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1. 发明申请

US20150355523A1 SIGNAL PROCESSING METHOD OF MULTIPLE MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND COMBO MEMS DEVICE APPLYING THE METHOD 有权
标题翻译：多个微机电系统（MEMS）器件的信号处理方法和应用该方法的组合MEMS器件
公开(公告)号：US20150355523A1
公开(公告)日：2015-12-10
申请号：US14676216
申请日：2015-04-01
申请人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
发明人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
IPC分类号： G02F2/00 , B81B7/00
CPC分类号： G02F2/00 , B81B7/008 , G01C19/5776
摘要： This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.
摘要翻译：本发明提供了一种多个微机电系统装置的信号处理方法。信号处理方法包括：提供至少两个MEMS器件; 将不同频率的信号驱动或调制到MEMS器件，使得MEMS器件以相应的频率产生相应的MEMS信号; 以及将所述MEMS信号与各个频率组合成一个或多个多频信号并输出所述多频信号，其中所述多频信号的数目小于具有相应频率的多个MEMS信号。本发明还提供集成两个或多个MEMS器件和两个或更多个振动源的组合MEMS器件。

2. 发明授权

US09051170B2 Microelectromechanical system device with electrical interconnections and method for fabricating the same 有权
标题翻译：具有电互连的微机电系统装置及其制造方法
公开(公告)号：US09051170B2
公开(公告)日：2015-06-09
申请号：US13459271
申请日：2012-04-30
申请人： Chao-Ta Huang , Yu-Wen Hsu , Chin-Fu Kuo
发明人： Chao-Ta Huang , Yu-Wen Hsu , Chin-Fu Kuo
IPC分类号： G01P15/08 , H01L21/76 , B81B7/00 , G01R33/028
CPC分类号： B81B7/0006 , B81B2201/0271 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058 , G01R33/0286
摘要： A microelectromechanical system device including anchors and mass is provided. Electrical interconnections are formed on the mass by using a insulation layer of mass, an electrical insulation trench and conductive through hole. The electrical interconnections replace the cross-line structure without adding additional processing steps, thereby reducing the use of the conductive layer and the electrical insulation layer. A method for fabricating the microelectromechanical system device is also provided.
摘要翻译：提供了包括锚和质量的微机电系统装置。通过使用质量绝缘层，电绝缘沟槽和导电通孔在质量上形成电互连。电互连替代了交叉线结构，而不增加额外的处理步骤，从而减少了导电层和电绝缘层的使用。还提供了一种用于制造微机电系统装置的方法。

3. 发明申请

US20130099331A1 STRUCTURE AND PROCESS FOR MICROELECTROMECHANICAL SYSTEM-BASED SENSOR 有权
标题翻译：基于微电子系统的传感器的结构与工艺
公开(公告)号：US20130099331A1
公开(公告)日：2013-04-25
申请号：US13327681
申请日：2011-12-15
申请人： Lung-Tai Chen , Shih-Chieh Lin , Yu-Wen Hsu
发明人： Lung-Tai Chen , Shih-Chieh Lin , Yu-Wen Hsu
IPC分类号： H01L29/66 , H01L21/02
CPC分类号： B81B7/007 , B81B2207/097 , H01L2924/0002 , H01L2924/00
摘要： A structure and a process for a microelectromechanical system (MEMS)-based sensor are provided. The structure for a MEMS-based sensor includes a substrate chip. A first insulating layer covers a top surface of the substrate chip. A device layer is disposed on a top surface of the first insulating layer. The device layer includes a periphery region and a sensor component region. The periphery region and a sensor component region have an air trench therebetween. The component region includes an anchor component and a moveable component. A second insulating layer is disposed on a top surface of the device layer, bridging the periphery region and a portion of the anchor component. A conductive pattern is disposed on the second insulating layer, electrically connecting to the anchor component.
摘要翻译：提供了一种用于基于微机电系统（MEMS）的传感器的结构和工艺。基于MEMS的传感器的结构包括衬底芯片。第一绝缘层覆盖衬底芯片的顶表面。器件层设置在第一绝缘层的顶表面上。器件层包括外围区域和传感器部件区域。周边区域和传感器部件区域之间具有空气沟槽。组件区域包括锚构件和可移动构件。第二绝缘层设置在器件层的顶表面上，桥接外围区域和锚固部件的一部分。导电图案设置在第二绝缘层上，与导电组件电连接。

