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1. 发明授权

US08193685B2 Thin film detector for presence detection 有权
标题翻译：用于存在检测的薄膜检测器
公开(公告)号：US08193685B2
公开(公告)日：2012-06-05
申请号：US12666831
申请日：2008-06-30
申请人： Mareike Klee , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem Franke Pasveer , Engel Johannes Knibbe , Remco Alphonsus Hendrikus Breen , Klaus Reimann , Biju Kumar Sreedharan Nair , Roger Peter Anna Delnoij , Henri Marie Joseph Boots , Christina Adriana Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen
发明人： Mareike Klee , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem Franke Pasveer , Engel Johannes Knibbe , Remco Alphonsus Hendrikus Breen , Klaus Reimann , Biju Kumar Sreedharan Nair , Roger Peter Anna Delnoij , Henri Marie Joseph Boots , Christina Adriana Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen
IPC分类号： H01L41/08
CPC分类号： B06B1/0603 , B06B1/0292 , G08B13/1645 , H01L27/20 , H01L41/0973 , H01L41/314 , Y10T29/42
摘要： A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要翻译：提供换能器（800），其中膜（830）形成在前基板（615）上方; 并且在有源部分（821）和靠近有效部分（821）的周边部分之间在膜（830）上形成压电层（820）。包括第一和第二电极（840,845）的图案化导电层形成在压电层（820）上方。此外，背面基板结构设置有位于与活动部分（821）相邻的周边部分处的支撑件（822,824）。支撑件（822,824）的高度（826）大于图案化压电层和图案化导电层的组合高度（828）。可以连接许多换能器以形成阵列，其中可以提供用于控制阵列的控制器，例如转向阵列的波束，以及处理由阵列接收的信号，用于存在或运动检测和/或成像，例如。

2. 发明申请

US20100277040A1 THIN FILM DETECTOR FOR PRESENCE DETECTION 有权
标题翻译：薄膜检测器用于存在检测
公开(公告)号：US20100277040A1
公开(公告)日：2010-11-04
申请号：US12666831
申请日：2008-06-30
申请人： Mareike Klee , Klaus Reimann , Biju K. Sreedharan Nair , Roger Peter Anna Delnoij , Henri M. J. Boots , Christina A. Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem F. Pasveer , Engel Johannes Knibbe , Remco A.H. Breen
发明人： Mareike Klee , Klaus Reimann , Biju K. Sreedharan Nair , Roger Peter Anna Delnoij , Henri M. J. Boots , Christina A. Renders , Olaf Wunnicke , Derk Reefman , Peter Dirksen , Ronald Dekker , Harry Van Esch , Marco De Wild , Ruediger Mauczok , Chris Van Heesch , Willem F. Pasveer , Engel Johannes Knibbe , Remco A.H. Breen
IPC分类号： H01L41/04 , H04R17/00 , H01L41/053
CPC分类号： B06B1/0603 , B06B1/0292 , G08B13/1645 , H01L27/20 , H01L41/0973 , H01L41/314 , Y10T29/42
摘要： A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要翻译：提供换能器（800），其中膜（830）形成在前基板（615）上方; 并且在有源部分（821）和靠近有效部分（821）的周边部分之间在膜（830）上形成压电层（820）。包括第一和第二电极（840,845）的图案化导电层形成在压电层（820）上方。此外，背面基板结构设置有位于与活动部分（821）相邻的周边部分处的支撑件（822,824）。支撑件（822,824）的高度（826）大于图案化压电层和图案化导电层的组合高度（828）。可以连接许多换能器以形成阵列，其中可以提供用于控制阵列的控制器，例如控制阵列的波束，以及处理由阵列接收的信号，用于存在或运动检测和/或成像，例如。

3. 发明授权

US09440258B2 Thin film ultrasound transducer 有权
标题翻译：薄膜超声波换能器
公开(公告)号：US09440258B2
公开(公告)日：2016-09-13
申请号：US13812640
申请日：2011-07-12
申请人： Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
发明人： Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
IPC分类号： B06B1/06
CPC分类号： H03H3/02 , B06B1/06 , B06B1/0622 , B06B1/0688 , H03H9/172
摘要： The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17), —a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion, —first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18), —support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
摘要翻译：本发明涉及一种换能器（11），其包括 - 被配置为响应于力而改变形状的膜（31），所述膜（31）具有第一主表面（16）和第二主表面（17）， - 形成在膜（31）的第一主表面（16）上方的压电层（18），压电层（18）具有有源部分，与压电层（18）接触的第一和第二电极（19），其中所述第一和第二电极（19）之间的电场确定所述压电层（18）的机械运动， - 在所述膜（15）的相邻侧上的所述膜（15）的第二主表面（17）处支撑结构（40）压电层（18）的有效部分，至少部分支撑结构（40）形成与膜（31）的第二主表面（17）垂直或至少不平行的壁，以便形成在活动部分下方的任何形状的沟槽（41），使得超声波换能器 s在支撑侧的高输出压力获得，而不是在相对侧。本发明还涉及一种形成这种换能器的方法，以及包括至少一个这样的换能器的阵列。

