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    • 5. 发明授权
    • Optical gas sensor
    • 光学气体传感器
    • US08896834B2
    • 2014-11-25
    • US13553750
    • 2012-07-19
    • Jing-Yuan LinShang-Chian Su
    • Jing-Yuan LinShang-Chian Su
    • G01N21/00G01J5/02B05D3/06
    • G01J5/02B05D3/06G01N21/031G01N21/3504
    • In the optical gas sensor of the application, a three-dimensional reaction chamber structure is used to replace the traditional simple structure, so that the performance of the gas sensor can be enhanced in a wafer-level size. Besides, a light source, a reaction chamber and a light detector are integrated into one wafer in an exemplary embodiment, so as to achieve the wafer-level integration. In addition, the optical gas sensor can detect various gases simultaneously and has wide application in fields such as home environment monitoring, industrial safety, and disease diagnosis and treatment.
    • 在本申请的光学气体传感器中,使用三维反应室结构来代替传统的简单结构,从而可以提高晶圆级尺寸的气体传感器的性能。 此外,在示例性实施例中,将光源,反应室和光检测器集成到一个晶片中,以便实现晶片级集成。 此外,光学气体传感器可以同时检测各种气体,并且广泛应用于家庭环境监测,工业安全和疾病诊断和治疗等领域。
    • 9. 发明申请
    • OPTICAL GAS SENSOR
    • 光学气体传感器
    • US20130258345A1
    • 2013-10-03
    • US13553750
    • 2012-07-19
    • Jing-Yuan LinShang-Chian Su
    • Jing-Yuan LinShang-Chian Su
    • G01N21/59
    • G01J5/02B05D3/06G01N21/031G01N21/3504
    • In the optical gas sensor of the application, a three-dimensional reaction chamber structure is used to replace the traditional simple structure, so that the performance of the gas sensor can be enhanced in a wafer-level size. Besides, a light source, a reaction chamber and a light detector are integrated into one wafer in an exemplary embodiment, so as to achieve the wafer-level integration. In addition, the optical gas sensor can detect various gases simultaneously and has wide application in fields such as home environment monitoring, industrial safety, and disease diagnosis and treatment.
    • 在本申请的光学气体传感器中,使用三维反应室结构来代替传统的简单结构,从而可以在晶片级尺寸上提高气体传感器的性能。 此外,在示例性实施例中,将光源,反应室和光检测器集成到一个晶片中,以便实现晶片级集成。 此外,光学气体传感器可以同时检测各种气体,并且广泛应用于家庭环境监测,工业安全和疾病诊断和治疗等领域。