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    • 2. 发明申请
    • INDUCTION HEATING ELEMENT MADE OF GLASSY CARBON, HEATING DEVICE AND HEATER
    • 玻璃碳,加热装置和加热器的感应加热元件
    • US20090071953A1
    • 2009-03-19
    • US11911126
    • 2006-03-31
    • Maki Hamaguchi
    • Maki Hamaguchi
    • H05B6/02
    • H05B6/105H01L21/67109H01L21/67115
    • A glass-like carbon induction heating element having high heating efficiency and a heating apparatus are provided. A glass-like carbon induction heating element, which inductively generates heat by electromagnetic induction, has an infrared radiation characteristic that a ratio (E1/E2) of infrared radiation intensity (E1) of an opposed face to an object-to-be-heated to infrared radiation intensity (E2) of a non-opposed face to the object-to-be-heated exceeds 1.2. A heating apparatus has the glass-like carbon induction heating element, and a high frequency induction coil that is disposed outside the glass-like carbon induction heating element for allowing the glass-like carbon induction heating element to inductively generate heat, wherein the high frequency induction coil is applied with a current so that the object-to-be-heated is heated by infrared rays radiated from the glass-like carbon induction heating element.
    • 提供了具有高加热效率的玻璃状碳感应加热元件和加热装置。 通过电磁感应感应发热的玻璃状碳感应加热元件具有红外线辐射特性,即相对面的红外线辐射强度(E1)与被加热物体(E1)的比(E1 / E2) 对于被加热物体的非对置面的红外线辐射强度(E2)超过1.2。 加热装置具有玻璃状碳感应加热元件和设置在玻璃状碳感应加热元件外侧的高频感应线圈,用于使玻璃状碳感应加热元件感应发热,其中高频 感应线圈被施加电流,使得被加热物体被从玻璃状碳感应加热元件辐射的红外线加热。
    • 3. 发明授权
    • Heating apparatus using induction heating
    • 加热装置采用感应加热
    • US06932872B2
    • 2005-08-23
    • US10270522
    • 2002-10-16
    • Maki Hamaguchi
    • Maki Hamaguchi
    • H05B6/10C23C16/46H01L21/205H01L21/324H05B6/02C23C16/00
    • H05B6/108
    • A heating apparatus which is installed in a low pressure CVD system or annealing equipment for use in semiconductor integrated circuit manufacturing processes for heat-treating wafers on which IC's are to be formed, wherein wafers are uniformly heated, the temperature of wafers is rapidly raised and lowered, and wafers are processed in high volume, wherein the apparatus comprises a cylindrical body made of glass-like carbon placed inside a reactor, and a high-frequency induction coil which is placed outside the reactor and is for causing the cylindrical body made of glass-like carbon to produce heat and thereby heating wafers in the reactor.
    • 一种安装在低压CVD系统中的加热装置或用于半导体集成电路制造工艺的退火设备,用于对要在其上形成IC的晶片进行热处理,其中晶片被均匀加热,晶片的温度迅速升高, 降低晶片,并且大量地处理晶片,其中该装置包括放置在反应器内部的由玻璃状碳制成的圆柱体,以及设置在反应器外部并用于使由反应器制成的圆柱体的高频感应线圈 玻璃状碳以产生热量,从而加热反应器中的晶片。
    • 9. 发明授权
    • Carbon substrate and production thereof
    • 碳基板及其制造
    • US5609959A
    • 1997-03-11
    • US453887
    • 1995-05-30
    • Maki HamaguchiTetsuya YamamotoTetsuo SuzukiHideki YamamuroHiroshi Chosokabe
    • Maki HamaguchiTetsuya YamamotoTetsuo SuzukiHideki YamamuroHiroshi Chosokabe
    • C04B35/524C01B31/02
    • C04B35/524Y10T428/30
    • A carbon substrate is prepared from a molded article of thermosetting resin by heat-treating in an inert atmosphere. The resin is characterized in that the content of Fe, Al, Ni, Co, Cr, and Mg insoluble in the resin is less than 1 ppm each and the content of Ca and Si insoluble in the resin is less than 2 ppm each. The thermosetting resin is further characterized in that the water content is less than 3 wt % and the ratio of the methylene carbon (CH.sub.2) connected to the hydroxyl group (OH) is less than 3% (based on the total carbon number). The carbon substrate prepared in this manner is almost free of defects and voids. It is suitable for use as the substrate of magnetic recording medium. The thermosetting resin may be a powdery or granular one which fluidizes and then cures on heating. A molded article of thermosetting resin is prepared by introducing the resin melt into a mold and curing it with heating under pressure. It is subsequently heat-treated in an inert atmosphere to give a molded article of glass-like carbon.
    • 通过在惰性气氛中热处理由热固性树脂的模制品制备碳基底。 该树脂的特征在于,不溶于树脂的Fe,Al,Ni,Co,Cr和Mg的含量分别小于1ppm,并且不溶于树脂的Ca和Si的含量分别小于2ppm。 热固性树脂的特征还在于,水含量小于3重量%,与羟基(OH)连接的亚甲基碳(CH 2)的比例小于3%(基于总碳数)。 以这种方式制备的碳衬底几乎没有缺陷和空隙。 适用于磁记录介质的基板。 热固性树脂可以是粉末状或颗粒状的,其流化,然后在加热下固化。 通过将树脂熔体引入模具中并通过加压加压固化来制备热固性树脂的模制品。 随后在惰性气氛中进行热处理,得到玻璃状碳的成型品。