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    • 8. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4970487A
    • 1990-11-13
    • US282639
    • 1988-12-12
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • G01L9/04G01L1/22G01L9/00G01P15/12
    • G01L9/0055G01L1/2287G01L9/0051G01P15/122Y10T29/49103
    • A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal deformable by the physical quantity, a layered constructed insulating means of an insulating material which is formed on the diaphragm by means of a physical vapor desposition process, wherein the layered constructed insulating means has at least two insulating material layers, a strain gauge formed on the layered constructed insulating means opposite the diaphragm by means of a physical vapor deposition process, and a contact zone on the strain gauge to provide an electrical connection for a physical quantity sensing device to the sensor. Due to the layered construction of the insulating means, the thickness of the insulating means as a whole may be reduced below that of a single layer insulating means and maintain good insulative properties particularly at excessive strain.
    • 提供了一种用于检测诸如流体压力和质量加速度的物理量并将其转换为电信号的传感器。 传感器具有通过物理量可变形的金属膜,通过物理蒸汽沉积工艺形成在隔膜上的绝缘材料的分层结构的绝缘装置,其中层状构造的绝缘装置具有至少两个绝缘体 材料层,通过物理气相沉积工艺形成在与隔膜相对的分层构造的绝缘装置上的应变仪,以及在应变仪上的接触区域,以提供用于传感器的物理量感测装置的电连接。 由于绝缘装置的分层结构,绝缘装置整体的厚度可以降低到单层绝缘装置的厚度以下,特别是在过度的应变下保持良好的绝缘性能。