06 , C11D7/60 , B05D5/00
CPC分类号： C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C08J2327/12
摘要： This invention provides a fluoropolymer dispersion useful for coating applications, The dispersion is a homogeneous and non-ozone depleting dispersion comprising a lubricious fluoropolymer, an inert perfluorinated liquid, a polar solvent, and an effective amount of a surface active agent selected from the group consisting of:a. perfluoroaliphatic amidoalkanols;b. polymerized products formed from the reaction of a mixture comprising a hydrophilic monomer and a monomer of the general formula: ##STR1## wherein p and q are integers between 1 and 4 inclusive, x and y are integers between 0 and 4 inclusive, m is 1 or 2, n is an integer between 3 and 10 inclusive, X' is either a methyl group or a single hydrogen atom, g is 0 or 1, and Q is a sulfonamido constituent group according to the formula: ##STR2## wherein R.sup.1 is a hydrogen or a lower alkyl group having from 1 to 6 carbon atoms and wherein the hydrophilic monomer is present in an amount constituting inclusively between five and twenty-five weight percent of the reactant mixture when the polar solvent employed is a polar organic solvent and wherein the hydrophilic monomer is present in an amount constituting inclusively between one and twenty-five weight percent of the reactant mixture when the polar solvent employed is water; andc. Perfluorinated ether acids according to the general formula: ##STR3## wherein z is between 1 and 10 inclusive, s is between 0 to 4, t is between 0 to 4, v between 0 to 5, w is 0 or 1, and Y is either F or CF.sub.3.
摘要翻译：本发明提供了一种可用于涂料应用的含氟聚合物分散体。该分散体是均匀的和非消耗臭氧的分散体，其包含润滑含氟聚合物，惰性全氟化液体，极性溶剂和有效量的表面活性剂，所述表面活性剂选自的：a。全氟脂族酰氨基链烷醇; b。由包含亲水单体和单体的混合物反应形成的由以下通式表示的聚合产物：其中p和q是包括1和4的整数，x和y是0和4之间的整数，其中m是1 或2，n为3〜10的整数，X'为甲基或单个氢原子，g为0或1，Q为根据下式的亚磺酰氨基成分基团：其中R1为氢或具有1至6个碳原子的低级烷基，并且当所用的极性溶剂是极性有机溶剂时，所述亲水性单体以占所述反应物混合物的5至25重量％的量包含在其中的量存在，并且其中当所使用的极性溶剂是水时，亲水性单体以包含在反应物混合物的一种和25重量％之间的量存在; 和c。全氟化醚酸，其通式如下：其中z在1和10之间，其中s在0至4之间，t在0至4之间，v在0至5之间，w为0或1，Y为 F或CF3。

3. 发明授权

US5532310A Surfactants to create fluoropolymer dispersions in fluorinated liquids 失效
标题翻译：在氟化液体中形成氟聚合物分散体的表面活性剂
公开(公告)号：US5532310A
公开(公告)日：1996-07-02
申请号：US430556
申请日：1995-04-28
申请人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
发明人： Mark W. Grenfell , Richard M. Flynn , Patricia M. Savu
IPC分类号： C11D7/50 , C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C09D127/12 , C09D133/02 , C09D139/06 , C11D7/60 , C08K5/02 , C08K5/16 , C08L27/12 , C08L27/18
CPC分类号： C08J3/09 , C08K5/095 , C08K5/20 , C08K5/435 , C08J2327/12
摘要： This invention provides a fluoropolymer dispersion useful for coating applications. The dispersion is a homogeneous and non-ozone depleting dispersion comprising a lubricious fluoropolymer, an inert perfluorinated liquid, a polar solvent, and an effective amount of a surface active agent selected from the group consisting of:a. perfluoroaliphatic amidoalkanols;b. polymerized products formed from the reaction of a mixture comprising a hydrophilic monomer and a monomer of the general formula: ##STR1## wherein p and q are integers between 1 and 4 inclusive, x and y are integers between 0 and 4 inclusive, m is 1 or 2, n is an integer between 3 and 10 inclusive, X' is either a methyl group or a single hydrogen atom, g is 0 or 1, and Q is a sulfonamido constituent group according to the formula: ##STR2## wherein R.sup.1 is a hydrogen or a lower alkyl group having from 1 to 6 carbon atoms and wherein the hydrophilic monomer is present in an amount constituting inclusively between five and twenty-five weight percent of the reactant mixture when the polar solvent employed is a polar organic solvent and wherein the hydrophilic monomer is present in an amount constituting inclusively between one and twenty-five weight percent of the reactant mixture when the polar solvent employed is water; andc. Perfluorinated ether acids according to the general formula: ##STR3## wherein z is between 1 and 10 inclusive, s is between 0 to 4, t is between 0 to 4, v between 0 to 5, w is 0 or 1, and Y is either F or CF.sub.3.
摘要翻译：本发明提供了一种可用于涂料应用的含氟聚合物分散体。分散体是均匀和非消耗臭氧的分散体，其包含润滑的含氟聚合物，惰性全氟化液体，极性溶剂和有效量的选自以下的a的表面活性剂：a。全氟脂族酰氨基链烷醇; b。由包含亲水单体和单体的混合物反应形成的由以下通式表示的聚合产物：其中p和q是包括1和4的整数，x和y是0和4之间的整数，其中m是1 或2，n为3〜10的整数，X'为甲基或单个氢原子，g为0或1，Q为根据下式的亚磺酰氨基成分基团：其中R1为氢或具有1至6个碳原子的低级烷基，并且当所用的极性溶剂是极性有机溶剂时，所述亲水性单体以占所述反应物混合物的5至25重量％的量包含在其中的量存在，并且其中当所使用的极性溶剂是水时，亲水性单体以包含在反应物混合物的一种和25重量％之间的量存在; 和c。全氟化醚酸，其通式如下：其中z在1和10之间，其中s在0至4之间，t在0至4之间，v在0至5之间，w为0或1，Y为 F或CF3。

