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1. 发明授权

US5854095A Dual source gas methods for forming integrated circuit capacitor electrodes 失效
标题翻译：用于形成集成电路电容器电极的双源气体方法
公开(公告)号：US5854095A
公开(公告)日：1998-12-29
申请号：US778049
申请日：1997-01-02
申请人： Man-sug Kang , Hyun-bo Shin , Seung-joon Ahn , Byung-chul Ahn
发明人： Man-sug Kang , Hyun-bo Shin , Seung-joon Ahn , Byung-chul Ahn
IPC分类号： H01L21/02 , H01L21/285 , H01L21/768 , H01L21/8242
CPC分类号： H01L27/10852 , H01L21/28556 , H01L21/76877 , H01L28/84
摘要： A silicon layer is formed on an integrated circuit substrate using silane and disilane thereby increasing a step coverage for the silicon layer, increasing a deposition rate for the silicon layer, reducing variability of the deposition rate, and reducing local crystallization of the silicon layer. More particularly, the step of forming the silicon layer can include forming a first silicon sublayer on the substrate using a first source gas including silane, and forming a second silicon sublayer on the first silicon sublayer using a second source gas different from the first source gas wherein the second source gas includes disilane. Alternately, the step of forming the silicon layer can include forming the silicon layer on the integrated circuit substrate using a source gas including a mixture of silane and disilane.
摘要翻译：使用硅烷和乙硅烷在集成电路基板上形成硅层，从而提高硅层的阶梯覆盖率，增加硅层的沉积速率，降低沉积速率的变化性，并减少硅层的局部结晶化。更具体地说，形成硅层的步骤可以包括使用包括硅烷的第一源气体在基板上形成第一硅子层，并且使用不同于第一源气体的第二源气体在第一硅子层上形成第二硅子层其中所述第二源气体包括乙硅烷。或者，形成硅层的步骤可以包括使用包括硅烷和乙硅烷的混合物的源气体在集成电路基板上形成硅层。

2. 发明授权

US06600546B1 Array substrate for liquid crystal display device and the fabrication method of the same 有权
标题翻译：液晶显示装置用阵列基板及其制造方法
公开(公告)号：US06600546B1
公开(公告)日：2003-07-29
申请号：US09695294
申请日：2000-10-25
申请人： Byung-chul Ahn , Soon-sung Yoo , Yong-wan Kim , Keuk-sang Kwon
发明人： Byung-chul Ahn , Soon-sung Yoo , Yong-wan Kim , Keuk-sang Kwon
IPC分类号： G02F11345
CPC分类号： G02F1/1362 , G02F2001/136231
摘要： The present invention discloses an array substrate for an active-matrix LCD device and a method of fabricating the same. The array substrate reduces the number of masks used in the fabrication process so that reliability is enhanced and the cost is reduced over the conventional device and method.
摘要翻译：本发明公开了一种有源矩阵LCD器件用阵列基板及其制造方法。阵列基板减少了在制造过程中使用的掩模的数量，从而提高了可靠性并且降低了传统的器件和方法的成本。

