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1. 发明授权

US07346977B2 Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height 失效
标题翻译：用于制造具有大于自由层条纹高度的钉扎层宽度的磁阻读取头的方法
公开(公告)号：US07346977B2
公开(公告)日：2008-03-25
申请号：US11072559
申请日：2005-03-03
申请人： Marie-Claire Cyrille , Meng Ding , Elizabeth Ann Dobisz , Kuok San Ho , Scott Arthur MacDonald
发明人： Marie-Claire Cyrille , Meng Ding , Elizabeth Ann Dobisz , Kuok San Ho , Scott Arthur MacDonald
IPC分类号： G11B5/187
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3163 , G11B5/3169 , G11B5/3903 , G11B2005/3996 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.
摘要翻译：一种用于制造磁阻读取头的方法，使得被钉扎铁磁层比自由铁磁层的条带高度宽，使用离子铣削，离子束与支撑构成读取头的层叠层的衬底成一角度对准。叠层用光致抗蚀剂图案化以限定具有平行于读头磁道宽度排列的前后长边缘的矩形区域。在与前后长边缘正交的两个相反方向离子铣削后，钉扎层宽度具有延伸。在衬底和层叠层之后，延伸部使得钉扎层的宽度大于自由层的条带高度。延伸长度由基板和离子束之间的角度以及光致抗蚀剂的厚度决定。

2. 发明授权

US07765676B2 Method for patterning a magnetoresistive sensor 有权
标题翻译：图案化磁阻传感器的方法
公开(公告)号：US07765676B2
公开(公告)日：2010-08-03
申请号：US10993499
申请日：2004-11-18
申请人： Marie-Claire Cyrille , Elizabeth Ann Dobisz , Wipul Pemsiri Jayasekara , Jui-Lung Li
发明人： Marie-Claire Cyrille , Elizabeth Ann Dobisz , Wipul Pemsiri Jayasekara , Jui-Lung Li
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3903 , Y10T29/49032 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetoresistive sensor using an etch mask that is resistant to the material removal process used to define the sensor width and stripe height. The method may include the use of a Ta etch mask formed under a photoresist mask, and the use of an ion milling process to define the sensor. The etch mask remains substantially intact after performing the ion milling and therefore is readily removed by a later CMP process. The etch mask layer is also very resistant to high temperatures such as those used in a desired atomic layer deposition of alumina, which is used to deposit conformal layers of alumina around the sensor.
摘要翻译：一种用于构造使用耐蚀刻材料去除工艺的蚀刻掩模的磁阻传感器的方法，所述方法用于限定传感器宽度和条纹高度。该方法可以包括使用形成在光致抗蚀剂掩模下的Ta蚀刻掩模，以及使用离子铣削工艺来限定传感器。在执行离子研磨之后，蚀刻掩模基本上保持完整，因此通过稍后的CMP工艺容易地除去。蚀刻掩模层也非常耐高温，例如用于期望的氧化铝原子层沉积中使用的那些，其用于在传感器周围沉积保形层的氧化铝。

3. 发明申请

US20080141523A1 Planarization methods for patterned media disks 有权
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US20080141523A1
公开(公告)日：2008-06-19
申请号：US11641237
申请日：2006-12-18
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： B05D5/12 , G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

4. 发明授权

US08474128B2 Planarization methods for patterned media disks 失效
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US08474128B2
公开(公告)日：2013-07-02
申请号：US13082189
申请日：2011-04-07
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在基板的第一表面中制造突起，在第一表面上沉积磁性材料，使得凸起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的基板上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

5. 发明授权

US07941911B2 Planarization methods for patterned media disks 有权
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US07941911B2
公开(公告)日：2011-05-17
申请号：US11641237
申请日：2006-12-18
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

