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1. 发明授权

US06653913B2 Tunable piezoelectric filter arrangement using a dielectric material with a voltage-dependent dielectric constant 有权
标题翻译：使用具有电压依赖介电常数的电介质材料的可调压电滤波器装置
公开(公告)号：US06653913B2
公开(公告)日：2003-11-25
申请号：US09826699
申请日：2001-04-05
申请人： Mareike Katharine Klee , Robert Frederick Milsom , Hans Peter Löbl , Rainer Kiewitt , Uwe Mackens , Martinus Hermanus Wilhemus Maria Van Delden , Wilhelm Georg Hermann , Olaf Wunnicke
发明人： Mareike Katharine Klee , Robert Frederick Milsom , Hans Peter Löbl , Rainer Kiewitt , Uwe Mackens , Martinus Hermanus Wilhemus Maria Van Delden , Wilhelm Georg Hermann , Olaf Wunnicke
IPC分类号： H03H956
CPC分类号： H03H9/562 , H03H3/04 , H03H9/02094 , H03H9/02149 , H03H9/0542 , H03H9/566
摘要： The invention describes a tunable filter arrangement with at least two resonators which are coupled to one another and of which at least one is connected to a capacitor with tunable capacitance. The electrical properties of the resonator, and thus the overall filter characteristic, can be changed through a change in the capacitance of the capacitor. Furthermore, a transmitter, a receiver, a mobile telephone device, and a wireless data transmission system comprising such a filter arrangement are disclosed, as is a tunable bulk acoustic wave resonator.
摘要翻译：本发明描述了具有至少两个谐振器的可调滤波器装置，它们彼此耦合，并且至少一个谐振器至少一个连接到具有可调谐电容的电容器。可以通过电容器的电容的变化来改变谐振器的电特性，并因此改变整体滤波器特性。此外，公开了包括这种滤波器装置的发射机，接收机，移动电话设备和无线数据传输系统，以及可调谐体声波谐振器。

2. 发明授权

US06583688B2 Tunable filter arrangement comprising resonators with reflection layers 有权
标题翻译：可调谐滤波器装置包括具有反射层的谐振器
公开(公告)号：US06583688B2
公开(公告)日：2003-06-24
申请号：US09826684
申请日：2001-04-05
申请人： Mareike Katharine Klee , Robert Frederick Milsom , Hans Peter Löbl , Rainer Kiewitt , Uwe Mackens , Martinus Hermanus Wilhemus Maria Van Delden , Wilhelm Georg Hermann , Olaf Wunnicke
发明人： Mareike Katharine Klee , Robert Frederick Milsom , Hans Peter Löbl , Rainer Kiewitt , Uwe Mackens , Martinus Hermanus Wilhemus Maria Van Delden , Wilhelm Georg Hermann , Olaf Wunnicke
IPC分类号： H03H956
CPC分类号： H03H9/566 , H03H3/04 , H03H9/02094 , H03H9/02149 , H03H9/562
摘要： The invention describes a tunable filter arrangement with a plurality of resonators which are coupled to one another and of which there is at least one which comprises a piezoelectric component made of a ferroelectric material and to which a DC voltage source is connected. The application of a DC voltage to the resonator renders it possible to change its electrical properties and thus the overall filter characteristic. Furthermore, a transmitter, a receiver device, and a mobile telephone device with such a filter arrangement are disclosed, aswell as a tunable bulk acoustic wave resonator.
摘要翻译：本发明描述了一种具有多个谐振器的可调谐滤波器装置，它们彼此耦合，并且其中至少有一个包括由铁电材料制成的压电元件，并且连接有直流电压源。将DC电压施加到谐振器使得可以改变其电特性，从而改变其整体滤波器特性。此外，公开了一种具有这种滤波器装置的发射机，接收机设备和移动电话设备，以及可调谐体声波谐振器。

3. 发明授权

US09383282B2 MEMS capacitive pressure sensor, operating method and manufacturing method 有权
标题翻译： MEMS电容式压力传感器，操作方法及制造方法
公开(公告)号：US09383282B2
公开(公告)日：2016-07-05
申请号：US13462582
申请日：2012-05-02
申请人： Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
发明人： Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
IPC分类号： G01L9/00 , G01L9/12 , G01L19/00 , G01L27/00
CPC分类号： G01L9/0005 , G01L9/0042 , G01L9/0073 , G01L9/125 , G01L19/0076 , G01L27/002
摘要： A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
摘要翻译：一种MEMS压力传感器，其中所述电极装置中的至少一个包括内部电极和围绕所述内部电极布置的外部电极。与内部电极和外部电极相关联的电容被独立地测量并且可以进行差分测量。这种布置使得能够实现各种不同的读出方案，并且还能够改进对器件之间的变化的补偿或随时间的器件特性的变化。