4. 发明授权

US07101492B2 Fluorinated surfactants for aqueous acid etch solutions 有权
标题翻译：氟化表面活性剂用于酸性蚀刻溶液
公开(公告)号：US07101492B2
公开(公告)日：2006-09-05
申请号：US11081196
申请日：2005-03-16
申请人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
发明人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
IPC分类号： C09K13/00
CPC分类号： C09K13/08 , H01L21/31111
摘要： Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译：提供了包含氟化表面活性剂的新型含水酸蚀刻溶液。蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。

5. 发明授权

US07169323B2 Fluorinated surfactants for buffered acid etch solutions 有权
标题翻译：用于缓冲酸蚀溶液的氟化表面活性剂
公开(公告)号：US07169323B2
公开(公告)日：2007-01-30
申请号：US10290765
申请日：2002-11-08
申请人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn
发明人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn
IPC分类号： C09K13/00 , C09K13/04 , C09K13/06 , H01L21/302
CPC分类号： H01L21/31111 , C09K13/08
摘要： The present invention is directed to certain fluorinated surfactants, and use thereof in acid etch solutions, such as in aqueous buffered acid etch solutions. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译：本发明涉及某些氟化表面活性剂及其在酸蚀刻溶液中的用途，例如在含水缓冲酸蚀刻溶液中。蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。

6. 发明授权

US4889656A Perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluorides and derivatives thereof 失效
标题翻译：全氟（脂环族亚甲氧基亚烷基）羰基氟化物及其衍生物
公开(公告)号：US4889656A
公开(公告)日：1989-12-26
申请号：US116259
申请日：1987-10-30
申请人： Richard M. Flynn , Patricia M. Savu
发明人： Richard M. Flynn , Patricia M. Savu
IPC分类号： C07C43/12 , B01F17/42 , C07C41/00 , C07C43/11 , C07C43/13 , C07C51/00 , C07C59/135 , C07C67/00 , C07C69/63 , C07C213/00 , C07C231/00 , C07C235/06 , C07C241/00 , C07C253/00 , C07C255/13 , C07C255/16 , C07C265/04 , C07C301/00 , C07C309/65 , C07D211/38 , C07D265/30 , C07F7/12
CPC分类号： C07D265/30 , C07C255/16 , C07C43/11 , C07C43/137 , C07C59/135 , C08G65/007 , C07C2101/14 , Y10S516/914 , Y10S516/916 , Y10S516/919
摘要： Perfluoro(cycloaliphatic methyleneoxyalkylene) compositions are provided. These compositions comprise perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds having (a) a perfluorocycloaliphatic moiety which can have up to two perfluoroalkyl substituents and a perfluoroalkylene substituent, and (b) a perfluoromethyleneoxyalkylene carbonyl fluoride radical, the methylene group of the radical being bonded to a ring carbon atom or the perfluoroalkylene substituent of the moiety and the alkylene group of the perfluoromethyleneoxyalkylene carbonyl fluoride being a perfluoro(methyl)methylene group, a perfluoroisopropyleneoxy(methyl)methylene group, or a poly(perfluoroisopropyleneoxy)perfluoro(methyl)methylene group having up to about 10 perfluoroisopropyleneoxy units. Also provided are functional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds and nonfunctional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds.

