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    • 1. 发明授权
    • Magnetic recovery method of magnetically responsive high-aspect ratio photoresist microstructures
    • 磁响应高纵横比光致抗蚀剂微结构的磁回复方法
    • US09340417B2
    • 2016-05-17
    • US13535296
    • 2012-06-27
    • Mark BachmanEdward NelsonNicholas Gunn
    • Mark BachmanEdward NelsonNicholas Gunn
    • B82Y15/00C40B40/00C40B60/00
    • B82Y15/00C40B40/00C40B60/00
    • Systems and methods that facilitate magnetic collection and/or manipulation of individual micropallets are provided. The embodiments provided herein are directed to a new method for collecting micropallets once released from a substrate. It is accomplished by endowing the micropallets with magnetic properties by incorporating ferromagnetic or superparamagnetic nanoparticles into the photoresist material or otherwise incorporating magnetically responsive material into the micropallet structure. The magnetic particles, which posses magnetic qualities, e.g., ferromagnetism, ferrimagnetism, paramagnetism, and are composed of iron, nickel, and/or other magnetic materials, are mixed into the bulk photoresist prior to its use in the fabrication of microstructures. Also covered are other methods of incorporating magnetically-attractable material into the micropallet structure, such as plating of the micropallets with a material that is magnetically responsive, such as nickel. Additionally, the embodiments provided include a “collection probe” that is used to collect the released magnetic micropallets.
    • 提供了促进单个微型小块的磁收集和/或操纵的系统和方法。 这里提供的实施例涉及一旦从基板释放出来就收集微型小容器的新方法。 通过将铁磁性或超顺磁性纳米颗粒结合到光致抗蚀剂材料中或以其它方式将磁响应材料结合到微孔结构中,通过赋予具有磁性能的微型容器来实现。 在制造微结构之前,具有磁性质的磁性粒子,例如铁磁性,铁磁性,顺磁性,并且由铁,镍和/或其它磁性材料构成,被混合到体光致抗蚀剂中。 还包括将磁吸引材料并入微孔结构中的其它方法,例如用诸如镍的具有磁响应性的材料电镀微型小块。 此外,所提供的实施例包括用于收集释放的磁性微型小块的“收集探针”。
    • 2. 发明申请
    • MAGNETIC RECOVERY METHOD OF MAGNETICALLY RESPONSIVE HIGH-ASPECT RATIO PHOTORESIST MICROSTRUCTURES
    • 磁性响应高比例光电子显微镜的磁性恢复方法
    • US20130023438A1
    • 2013-01-24
    • US13535296
    • 2012-06-27
    • Mark BachmanEdward NelsonNicholas Gunn
    • Mark BachmanEdward NelsonNicholas Gunn
    • C40B40/00C40B30/04B82Y15/00
    • B82Y15/00C40B40/00C40B60/00
    • Systems and methods that facilitate magnetic collection and/or manipulation of individual micropallets are provided. The embodiments provided herein are directed to a new method for collecting micropallets once released from a substrate. It is accomplished by endowing the micropallets with magnetic properties by incorporating ferromagnetic or superparamagnetic nanoparticles into the photoresist material or otherwise incorporating magnetically responsive material into the micropallet structure. The magnetic particles, which posses magnetic qualities, e.g., ferromagnetism, ferrimagnetism, paramagnetism, and are composed of iron, nickel, and/or other magnetic materials, are mixed into the bulk photoresist prior to its use in the fabrication of microstructures. Also covered are other methods of incorporating magnetically-attractable material into the micropallet structure, such as plating of the micropallets with a material that is magnetically responsive, such as nickel. Additionally, the embodiments provided include a “collection probe” that is used to collect the released magnetic micropallets.
    • 提供了促进单个微型小块的磁收集和/或操纵的系统和方法。 这里提供的实施例涉及一旦从基板释放出来就收集微型小容器的新方法。 通过将铁磁性或超顺磁性纳米颗粒结合到光致抗蚀剂材料中或以其它方式将磁响应材料结合到微孔结构中,通过赋予具有磁性能的微型容器来实现。 在制造微结构之前,具有磁性质的磁性粒子,例如铁磁性,铁磁性,顺磁性,并且由铁,镍和/或其它磁性材料构成,被混合到体光致抗蚀剂中。 还包括将磁吸引材料并入微孔结构中的其它方法,例如用诸如镍的具有磁响应性的材料电镀微型小块。 此外,所提供的实施例包括用于收集释放的磁性微型小块的收集探针。