4. 发明授权

US08847466B2 Piezoelectric bimorph switch 有权
标题翻译：压电双压电晶片开关
公开(公告)号：US08847466B2
公开(公告)日：2014-09-30
申请号：US13000256
申请日：2009-06-18
申请人： Olaf Wunnicke , Klaus Reimann
发明人： Olaf Wunnicke , Klaus Reimann
IPC分类号： H01H57/00 , H01L41/09
CPC分类号： H01H57/00 , H01L41/094
摘要： The present invention relates to a piezoelectric bimorph switch, specifically a cantilever (single clamped beam) switch, which can be actively opened and closed. Piezoelectric bimorph switch are known from the prior art. Such a switch may be regarded as an actuator. Actuators are regarded as a subdivision of transducers. They are devices, which transform an input signal (mainly an electrical signal) into motion. Electrical motors, pneumatic actuators, hydraulic pistons, relays, comb drive, piezoelectric actuators, thermal bimorphs, Digital Micromirror Devices and electroactive polymers are some examples of such actuators. The switch of the invention comprises piezoelectric stack layers (121, 122), which form a symmetrical stack, wherein an electric field is always applied in the same direction as the poling direction of the piezoelectric layers.
摘要翻译：本发明涉及一种压电双压电晶体开关，特别涉及一种可以被主动地打开和关闭的悬臂（单夹紧梁）开关。压电双压电晶体开关是从现有技术中已知的。这样的开关可以被认为是致动器。致动器被视为传感器的细分。它们是将输入信号（主要是电信号）变换为运动的装置。电动机，气动执行器，液压活塞，继电器，梳齿驱动器，压电致动器，热双压电晶片，数字微镜器件和电活性聚合物是这种致动器的一些例子。本发明的开关包括形成对称叠层的压电堆叠层（121,122），其中总是沿与压电层的极化方向相同的方向施加电场。

5. 发明申请

US20140053651A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：US20140053651A1
公开(公告)日：2014-02-27
申请号：US13592570
申请日：2012-08-23
申请人： Willem Frederik Adrianus Besling , Peter Gerard STEENEKEN , Olaf Wunnicke
发明人： Willem Frederik Adrianus Besling , Peter Gerard STEENEKEN , Olaf Wunnicke
IPC分类号： G01L11/04
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译：可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。膜在其中具有多个开口，其将气体进入和离开室。当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。

6. 发明申请

US20100261339A1 SINGLE CRYSTAL GROWTH ON A MIS-MATCHED SUBSTRATE 有权
标题翻译：不匹配的基体上的单晶生长
公开(公告)号：US20100261339A1
公开(公告)日：2010-10-14
申请号：US12668050
申请日：2008-07-07
申请人： Olaf Wunnicke , Lars Magnus Borgstrom , Vijayaraghavan Madakasira
发明人： Olaf Wunnicke , Lars Magnus Borgstrom , Vijayaraghavan Madakasira
IPC分类号： H01L21/20
CPC分类号： C30B29/60 , C30B11/12 , H01L21/02381 , H01L21/02538 , H01L21/02551 , H01L21/02565 , H01L21/02603 , H01L21/02639 , H01L21/02645 , H01L21/02647 , H01L21/02653
摘要： A process for forming a single crystal layer of one material type such as III-V semiconductor) onto a substrate of a different material type such as silicon. A substrate of a first material type is provided. At least one discrete region of catalyst material is deposited onto the substrate, the discrete region defining a seed area of the substrate. A second material type such as III-V semiconductor is grown as a single crystal nanowire onto the substrate between the substrate and catalyst material, the nanowire of second material type extending upward from the substrate with lateral dimensions not substantially exceeding the seed area. After growth of the nanowire, growth conditions are changed so as to epitaxially grow the second material type laterally from the single crystal nanowire in a direction parallel to the substrate surface.
摘要翻译：用于形成诸如III-V半导体的一种材料类型的单晶层的方法）到不同材料类型如硅的衬底上。提供第一材料类型的衬底。催化剂材料的至少一个离散区域沉积在衬底上，离散区域限定衬底的种子区域。将诸如III-V半导体的第二材料类型作为单晶纳米线生长到衬底和催化剂材料之间的衬底上，第二材料类型的纳米线从衬底向上延伸，侧面尺寸基本上不超过晶种面积。在纳米线生长之后，生长条件发生变化，从而在平行于衬底表面的方向上从单晶纳米线横向生长第二材料类型。

7. 发明授权

US08513745B2 MEMS switch and fabrication method 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US08513745B2
公开(公告)日：2013-08-20
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/84
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