4. 发明申请

US20130208572A1 THIN FILM ULTRASOUND TRANSDUCER 有权
标题翻译：薄膜超声波传感器
公开(公告)号：US20130208572A1
公开(公告)日：2013-08-15
申请号：US13812640
申请日：2011-07-12
申请人： Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
发明人： Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
IPC分类号： B06B1/06
CPC分类号： H03H3/02 , B06B1/06 , B06B1/0622 , B06B1/0688 , H03H9/172
摘要： The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17),—a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion,—first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18),—support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
摘要翻译：本发明涉及一种换能器（11），其包括 - 被配置为响应于力而改变形状的膜（31），所述膜（31）具有第一主表面（16）和第二主表面（17）， - 形成在膜（31）的第一主表面（16）上方的压电层（18），压电层（18）具有有源部分，与压电层（18）接触的第一和第二电极（19），其中所述第一和第二电极（19）之间的电场确定所述压电层（18）的机械运动， - 在膜（15）的相邻侧上的第二主表面（17）处的支撑结构（40）压电层（18）的有效部分，至少部分支撑结构（40）形成与膜（31）的第二主表面（17）垂直或至少不平行的壁，以便形成在活动部分下方具有任何形状的沟槽（41），从而获得超声换能器在支撑侧具有高于相对侧的高输出压力。本发明还涉及一种形成这种换能器的方法，以及包括至少一个这样的换能器的阵列。

5. 发明申请

US20120286588A1 MEMS SWITCHING CIRCUIT 审中-公开
标题翻译： MEMS开关电路
公开(公告)号：US20120286588A1
公开(公告)日：2012-11-15
申请号：US13105675
申请日：2011-05-11
申请人： Peter Steeneken , Olaf Wunnicke , Klaus Reimann , James Raymond Spehar , Michael Joehren , Gerrit Willem den Besten
发明人： Peter Steeneken , Olaf Wunnicke , Klaus Reimann , James Raymond Spehar , Michael Joehren , Gerrit Willem den Besten
IPC分类号： H01H9/00
CPC分类号： H01H59/0009 , Y10T307/76
摘要： A switching circuit employs MEMS devices. In connection with various example embodiments, signal switching circuit couples primary and secondary data link connectors having at least two channels and an electrode for each channel. A MEMS switch is coupled to each channel in of the secondary data link connectors, and includes a suspended membrane, first and second contact electrodes (one being in the membrane) and a biasing circuit that biases the membrane for moving the membrane between open and closed positions to contact the electrodes. A switch controller circuit selectively controls the application of an actuation voltage to each of the biasing circuits, thereby selectively actuating the membranes between the open and closed positions for routing signals between the primary and secondary data link connectors.
摘要翻译：开关电路采用MEMS器件。结合各种示例实施例，信号切换电路耦合具有至少两个通道的主数据链路连接器和辅助数据链路连接器以及用于每个通道的电极。 MEMS开关耦合到次级数据链路连接器中的每个通道，并且包括悬浮的膜，第一和第二接触电极（一个位于膜中）和偏置电路，偏置电路偏压膜以使膜在打开和关闭之间移动与电极接触的位置。开关控制器电路选择性地控制对每个偏置电路的致动电压的施加，从而在打开和关闭位置之间选择性地启动膜以在主数据链路连接器和辅助数据链路连接器之间路由信号。

6. 发明授权

US09383282B2 MEMS capacitive pressure sensor, operating method and manufacturing method 有权
标题翻译： MEMS电容式压力传感器，操作方法及制造方法
公开(公告)号：US09383282B2
公开(公告)日：2016-07-05
申请号：US13462582
申请日：2012-05-02
申请人： Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
发明人： Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
IPC分类号： G01L9/00 , G01L9/12 , G01L19/00 , G01L27/00
CPC分类号： G01L9/0005 , G01L9/0042 , G01L9/0073 , G01L9/125 , G01L19/0076 , G01L27/002
摘要： A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
摘要翻译：一种MEMS压力传感器，其中所述电极装置中的至少一个包括内部电极和围绕所述内部电极布置的外部电极。与内部电极和外部电极相关联的电容被独立地测量并且可以进行差分测量。这种布置使得能够实现各种不同的读出方案，并且还能够改进对器件之间的变化的补偿或随时间的器件特性的变化。