3. 发明申请

US20070235737A1 Array substrate for liquid crystal display device and the fabrication method of the same 有权
标题翻译：液晶显示装置用阵列基板及其制造方法
公开(公告)号：US20070235737A1
公开(公告)日：2007-10-11
申请号：US11806979
申请日：2007-06-05
申请人： Byung-chul Ahn , Byoung-ho Lim , Soon-Sung Yoo , Yong-wan Kim
发明人： Byung-chul Ahn , Byoung-ho Lim , Soon-Sung Yoo , Yong-wan Kim
IPC分类号： H01L29/04
CPC分类号： H01L27/1288 , H01L27/124 , H01L27/1255
摘要： The present invention discloses a four-mask method of manufacturing an array substrate of a liquid crystal display device and the liquid crystal display device having the same array substrate. The method includes forming a plurality of gate lines, gate electrodes and gate extension lines by depositing a first metallic material on a substrate and patterning the first metallic material with a first mask, the gate extension lines extending toward the opposite direction of the gate electrodes; forming a first insulating layer on the whole surface having gate lines, gate electrodes, and gate extension lines; forming a plurality of data lines, source electrodes, drain electrodes, and capacitor electrodes over the gate lines by depositing a semiconductor layer, an ohmic contact layer and a second metallic material sequentially on the first insulating layer, and patterning the second metallic material and the ohmic contact layer with a second mask; forming a passivation layer and a plurality of first and second contact holes by depositing a second insulating layer on the data lines, the source electrodes, the drain electrodes and the capacitor electrodes, and patterning the second insulating layer with a third mask, the first contact holes exposing a portion of the drain electrode, the second contact holes exposing a portion of the capacitor electrodes; and forming a plurality of pixel electrodes by depositing a transparent conductive layer on the passivation layer, and patterning the transparent conductive layer by a fourth mask, the pixel electrodes contacting the drain electrodes through the first contact holes and contacting the capacitor electrodes through the second contact holes.
摘要翻译：本发明公开了一种制造液晶显示装置的阵列基板的四掩模方法和具有相同阵列基板的液晶显示装置。该方法包括通过在衬底上沉积第一金属材料并用第一掩模图案化第一金属材料来形成多条栅极线，栅电极和栅极延伸线，栅极延伸线朝向栅电极的相反方向延伸; 在具有栅极线，栅极电极和栅极延伸线的整个表面上形成第一绝缘层; 通过在第一绝缘层上依次沉积半导体层，欧姆接触层和第二金属材料，在栅极线上形成多个数据线，源电极，漏电极和电容器电极，并将第二金属材料和具有第二掩模的欧姆接触层; 通过在数据线，源电极，漏电极和电容器电极上沉积第二绝缘层，并用第三掩模对第二绝缘层进行构图来形成钝化层和多个第一和第二接触孔，第一接触露出一部分漏电极的第二接触孔暴露电容器电极的一部分; 以及通过在所述钝化层上沉积透明导电层并形成多个像素电极，以及通过第四掩模对所述透明导电层进行图案化，所述像素电极通过所述第一接触孔与所述漏电极接触并通过所述第二接触接触所述电容器电极孔。

4. 发明授权

US07381988B2 Array substrate for liquid crystal display device and the fabrication method of the same 有权
标题翻译：液晶显示装置用阵列基板及其制造方法
公开(公告)号：US07381988B2
公开(公告)日：2008-06-03
申请号：US11806979
申请日：2007-06-05
申请人： Byung-chul Ahn , Byoung-ho Lim , Soon-Sung Yoo , Yong-wan Kim
发明人： Byung-chul Ahn , Byoung-ho Lim , Soon-Sung Yoo , Yong-wan Kim
IPC分类号： H01L29/04 , H01L29/10 , H01L31/20 , H01L31/036 , H01L31/0376
CPC分类号： H01L27/1288 , H01L27/124 , H01L27/1255
摘要： The present invention discloses a four-mask method of manufacturing an array substrate of a liquid crystal display device and the liquid crystal display device having the same array substrate. The method includes forming a plurality of gate lines, gate electrodes and gate extension lines by depositing a first metallic material on a substrate and patterning the first metallic material with a first mask, the gate extension lines extending toward the opposite direction of the gate electrodes; forming a first insulating layer on the whole surface having gate lines, gate electrodes, and gate extension lines; forming a plurality of data lines, source electrodes, drain electrodes, and capacitor electrodes over the gate lines by depositing a semiconductor layer, an ohmic contact layer and a second metallic material sequentially on the first insulating layer, and patterning the second metallic material and the ohmic contact layer with a second mask; forming a passivation layer and a plurality of first and second contact holes by depositing a second insulating layer on the data lines, the source electrodes, the drain electrodes and the capacitor electrodes, and patterning the second insulating layer with a third mask, the first contact holes exposing a portion of the drain electrode, the second contact holes exposing a portion of the capacitor electrodes; and forming a plurality of pixel electrodes by depositing a transparent conductive layer on the passivation layer, and patterning the transparent conductive layer by a fourth mask, the pixel electrodes contacting the drain electrodes through the first contact holes and contacting the capacitor electrodes through the second contact holes.
摘要翻译：本发明公开了一种制造液晶显示装置的阵列基板的四掩模方法和具有相同阵列基板的液晶显示装置。该方法包括通过在衬底上沉积第一金属材料并用第一掩模图案化第一金属材料来形成多条栅极线，栅电极和栅极延伸线，栅极延伸线朝向栅电极的相反方向延伸; 在具有栅极线，栅极电极和栅极延伸线的整个表面上形成第一绝缘层; 通过在第一绝缘层上依次沉积半导体层，欧姆接触层和第二金属材料，在栅极线上形成多个数据线，源电极，漏电极和电容器电极，并将第二金属材料和具有第二掩模的欧姆接触层; 通过在数据线，源电极，漏电极和电容器电极上沉积第二绝缘层，并用第三掩模对第二绝缘层进行构图来形成钝化层和多个第一和第二接触孔，第一接触露出一部分漏电极的第二接触孔暴露电容器电极的一部分; 以及通过在所述钝化层上沉积透明导电层并形成多个像素电极，以及通过第四掩模对所述透明导电层进行图案化，所述像素电极通过所述第一接触孔与所述漏电极接触并通过所述第二接触接触所述电容器电极孔。

