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1. 发明授权

US11619769B2 Adapter optical system and focal length variable optical system 有权
公开(公告)号：US11619769B2
公开(公告)日：2023-04-04
申请号：US17109569
申请日：2020-12-02
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Yuko Shishido
IPC分类号： G02B3/14 , G02B13/22
摘要： An adapter optical system, which is an optical system configured to guide reflection light reflected by an object and passing through an imaging lens to a liquid resonant lens, includes: a first lens unit removably disposed at a position where the reflection light passing through the imaging lens enters and constituting an image-side telecentric optical system; and a second lens unit disposed at a position where the reflection light passing through the first lens unit enters and constituting a finite correction optical system in combination with the liquid resonant lens.

2. 发明授权

US11193757B2 Image pick-up device, image measurement apparatus, non-contact displacement-detecting device and non-contact profile-measuring device 有权
公开(公告)号：US11193757B2
公开(公告)日：2021-12-07
申请号：US16717320
申请日：2019-12-17
申请人： MITUTOYO CORPORATION
发明人： Satoru Yoshida , Tatsuya Nagahama , Masafumi Yamanaka , Hitoshi Isobe , Naoto Oita , Koji Kubo , Yuko Shishido , Nobuo Ohba , Takahisa Ootake , Hiroki Matsui , Masanori Arai , Shiro Igasaki , Yuki Kurahashi , Hiroshi Sakai , Yutaka Watanabe
IPC分类号： G01B11/24 , H04N5/225 , G02B21/36
摘要： An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

3. 发明申请

US20210173128A1 ADAPTER OPTICAL SYSTEM AND FOCAL LENGTH VARIABLE OPTICAL SYSTEM 有权
公开(公告)号：US20210173128A1
公开(公告)日：2021-06-10
申请号：US17109569
申请日：2020-12-02
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Yuko Shishido
IPC分类号： G02B3/14 , G02B13/22
摘要： An adapter optical system, which is an optical system configured to guide reflection light reflected by an object and passing through an imaging lens to a liquid resonant lens, includes: a first lens unit removably disposed at a position where the reflection light passing through the imaging lens enters and constituting an image-side telecentric optical system; and a second lens unit disposed at a position where the reflection light passing through the first lens unit enters and constituting a finite correction optical system in combination with the liquid resonant lens.

4. 发明申请

US20170363411A1 INTERFERENCE MEASURING DEVICE AND METHOD OF MEASUREMENT USING THE SAME DEVICE 有权
公开(公告)号：US20170363411A1
公开(公告)日：2017-12-21
申请号：US15622996
申请日：2017-06-14
申请人： Mitutoyo Corporation
发明人： Tatsuya Nagahama , Ken Motohashi , Han Haitjema , Johannes Anna Quaedackers
IPC分类号： G01B9/02
CPC分类号： G01B9/02015 , G01B11/2441
摘要： The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

5. 发明申请

US20160349490A1 TELECENTRIC OPTICAL APPARATUS 审中-公开
标题翻译：电子光学设备
公开(公告)号：US20160349490A1
公开(公告)日：2016-12-01
申请号：US15139543
申请日：2016-04-27
申请人： Mitutoyo Corporation
发明人： Kenji Okabe , Tatsuya Nagahama , Toru Yaku , Kimitoshi Ono
IPC分类号： G02B13/22
摘要： A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
摘要翻译：提供了能够抑制部件数量增加以及实现高精度光轴对准的远心光学装置。本发明的远心光学装置的特征在于具有：设置在物体侧的第一远心透镜面; 第二远心透镜表面，其设置在图像侧并与第一远心透镜表面共享焦点位置; 以及在位于第一远心透镜表面和第二远心透镜表面之间的外部区域中的光路修剪部分，该外部区域位于比位于焦点位置的中心的光通过区域更远的一侧并且改变光路，从而防止入射在外部区域上的光束对图像形成有贡献。

