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1. 发明申请

US20230067203A1 OPTICAL DEVICE 有权
公开(公告)号：US20230067203A1
公开(公告)日：2023-03-02
申请号：US17896428
申请日：2022-08-26
申请人： MITUTOYO CORPORATION
发明人： Yuki Tanaka , Ken Motohashi
IPC分类号： G02B7/182 , G02B17/08
摘要： An optical device provided with an optical parts position adjusting and fixing device for adjusting and fixing the position of the optical parts moving in an optical axis direction, wherein the position adjusting and fixing device is provided with a long slotted hole extended in the optical axis direction formed on a side surface of the optical parts; a fixing means which is mounted on an object to be fixed of the optical parts and which is movable along the long slotted hole; a non-penetrating screw hole formed in the fixing means and which is divided by a slit; and a screw which is screwed into the screw hole and spreads the slit when screwed into the screw hole so as to press the outer surface of the fixing means against the inner surface of the long slotted hole.

2. 发明申请

US20170363411A1 INTERFERENCE MEASURING DEVICE AND METHOD OF MEASUREMENT USING THE SAME DEVICE 有权
公开(公告)号：US20170363411A1
公开(公告)日：2017-12-21
申请号：US15622996
申请日：2017-06-14
申请人： Mitutoyo Corporation
发明人： Tatsuya Nagahama , Ken Motohashi , Han Haitjema , Johannes Anna Quaedackers
IPC分类号： G01B9/02
CPC分类号： G01B9/02015 , G01B11/2441
摘要： The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

3. 发明授权

US10161747B2 Surface texture measuring apparatus and method 有权
公开(公告)号：US10161747B2
公开(公告)日：2018-12-25
申请号：US15430593
申请日：2017-02-13
申请人： MITUTOYO CORPORATION
发明人： Hiroshi Sakai , Tetsuya Ito , Ken Motohashi
IPC分类号： G01B11/30 , G01B11/24 , G01B5/00 , G01B5/06 , G01B5/12 , G01B11/06 , G01B11/12
摘要： A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a θ axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.

4. 发明授权

US09618321B2 Interference measuring device 有权
公开(公告)号：US09618321B2
公开(公告)日：2017-04-11
申请号：US14679236
申请日：2015-04-06
申请人： MITUTOYO CORPORATION
发明人： Ken Motohashi , Atsushi Usami
IPC分类号： G01B11/02 , G01B9/02 , G01B11/00
CPC分类号： G01B9/0203 , G01B9/02028 , G01B11/005 , G01B2290/65
摘要： An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.

5. 发明申请

US20160195384A1 INTERFERENCE OBJECTIVE LENS AND LIGHT INTERFERENCE MEASURING DEVICE 有权
标题翻译：干涉目标镜头和光干涉测量装置
公开(公告)号：US20160195384A1
公开(公告)日：2016-07-07
申请号：US14985496
申请日：2015-12-31
申请人： Mitutoyo Corporation
发明人： Ken Motohashi
IPC分类号： G01B9/02 , G02B7/182 , G02B26/00
CPC分类号： G02B7/1825 , G01B9/0205 , G01B9/0209 , G01B11/2441 , G02B7/1827 , G02B26/001 , G02B27/1073
摘要： An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which supports the outer surface of the mirror holding member by the inner surface; and a reference mirror adjusting mechanism which adjusts a position of the mirror holding member in the support member.
摘要翻译：干涉物镜包括：物镜系统; 放置在测量对象的测量表面和物镜的末端之间的分束器，其将从物镜发射的光分离成参考光路和测量光路，并且输出组合波，其中反射通过参考光路的光和通过测量对象的反射光被组合; 参考反射镜，其被放置在参考光路中，并且由分束器反射发散到参考光路中的光; 镜保持构件，其具有球面表面形状的外表面，并且保持所述参考镜，使得所述参考镜的反射表面通过球面的中心; 支撑构件，其具有球面表面形状的内表面，其直径基本上等于所述镜保持构件的外表面，并且通过所述内表面支撑所述镜保持构件的外表面; 以及调整反射镜保持构件在支撑构件中的位置的参考镜调节机构。

6. 发明授权

US10794688B2 Optical interference measuring device 有权
公开(公告)号：US10794688B2
公开(公告)日：2020-10-06
申请号：US16293027
申请日：2019-03-05
申请人： MITUTOYO CORPORATION
发明人： Ken Motohashi , Johannes Anna Quaedackers , Adriaan Tiemen Zuiderweg
IPC分类号： G01B9/02 , G01B11/24
摘要： An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.

7. 发明授权

US10295337B2 Surface texture measuring apparatus 有权
公开(公告)号：US10295337B2
公开(公告)日：2019-05-21
申请号：US15433234
申请日：2017-02-15
申请人： MITUTOYO CORPORATION
发明人： Sadayuki Matsumiya , Shuichi Kamiyama , Hidemitsu Asano , Hiroshi Sakai , Hiromu Maie , Yoshihiko Takahashi , Masanori Arai , Ken Motohashi
IPC分类号： G01B5/00 , G01B5/06 , G01B5/12 , G01B11/06 , G01B11/12 , G01B11/24 , G01B11/30
摘要： A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a θ axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

8. 发明授权

US09921391B2 Interference objective lens and light interference measuring device 有权
公开(公告)号：US09921391B2
公开(公告)日：2018-03-20
申请号：US14985496
申请日：2015-12-31
申请人： Mitutoyo Corporation
发明人： Ken Motohashi
IPC分类号： G01B9/02 , G02B7/182 , G02B26/00 , G01B11/24
CPC分类号： G02B7/1825 , G01B9/0205 , G01B9/0209 , G01B11/2441 , G02B7/1827 , G02B26/001 , G02B27/1073
摘要： An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which supports the outer surface of the mirror holding member by the inner surface; and a reference mirror adjusting mechanism which adjusts a position of the mirror holding member in the support member.

9. 发明授权

US10024648B2 Interference measuring device and method of measurement using the same device 有权
公开(公告)号：US10024648B2
公开(公告)日：2018-07-17
申请号：US15622996
申请日：2017-06-14
申请人： Mitutoyo Corporation
发明人： Tatsuya Nagahama , Ken Motohashi , Han Haitjema , Johannes Anna Quaedackers
IPC分类号： G01B9/02
摘要： The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

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