5. 发明申请

US20080001175A1 Array substrate for liquid crystal display device and method of manufacturing the same 有权
标题翻译：液晶显示装置用阵列基板及其制造方法
公开(公告)号：US20080001175A1
公开(公告)日：2008-01-03
申请号：US11646253
申请日：2006-12-28
申请人： Hyo-Uk Kim , Byung-chul Ahn , Byoung-Ho Lim
发明人： Hyo-Uk Kim , Byung-chul Ahn , Byoung-Ho Lim
IPC分类号： H01L27/10 , H01L29/739
CPC分类号： H01L27/124 , H01L27/1214 , H01L27/1288 , H01L29/42384 , H01L29/78633
摘要： An array substrate for a liquid crystal display device includes a substrate, a gate line over the substrate, a data line crossing the gate line to define a pixel region and including a transparent conductive layer and an opaque conductive layer, a data pad at one end of the data line and including a transparent conductive layer, a thin film transistor connected to the gate line and the data line and including a gate electrode, an active layer, an ohmic contact layer, a buffer metallic layer, a source electrode and a drain electrode, and a pixel electrode in the pixel region and connected to the thin film transistor, the pixel electrode including a transparent conductive layer.
摘要翻译：液晶显示装置用阵列基板包括基板，基板上的栅极线，与栅极线交叉以限定像素区域并包括透明导电层和不透明导电层的数据线，一端的数据焊盘的数据线，并且包括透明导电层，连接到栅极线和数据线的薄膜晶体管，并且包括栅电极，有源层，欧姆接触层，缓冲金属层，源电极和漏极电极和像素电极，并且连接到薄膜晶体管，像素电极包括透明导电层。

6. 发明授权

US06842199B2 Array substrate for liquid crystal display device and the fabrication method of the same 有权
标题翻译：液晶显示装置用阵列基板及其制造方法
公开(公告)号：US06842199B2
公开(公告)日：2005-01-11
申请号：US10459456
申请日：2003-06-12
申请人： Byung-chul Ahn , Soon-sung Yoo , Yong-wan Kim , Keuk-sang Kwon
发明人： Byung-chul Ahn , Soon-sung Yoo , Yong-wan Kim , Keuk-sang Kwon
IPC分类号： G02F1/136 , G02F1/1362 , G02F1/1343
CPC分类号： G02F1/1362 , G02F2001/136231
摘要： The present invention discloses an array substrate for an active-matrix LCD device and a method of fabricating the same. The array substrate reduces the number of masks used in the fabrication process so that reliability is enhanced and the cost is reduced over the conventional device and method.
摘要翻译：本发明公开了一种有源矩阵LCD器件用阵列基板及其制造方法。阵列基板减少了在制造过程中使用的掩模的数量，从而提高了可靠性并且降低了传统的器件和方法的成本。