6. 发明申请

US20130126473A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL BINARY ENCODED NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效
标题翻译：使用块状共聚物制造具有径向二进制编码非标记标记的主磁盘用于纳米图形磁记录磁盘的方法
公开(公告)号：US20130126473A1
公开(公告)日：2013-05-23
申请号：US13299664
申请日：2011-11-18
申请人： Elizabeth Ann Dobisz , Jeffrey S. Lille , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Elizabeth Ann Dobisz , Jeffrey S. Lille , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： C23F1/02 , B05D3/00 , B05D5/00
CPC分类号： G11B5/746 , B82Y30/00 , G11B5/743 , G11B5/855 , G11B5/86
摘要： A method using directed self-assembly of BCPs enables the making of a master disk for nanoimprinting magnetic recording disks that have patterned data islands and patterned binary encoded nondata marks. The method uses guided self-assembly of a BCP to form patterns of sets of radial lines and circumferential gaps of one of the BCP components, which can be used as an etch mask to make the master disk. The sets of radial lines and circumferential gaps can be patterned so as to encode binary numbers. The pattern is replicated as binary encoded nondata marks into the nanoimprinted disks, with the marks functioning as binary numbers for data sector numbers and/or servo sector numbers. If the disks also use a chevron servo pattern, the binary numbers can function to identify groups of tracks associated with the chevron servo pattern.
摘要翻译：使用BCP的定向自组装的方法使得能够制造具有图案化数据岛和图案化二进制编码非标记的纳米压印磁记录盘的母盘。该方法使用BCP的引导自组装来形成一组BCP组件的径向线和圆周间隙的图案，其可用作蚀刻掩模以制造母盘。径向线和圆周间隙的组可以被图案化以便编码二进制数。该图案作为二进制编码的非标记标记复制到纳米压印盘中，其标记用作数据扇区号和/或伺服扇区号的二进制数。如果磁盘还使用人字形伺服模式，则二进制数字可用于识别与人字形伺服模式相关联的磁道组。

7. 发明申请

US20110258841A1 Planarization Methods For Patterned Media Disks 失效
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US20110258841A1
公开(公告)日：2011-10-27
申请号：US13082189
申请日：2011-04-07
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

8. 发明授权

US08501022B2 Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
标题翻译：使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法
公开(公告)号：US08501022B2
公开(公告)日：2013-08-06
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： B44C1/22
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

9. 发明申请

US20110235215A1 PATTERNED MAGNETIC RECORDING DISK WITH HIGH BIT-ASPECT-RATIO AND MASTER MOLD FOR NANOIMPRINTING THE DISK 有权
标题翻译：具有高比特率和主模具的图形磁记录盘，用于纳米片
公开(公告)号：US20110235215A1
公开(公告)日：2011-09-29
申请号：US13152254
申请日：2011-06-02
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz
IPC分类号： G11B5/54 , G11B5/82 , B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B5/82
摘要： A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used.
摘要翻译：用于制造在纳米压印过程中制造具有图案化数据岛的图案化介质盘的主模具的方法使用嵌段共聚物向其组分的引导自组装。使用常规或电子束光刻来首先在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或带。然后将嵌段共聚物材料沉积在图案上，导致嵌段共聚物向其组分的引导自组装，以将大致径向的条纹乘以大致的径向线。然后使用各种方法，包括常规光刻，第二嵌段共聚物的引导自组装和电子束光刻，以在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有任何柱或孔的图案，这取决于所使用的方法。

10. 发明授权

US08822047B2 Patterned magnetic recording disk with high bit-aspect-ratio and master mold for nanoimprinting the disk 有权
标题翻译：具有高比特宽比的图案磁记录磁盘和用于纳米压印磁盘的主模具
公开(公告)号：US08822047B2
公开(公告)日：2014-09-02
申请号：US13152254
申请日：2011-06-02
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz
IPC分类号： G11B5/64 , G11B5/82 , G11B5/855 , G11B5/74 , B82Y40/00 , G03F7/00 , B82Y10/00
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B5/82
摘要： A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used.
摘要翻译：用于制造在纳米压印过程中制造具有图案化数据岛的图案化介质盘的主模具的方法使用嵌段共聚物向其组分的引导自组装。使用常规或电子束光刻来首先在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或带。然后将嵌段共聚物材料沉积在图案上，导致嵌段共聚物向其组分的引导自组装，以将大致径向的条纹乘以大致的径向线。然后使用各种方法，包括常规光刻，第二嵌段共聚物的引导自组装和电子束光刻，以在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有任何柱或孔的图案，这取决于所使用的方法。

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