7. 发明授权

US08847466B2 Piezoelectric bimorph switch 有权
标题翻译：压电双压电晶片开关
公开(公告)号：US08847466B2
公开(公告)日：2014-09-30
申请号：US13000256
申请日：2009-06-18
申请人： Olaf Wunnicke , Klaus Reimann
发明人： Olaf Wunnicke , Klaus Reimann
IPC分类号： H01H57/00 , H01L41/09
CPC分类号： H01H57/00 , H01L41/094
摘要： The present invention relates to a piezoelectric bimorph switch, specifically a cantilever (single clamped beam) switch, which can be actively opened and closed. Piezoelectric bimorph switch are known from the prior art. Such a switch may be regarded as an actuator. Actuators are regarded as a subdivision of transducers. They are devices, which transform an input signal (mainly an electrical signal) into motion. Electrical motors, pneumatic actuators, hydraulic pistons, relays, comb drive, piezoelectric actuators, thermal bimorphs, Digital Micromirror Devices and electroactive polymers are some examples of such actuators. The switch of the invention comprises piezoelectric stack layers (121, 122), which form a symmetrical stack, wherein an electric field is always applied in the same direction as the poling direction of the piezoelectric layers.
摘要翻译：本发明涉及一种压电双压电晶体开关，特别涉及一种可以被主动地打开和关闭的悬臂（单夹紧梁）开关。压电双压电晶体开关是从现有技术中已知的。这样的开关可以被认为是致动器。致动器被视为传感器的细分。它们是将输入信号（主要是电信号）变换为运动的装置。电动机，气动执行器，液压活塞，继电器，梳齿驱动器，压电致动器，热双压电晶片，数字微镜器件和电活性聚合物是这种致动器的一些例子。本发明的开关包括形成对称叠层的压电堆叠层（121,122），其中总是沿与压电层的极化方向相同的方向施加电场。

8. 发明申请

US20110120843A1 PIEZOELECTRIC BIMORPH SWITCH 有权
标题翻译：压电二极管开关
公开(公告)号：US20110120843A1
公开(公告)日：2011-05-26
申请号：US13000256
申请日：2009-06-18
申请人： Olaf Wunnicke , Klaus Reimann
发明人： Olaf Wunnicke , Klaus Reimann
IPC分类号： H01H57/00
CPC分类号： H01H57/00 , H01L41/094
摘要： The present invention relates to a piezoelectric bimorph switch, specifically a cantilever (single clamped beam) switch, which can be actively opened and closed. Piezoelectric bimorph switch are known from the prior art. Such a switch may be regarded as an actuator. Actuators are regarded as a subdivision of transducers. They are devices, which transform an input signal (mainly an electrical signal) into motion. Electrical motors, pneumatic actuators, hydraulic pistons, relays, comb drive, piezoelectric actuators, thermal bimorphs, Digital Micromirror Devices and electroactive polymers are some examples of such actuators. The switch of the invention comprises piezoelectric stack layers (121, 122), which form a symmetrical stack, wherein an electric field is always applied in the same direction as the poling direction of the piezoelectric layers.
摘要翻译：本发明涉及一种压电双压电晶体开关，特别涉及一种可以被主动地打开和关闭的悬臂（单夹紧梁）开关。压电双压电晶体开关是从现有技术中已知的。这样的开关可以被认为是致动器。致动器被视为传感器的细分。它们是将输入信号（主要是电信号）变换为运动的装置。电动机，气动执行器，液压活塞，继电器，梳齿驱动器，压电致动器，热双压电晶片，数字微镜器件和电活性聚合物是这种致动器的一些例子。本发明的开关包括形成对称叠层的压电堆叠层（121,122），其中总是沿与压电层的极化方向相同的方向施加电场。

9. 发明申请

US20120286846A1 SWITCHING CIRCUIT 审中-公开
标题翻译：切换电路
公开(公告)号：US20120286846A1
公开(公告)日：2012-11-15
申请号：US13105591
申请日：2011-05-11
申请人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
发明人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
IPC分类号： H03K17/00
CPC分类号： H01H59/0009
摘要： A switching circuit employs switches operating at low on resistance and high off capacitance. In connection with various example embodiments, a switching circuit selectively couples a communication port to one of two or more internal circuits based upon a type of input at the communication port. A sensor circuit senses the type of the input and, based upon the sensed input type, actuates one or more switches in the switching circuit.
摘要翻译：开关电路采用工作在低导通电阻和高关断电容的开关。结合各种示例实施例，切换电路基于通信端口处的输入类型，将通信端口选择性地耦合到两个或多个内部电路中的一个。传感器电路感测输入的类型，并且基于所感测的输入类型来驱动开关电路中的一个或多个开关。

10. 发明申请

US20140053651A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：US20140053651A1
公开(公告)日：2014-02-27
申请号：US13592570
申请日：2012-08-23
申请人： Willem Frederik Adrianus Besling , Peter Gerard STEENEKEN , Olaf Wunnicke
发明人： Willem Frederik Adrianus Besling , Peter Gerard STEENEKEN , Olaf Wunnicke
IPC分类号： G01L11/04
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译：可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。膜在其中具有多个开口，其将气体进入和离开室。当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。

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