7. 发明授权

US07242022B2 Array substrate for liquid crystal display device having two storage capacitor structures and the fabrication method of the same 有权
标题翻译：具有两个存储电容器结构的液晶显示装置用阵列基板及其制造方法
公开(公告)号：US07242022B2
公开(公告)日：2007-07-10
申请号：US10455435
申请日：2003-06-06
申请人： Byung-chul Ahn , Byoung-ho Lim , Soon-sung Yoo , Yong-wan Kim
发明人： Byung-chul Ahn , Byoung-ho Lim , Soon-sung Yoo , Yong-wan Kim
IPC分类号： H01L29/04 , H01L29/10 , H01L31/20 , H01L31/036 , H01L31/0376
CPC分类号： H01L27/1288 , H01L27/124 , H01L27/1255
摘要： An array substrate of a liquid crystal display device includes a substrate; an elongated gate line having a gate electrode on said substrate, said gate line extending in a first direction; a gate extension line on said substrate and that connects to said gate line, said gate extension line extending substantially perpendicularly to said gate line; a first insulating layer over said substrate, said gate line, and said gate extension line; a storage capacitor comprising a portion of said gate line, a conductive capacitor electrode that overlaps a portion of said gate line, an ohmic contact layer and a dielectric layer that includes said first insulating layer and a semiconductor layer; a passivation layer on said capacitor electrode; and a pixel electrode on said passivation layer, said pixel electrode contacting said capacitor electrode through a hole in said passivation layer.
摘要翻译：液晶显示装置的阵列基板包括基板; 在所述基板上具有栅电极的细长栅极线，所述栅极线沿第一方向延伸; 在所述衬底上的栅极延伸线并且连接到所述栅极线，所述栅极延伸线基本上垂直于所述栅极线延伸; 所述基板上的第一绝缘层，所述栅极线和所述栅极延伸线; 包括所述栅极线的一部分的存储电容器，与所述栅极线的一部分重叠的导电电容器电极，欧姆接触层和包括所述第一绝缘层和半导体层的电介质层; 所述电容器电极上的钝化层; 以及所述钝化层上的像素电极，所述像素电极通过所述钝化层中的一个孔接触所述电容器电极。

8. 发明授权

US06599786B1 Array substrate for liquid crystal display and the fabrication method of the same 有权
标题翻译：液晶显示器用阵列基板及其制造方法
公开(公告)号：US06599786B1
公开(公告)日：2003-07-29
申请号：US09657477
申请日：2000-09-07
申请人： Byung-chul Ahn , Byoung-ho Lim , Soon-sung Yoo , Yong-wan Kim
发明人： Byung-chul Ahn , Byoung-ho Lim , Soon-sung Yoo , Yong-wan Kim
IPC分类号： H01F2100
CPC分类号： H01L27/1288 , H01L27/124 , H01L27/1255
摘要： A method of manufacturing an LCD array substrate and LCD made by that method are disclosed. A plurality of gate lines, gate electrodes and gate extension lines are formed by depositing and patterning a first metallic material using a first mask. A first insulating layer is then formed. A plurality of data lines, source electrodes, drain electrodes, and capacitor electrodes are then formed by depositing and patterning suitable materials using a second mask. A passivation layer is then formed and patterned to create first and second contact holes using a third mask. The first contact holes expose the drain electrodes, the second contact holes expose the capacitor electrodes. A plurality of pixel electrodes are then formed by depositing and patterning a transparent conductive layer using a fourth mask. The pixel electrodes contact the drain electrodes through the first contact holes and contact the capacitor electrodes through the second contact holes.
摘要翻译：公开了一种通过该方法制造LCD阵列基板和LCD的方法。通过使用第一掩模沉积和图案化第一金属材料来形成多个栅极线，栅极电极和栅极延伸线。然后形成第一绝缘层。然后通过使用第二掩模沉积和图形合适的材料来形成多个数据线，源电极，漏电极和电容器电极。然后形成钝化层并使用第三掩模形成图案以产生第一和第二接触孔。第一接触孔露出漏电极，第二接触孔露出电容器电极。然后通过使用第四掩模沉积和图案化透明导电层来形成多个像素电极。像素电极通过第一接触孔接触漏电极，并通过第二接触孔与电容器电极接触。

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