8. 发明申请

US20120286588A1 MEMS SWITCHING CIRCUIT 审中-公开
标题翻译： MEMS开关电路
公开(公告)号：US20120286588A1
公开(公告)日：2012-11-15
申请号：US13105675
申请日：2011-05-11
申请人： Peter Steeneken , Olaf Wunnicke , Klaus Reimann , James Raymond Spehar , Michael Joehren , Gerrit Willem den Besten
发明人： Peter Steeneken , Olaf Wunnicke , Klaus Reimann , James Raymond Spehar , Michael Joehren , Gerrit Willem den Besten
IPC分类号： H01H9/00
CPC分类号： H01H59/0009 , Y10T307/76
摘要： A switching circuit employs MEMS devices. In connection with various example embodiments, signal switching circuit couples primary and secondary data link connectors having at least two channels and an electrode for each channel. A MEMS switch is coupled to each channel in of the secondary data link connectors, and includes a suspended membrane, first and second contact electrodes (one being in the membrane) and a biasing circuit that biases the membrane for moving the membrane between open and closed positions to contact the electrodes. A switch controller circuit selectively controls the application of an actuation voltage to each of the biasing circuits, thereby selectively actuating the membranes between the open and closed positions for routing signals between the primary and secondary data link connectors.
摘要翻译：开关电路采用MEMS器件。结合各种示例实施例，信号切换电路耦合具有至少两个通道的主数据链路连接器和辅助数据链路连接器以及用于每个通道的电极。 MEMS开关耦合到次级数据链路连接器中的每个通道，并且包括悬浮的膜，第一和第二接触电极（一个位于膜中）和偏置电路，偏置电路偏压膜以使膜在打开和关闭之间移动与电极接触的位置。开关控制器电路选择性地控制对每个偏置电路的致动电压的施加，从而在打开和关闭位置之间选择性地启动膜以在主数据链路连接器和辅助数据链路连接器之间路由信号。

9. 发明申请

US20120167659A1 PRESSURE SENSOR WITH PRESSURE-ACTUATED SWITCH 有权
标题翻译：带压力开关的压力传感器
公开(公告)号：US20120167659A1
公开(公告)日：2012-07-05
申请号：US12985052
申请日：2011-01-05
申请人： Willem Frederik Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
发明人： Willem Frederik Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
IPC分类号： G01L27/00 , B05D3/10 , G01L9/12
CPC分类号： G01L9/0047 , G01L9/0072 , H01H35/346
摘要： Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path through a cavity formed using a sacrificial layer and PVD plugs. At one or more defined touch-point pressure thresholds, the membrane of the pressure sensor may deflect so that the state of contact between an electrical contact and one or more sections of a signal path may change. In some embodiments, the change of state may cause the pressure sensor to trigger an alarm in the electrical circuit. Various embodiments also enable the operation of the electrical circuit for testing and calibration through the use of one or more actuation electrode layers.
摘要翻译：各种实施例涉及压力传感器和相关的制造和使用方法。压力传感器可以包括包括在柔性膜中的电触点，其响应于测量的环境压力而偏转。电接触可以通过通过使用牺牲层和PVD插塞形成的腔的信号路径分离。在一个或多个限定的接触点压力阈值处，压力传感器的膜可以偏转，使得电触点与信号路径的一个或多个部分之间的接触状态可能改变。在一些实施例中，状态的改变可能导致压力传感器触发电路中的警报。各种实施例还使得电路的操作能够通过使用一个或多个致动电极层进行测试和校准。

10. 发明授权

US08193685B2 Thin film detector for presence detection 有权
标题翻译：用于存在检测的薄膜检测器
公开(公告)号：US08193685B2
公开(公告)日：2012-06-05
申请号：US12666831
申请日：2008-06-30
申请人： Mareike Klee , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem Franke Pasveer , Engel Johannes Knibbe , Remco Alphonsus Hendrikus Breen , Klaus Reimann , Biju Kumar Sreedharan Nair , Roger Peter Anna Delnoij , Henri Marie Joseph Boots , Christina Adriana Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen
发明人： Mareike Klee , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem Franke Pasveer , Engel Johannes Knibbe , Remco Alphonsus Hendrikus Breen , Klaus Reimann , Biju Kumar Sreedharan Nair , Roger Peter Anna Delnoij , Henri Marie Joseph Boots , Christina Adriana Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen
IPC分类号： H01L41/08
CPC分类号： B06B1/0603 , B06B1/0292 , G08B13/1645 , H01L27/20 , H01L41/0973 , H01L41/314 , Y10T29/42
摘要： A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要翻译：提供换能器（800），其中膜（830）形成在前基板（615）上方; 并且在有源部分（821）和靠近有效部分（821）的周边部分之间在膜（830）上形成压电层（820）。包括第一和第二电极（840,845）的图案化导电层形成在压电层（820）上方。此外，背面基板结构设置有位于与活动部分（821）相邻的周边部分处的支撑件（822,824）。支撑件（822,824）的高度（826）大于图案化压电层和图案化导电层的组合高度（828）。可以连接许多换能器以形成阵列，其中可以提供用于控制阵列的控制器，例如转向阵列的波束，以及处理由阵列接收的信号，用于存在或运动检测和/或成像，例如。

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