7. 发明授权

US06890452B2 Fluorinated surfactants for aqueous acid etch solutions 有权
标题翻译：氟化表面活性剂用于酸性蚀刻溶液
公开(公告)号：US06890452B2
公开(公告)日：2005-05-10
申请号：US10290763
申请日：2002-11-08
申请人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
发明人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
IPC分类号： C09K13/08 , H01L21/311 , C09K13/00
CPC分类号： C09K13/08 , H01L21/31111
摘要： Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译：提供了包含氟化表面活性剂的新型含水酸蚀刻溶液。蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。

8. 发明授权

US5354901A Perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluorides and derivatives thereof 失效
标题翻译：全氟（脂环族亚甲氧基亚烷基）羰基氟化物及其衍生物
公开(公告)号：US5354901A
公开(公告)日：1994-10-11
申请号：US12249
申请日：1993-02-01
申请人： Richard M. Flynn , Patricia M. Savu
发明人： Richard M. Flynn , Patricia M. Savu
IPC分类号： C07C43/12 , B01F17/42 , C07C41/00 , C07C43/11 , C07C43/13 , C07C51/00 , C07C59/135 , C07C67/00 , C07C69/63 , C07C213/00 , C07C231/00 , C07C235/06 , C07C241/00 , C07C253/00 , C07C255/13 , C07C255/16 , C07C265/04 , C07C301/00 , C07C309/65 , C07D211/38 , C07D265/30 , C07F7/12 , C07C61/08
CPC分类号： C07D265/30 , C07C255/16 , C07C43/11 , C07C43/137 , C07C59/135 , C08G65/007 , C07C2101/14 , Y10S516/914 , Y10S516/916 , Y10S516/919
摘要： Perfluoro(cycloaliphatic methyleneoxyalkylene) compositions are provided. These compositions comprise perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds having (a) a perfluorocycloaliphatic moiety which can have up to two perfluoroalkyl substituents and a perfluoroalkylene substituent, and (b) a perfluoromethyleneoxyalkylene carbonyl fluoride radical, the methylene group of the radical being bonded to a ring carbon atom or the perfluoroalkylene substituent of the moiety and the alkylene group of the perfluoromethyleneoxyalkylene carbonyl fluoride being a perfluoro(methyl)methylene group, a perfluoroisopropyleneoxy(methyl)methylene group, or a poly(perfluoroisopropyleneoxy)perfluoro(methyl)methylene group having up to about 10 perfluoroisopropyleneoxy units. Also provided are functional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds and nonfunctional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds.
摘要翻译：提供全氟（脂环族亚甲氧基亚烷基）组合物。这些组合物包含全氟（脂环族亚甲氧基亚烷基）碳酰氟化合物，其具有（a）可具有至多两个全氟烷基取代基和全氟亚烷基取代基的全氟环脂族部分，和（b）全氟亚甲基氧亚烷基碳酰氟基团，该基团的亚甲基键合至全氟亚甲基氧亚烷基碳酰氟部分的全氟亚烷基取代基和全氟亚烷基氧亚烷基碳酰氟的亚烷基是全氟（甲基）亚甲基，全氟异丙烯氧基（甲基）亚甲基或聚（全氟异丙烯氧基）全氟（甲基）亚甲基，其具有最多约10个全氟异丙烯单元。还提供全氟（脂环族亚甲氧基亚烷基）碳酰氟化合物和全氟（脂环族亚甲氧基亚烷基）羰基氟化物的非官能衍生物的功能衍生物。