6. 发明授权

US10663629B2 Variable focal length lens apparatus 有权
公开(公告)号：US10663629B2
公开(公告)日：2020-05-26
申请号：US15854251
申请日：2017-12-26
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Yuko Shishido , Yuki Kurahashi
IPC分类号： G02B3/14 , G02B7/28 , G02B7/08
摘要： A variable focal length lens apparatus includes a lens system where a refractive index changes in response to an input drive signal; a field lens arranged on the same optical axis as the lens system; an image detector detecting an image of a measured object through the lens system and the field lens; a pulse illuminator providing pulse illumination of the measured object based on an input light emission signal; a temperature sensor detecting temperature information for an interior of the lens system; and a controller outputting the drive signal and the light emission signal in addition to correcting the timing of the light emission signal based on the temperature information.

7. 发明申请

US20200073093A1 TELECENTRIC OPTICAL APPARATUS 审中-公开
公开(公告)号：US20200073093A1
公开(公告)日：2020-03-05
申请号：US16679731
申请日：2019-11-11
申请人： Mitutoyo Corporation
发明人： Kenji Okabe , Tatsuya Nagahama , Toru Yaku , Kimitoshi Ono
IPC分类号： G02B13/22 , G02B3/00 , G02B5/00
摘要： A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

8. 发明授权

US10024648B2 Interference measuring device and method of measurement using the same device 有权
公开(公告)号：US10024648B2
公开(公告)日：2018-07-17
申请号：US15622996
申请日：2017-06-14
申请人： Mitutoyo Corporation
发明人： Tatsuya Nagahama , Ken Motohashi , Han Haitjema , Johannes Anna Quaedackers
IPC分类号： G01B9/02
摘要： The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

9. 发明授权

US08953170B2 White-light interferometric measuring device 有权
标题翻译：白光干涉测量装置
公开(公告)号：US08953170B2
公开(公告)日：2015-02-10
申请号：US13782084
申请日：2013-03-01
申请人： Mitutoyo Corporation
发明人： Atsushi Usami , Tatsuya Nagahama
IPC分类号： G01B9/02 , G01B9/04
CPC分类号： G01B9/02075 , G01B9/02007 , G01B9/02058 , G01B9/0209 , G01B9/04 , G01B2290/70
摘要： A white-light interferometric measuring device includes: a white light source that emits a white light beam; a beam splitter that reflects the white light beam; and an interference objective lens that collects the white light beam having reflected off the beam splitter in the direction of an optical axis and irradiates a measurement workpiece with the white light beam, the interference objective lens generating interference between a measurement light beam obtained by reflection of the white light beam off the measurement workpiece and a reference light beam obtained by branching of the white light beam to be converged on the measurement workpiece. Polarization correcting means that corrects the white light beam to enter the interference objective lens to circularly polarized light is arranged between the white light source and the interference objective lens.
摘要翻译：白光干涉测量装置包括：发射白光束的白光源; 反射白光束的分束器; 以及干涉物镜，其收集沿光轴方向反射的分束器的白光束，并将白色光束照射测量工件，干涉物镜产生通过反射获得的测量光束之间的干涉白光束离开测量工件，通过白光束的分支获得的参考光束被聚焦在测量工件上。在白光源和干涉物镜之间配置有将白光进入干涉物镜的圆偏振光进行偏振校正的装置。

10. 发明授权

US11237354B2 Variable focal length lens apparatus 有权
公开(公告)号：US11237354B2
公开(公告)日：2022-02-01
申请号：US16161835
申请日：2018-10-16
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Koji Kubo , Yuko Shishido , Masaki Okayasu , Atsushi Usami
IPC分类号： G02B7/10 , G02B3/14 , G02F1/29 , G02B13/22 , G02B9/04 , H04N5/225
摘要： A variable focal length lens apparatus includes an objective lens and an imaging lens that are aligned on the same optical axis; a front side lens system and a rear side lens system that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm disposed in the section between the front side lens system and the rear side lens system on the optical axis.

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