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    • 1. 发明申请
    • Liquid ejecting head drive method and liquid ejection device
    • 液体喷射头驱动方法和液体喷射装置
    • US20050052482A1
    • 2005-03-10
    • US10488747
    • 2002-09-11
    • Maki ItoMasami MuraiShiro Yazaki
    • Maki ItoMasami MuraiShiro Yazaki
    • B41J2/045B41J29/38
    • B41J2/04581B41J2/04588B41J2/04593
    • A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.
    • 可以获得目标良好特性的液体喷射装置,并且还可以扩大材料选择的范围。 液体喷射装置使压力室收缩,从而通过向压电体施加电压喷射液体,并且使得在液体喷射操作期间施加到压电体的驱动波形包括高电位周期(a2),其中 施加表现出超过压电体的矫顽电场的电场强度的电压,以及使电位成为与高电位期间的极性相反的电压的电压的反向电位周期(a6)或电位 变为零。
    • 2. 发明授权
    • Liquid ejecting head drive method and liquid ejection device
    • 液体喷射头驱动方法和液体喷射装置
    • US07252354B2
    • 2007-08-07
    • US10488747
    • 2002-09-11
    • Maki ItoMasami MuraiShiro Yazaki
    • Maki ItoMasami MuraiShiro Yazaki
    • B41J29/38B41J2/045
    • B41J2/04581B41J2/04588B41J2/04593
    • A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.
    • 可以获得目标良好特性的液体喷射装置,并且还可以扩大材料选择的范围。 液体喷射装置使压力室收缩,从而通过向压电体施加电压喷射液体,并且使得在液体喷射操作期间施加到压电体的驱动波形包括高电位周期(a 2),其中 施加表现出超过压电体的矫顽电场的电场强度的电压,和施加使电位成为与高电位期间极性相反极性的电压的反向电势周期(a 6),或 电位变为零。
    • 3. 发明申请
    • Actuator device, liquid jet head and liquid jet apparatus
    • 致动器装置,液体喷射头和液体喷射装置
    • US20050190239A1
    • 2005-09-01
    • US11056207
    • 2005-02-14
    • Maki ItoLi Xin-ShanMasami Murai
    • Maki ItoLi Xin-ShanMasami Murai
    • B41J2/045B41J2/055B41J2/135B41J2/14B41J2/145B41J2/16H01L41/09H01L41/187H01L41/22
    • B41J2/14233B41J2/161B41J2/1646B41J2002/14241B41J2002/14419H01L41/0973
    • Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.
    • 提供了致动器装置,液体喷射头和液体喷射装置,其可以通过防止形成振动板的各个膜的剥离来提高可靠性。 振动板具有形成在通道形成基板10的一个表面上的第一氧化膜(弹性膜50)和通过溅射法形成在第一氧化物膜50上的第二氧化膜(绝缘膜55)。 在第一和第二氧化物膜50和55之间的界面的仅一部分中,形成改变的层,其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素,第二元素是 第二氧化膜55中包含的除了氧以外的构成元素,其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素 氧化膜55.第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10%。
    • 10. 发明授权
    • Actuator device, liquid jet head and liquid jet apparatus
    • 致动器装置,液体喷射头和液体喷射装置
    • US07357490B2
    • 2008-04-15
    • US11056207
    • 2005-02-14
    • Maki ItoXin-Shan LiMasami Murai
    • Maki ItoXin-Shan LiMasami Murai
    • B41J2/045
    • B41J2/14233B41J2/161B41J2/1646B41J2002/14241B41J2002/14419H01L41/0973
    • Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.
    • 提供了致动器装置,液体喷射头和液体喷射装置,其可以通过防止形成振动板的各个膜的剥离来提高可靠性。 振动板具有形成在通道形成基板10的一个表面上的第一氧化膜(弹性膜50)和通过溅射法形成在第一氧化物膜50上的第二氧化膜(绝缘膜55)。 在第一和第二氧化物膜50和55之间的界面的仅一部分中,形成改变的层,其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素,第二元素是 第二氧化膜55中包含的除了氧以外的构成元素,其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素 氧化膜55。 在第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10%。