9. 发明授权

US5210282A Perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluorides and derivatives thereof 失效
标题翻译：全氟（脂环族亚甲氧基亚烷基）羰基氟化物及其衍生物
公开(公告)号：US5210282A
公开(公告)日：1993-05-11
申请号：US906504
申请日：1992-06-30
申请人： Richard M. Flynn , Patricia M. Savu
发明人： Richard M. Flynn , Patricia M. Savu
IPC分类号： C07C43/11 , C07C43/13 , C07C59/135 , C07C255/16 , C07D265/30
CPC分类号： C07D265/30 , C07C255/16 , C07C43/11 , C07C43/137 , C07C59/135 , C08G65/007 , C07C2101/14
摘要： Perfluoro(cycloaliphatic methyleneoxyalkylene) compositions are provided. These compositions comprise perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds having (a) a perfluorocycloaliphatic moiety which can have up to two perfluoroalkyl substituents and a perfluoroalkylene substituent, and (b) a perfluoromethyleneoxyalkylene carbonyl fluoride radical, the methylene group of the radical being bonded to a ring carbon atom or the perfluoroalkylene substituent of the moiety and the alkylene group of the perfluoromethyleneoxyalkylene carbonyl fluoride being a perfluoro(methyl)methylene group, a perfluoroisopropyleneoxy(methyl)methylene group, or a poly(perfluoroisopropyleneoxy)perfluoro(methyl)methylene group having up to about 10 perfluoroisopropyleneoxy units. Also provided are functional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds and nonfunctional derivatives of the perfluoro(cycloaliphatic methyleneoxyalkylene) carbonyl fluoride compounds.
摘要翻译：提供全氟（脂环族亚甲氧基亚烷基）组合物。这些组合物包含全氟（脂环族亚甲氧基亚烷基）碳酰氟化合物，其具有（a）可具有至多两个全氟烷基取代基和全氟亚烷基取代基的全氟环脂族部分，和（b）全氟亚甲基氧亚烷基碳酰氟基团，该基团的亚甲基键合至全氟亚甲基氧亚烷基碳酰氟部分的全氟亚烷基取代基和全氟亚烷基氧亚烷基碳酰氟的亚烷基是全氟（甲基）亚甲基，全氟异丙烯氧基（甲基）亚甲基或聚（全氟异丙烯氧基）全氟（甲基）亚甲基，其具有最多约10个全氟异丙烯单元。还提供全氟（脂环族亚甲氧基亚烷基）碳酰氟化合物和全氟（脂环族亚甲氧基亚烷基）羰基氟化物的非官能衍生物的功能衍生物。

10. 发明授权

US08092707B2 Compositions and methods for modifying a surface suited for semiconductor fabrication 有权
标题翻译：用于修改适合于半导体制造的表面的组合物和方法
公开(公告)号：US08092707B2
公开(公告)日：2012-01-10
申请号：US11839329
申请日：2007-08-15
申请人： L. Charles Hardy , Heather K. Kranz , Thomas E. Wood , David A. Kaisaki , John J. Gagliardi , John C. Clark , Patricia M. Savu , Philip G. Clark
发明人： L. Charles Hardy , Heather K. Kranz , Thomas E. Wood , David A. Kaisaki , John J. Gagliardi , John C. Clark , Patricia M. Savu , Philip G. Clark
IPC分类号： C09K13/00
CPC分类号： H01L21/31053 , B24B37/044 , B24B37/245 , C09G1/02 , H01L21/3212
摘要： The disclosure pertains to compositions and methods for modifying or refining the surface of a wafer suited for semiconductor fabrication. The compositions include working liquids useful in modifying a surface of a wafer suited for fabrication of a semiconductor device. In some embodiments, the working liquids are aqueous solutions of initial components substantially free of loose abrasive particles, the components including water, a surfactant, and a pH buffer exhibiting at least one pKa greater than 7. In certain embodiments, the pH buffer includes a basic pH adjusting agent and an acidic complexing agent, and the working liquid exhibits a pH from about 7 to about 12. In further embodiments, the disclosure provides a fixed abrasive article comprising a surfactant suitable for modifying the surface of a wafer, and a method of making the fixed abrasive article. Additional embodiments describe methods that may be used to modify a wafer surface.
摘要翻译：本公开涉及用于改性或精制适于半导体制造的晶片表面的组合物和方法。组合物包括可用于改性适于制造半导体器件的晶片表面的工作液体。在一些实施方案中，工作液体是基本上不含松散磨料颗粒的初始组分的水溶液，组分包括水，表面活性剂和显示出至少一个pKa大于7的pH缓冲液。在某些实施方案中，pH缓冲剂包括碱性pH调节剂和酸性络合剂，并且工作液体的pH为约7至约12.在另外的实施方案中，本公开提供了包含适于改性晶片表面的表面活性剂的固定磨料制品，以及方法制造固定的磨料制品。另外的实施例描述了可用于修改晶片表面的方法。

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