4. 发明申请

US20120300380A1 LAPTOP COMPUTER WITH MANUALLY OPERATED SWITCH FOR DIVERTING KEY CODES TO BLUETOOTH DEVICE COMMUNICATION MODULE 审中-公开
标题翻译：带有手动操作开关的LAPTOP计算机，用于将关键代码传送到蓝牙设备通信模块
公开(公告)号：US20120300380A1
公开(公告)日：2012-11-29
申请号：US13115671
申请日：2011-05-25
申请人： PEI-HSIN LIN , Yu-Wen Hsu , Chih-Shien Yao
发明人： PEI-HSIN LIN , Yu-Wen Hsu , Chih-Shien Yao
IPC分类号： H05K7/02
CPC分类号： G06F1/1616 , G06F1/1671 , G06F1/1698 , G06F3/0231
摘要： A laptop computer includes a housing comprising a top keyboard and a manually operated switch having a first position for showing a predetermined operating mode, and a second position for showing a Bluetooth operating mode; a display hingedly connected to a rear edge of the housing; a CPU in the housing; and a Bluetooth adaptor in the housing and comprising a switch circuit, a MCU, a translator, and a Bluetooth device communication module. In the predetermined operating mode key codes are sent to the CPU via the switch circuit. In the Bluetooth operating mode the key codes are sent to the translator via the switch circuit and the MCU, the translator translates the key codes to Bluetooth key codes and sends same to the Bluetooth device communication module, and the Bluetooth device communication module transmits the Bluetooth key codes to a handheld telecommunications device as commanded by the MCU.
摘要翻译：膝上型计算机包括壳体，其包括顶部键盘和具有用于显示预定操作模式的第一位置的手动操作开关，以及用于示出蓝牙操作模式的第二位置; 显示器，其铰接地连接到所述壳体的后边缘; 房屋中的一个CPU; 以及蓝牙适配器，其包括开关电路，MCU，转换器和蓝牙设备通信模块。在预定的操作模式中，钥匙代码通过开关电路发送到CPU。在蓝牙操作模式下，键盘代码通过开关电路和MCU发送到翻译器，翻译器将密钥代码转换为蓝牙密钥代码，并将其发送到蓝牙设备通信模块，蓝牙设备通信模块将蓝牙设备通信模块按照MCU的指示，手持电信设备的关键码。

5. 发明授权

US08242788B2 Calibration apparatus and method for capacitive sensing devices 有权
标题翻译：用于电容式感测装置的校准装置和方法
公开(公告)号：US08242788B2
公开(公告)日：2012-08-14
申请号：US12645473
申请日：2009-12-22
申请人： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
发明人： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
IPC分类号： G01R35/00 , G01R27/02 , G01R27/26
CPC分类号： G01D5/24 , G01D18/00
摘要： A calibration apparatus and method for a capacitive sensing device, in which a calibration capacitor device connects to the capacitive sensing device which is connected to an integration circuit that generates a voltage output and a latch output, a transforming circuit transforms a sensitivity calibration parameter into a pair of corresponding analog signal outputs, and an offset calibration parameter into a corresponding analog signal output, at least two first switches between the pair of corresponding analog signal outputs and a fixed potential according to system clock's levels, and at least a third switch switches between the corresponding analog signal output and another fixed potential according to the system clock's levels. The apparatus determines the switch between the pair of signal outputs according to the latch output.
摘要翻译：一种用于电容感测装置的校准装置和方法，其中校准电容器装置连接到连接到产生电压输出和锁存输出的积分电路的电容感测装置，变换电路将灵敏度校准参数转换成一对相应的模拟信号输出和偏移校准参数转换成对应的模拟信号输出，在对对应的模拟信号输出对之间的至少两个第一开关和根据系统时钟电平的固定电位，并且至少第三开关在相应的模拟信号输出和另一个固定电位根据系统时钟的电平。该装置根据锁存输出确定一对信号输出之间的切换。

6. 发明授权

US08104354B2 Capacitive sensor and manufacturing method thereof 有权
标题翻译：电容式传感器及其制造方法
公开(公告)号：US08104354B2
公开(公告)日：2012-01-31
申请号：US12877337
申请日：2010-09-08
申请人： Yu Wen Hsu , Chao Ta Huang , Jing Yuan Lin , Sheah Chen
发明人： Yu Wen Hsu , Chao Ta Huang , Jing Yuan Lin , Sheah Chen
IPC分类号： G01L9/12 , H01L21/302
CPC分类号： G01L9/0073 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49002
摘要： A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds the first and second electrodes and is disposed on the substrate. The movable frame surrounds the sensing device. Some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. The sensing device and the first electrode are both sensing electrodes. The movable frame is disposed above the second electrode, and cooperates with the second electrode to act as a capacitive driver.
摘要翻译：电容式传感器包括衬底，至少一个第一电极，至少一个第二电极，感测装置，至少一个锚定基座，至少一个可移动框架和多个弹簧构件。第一电极和第二电极设置在基板上，锚固体围绕第一和第二电极并且设置在基板上。可动框架围绕感测装置。一些弹簧构件连接可动框架和感测装置，而另一个弹簧构件连接可动框架和锚固基座。感测装置和第一电极都是感测电极。可移动框架设置在第二电极上方，并与第二电极配合以用作电容式驱动器。

7. 发明申请

US20110154905A1 CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：电容式传感器及其制造方法
公开(公告)号：US20110154905A1
公开(公告)日：2011-06-30
申请号：US12877337
申请日：2010-09-08
申请人： Yu Wen HSU , Chao Ta Huang , Jing Yuan Lin , Sheah Chen
发明人： Yu Wen HSU , Chao Ta Huang , Jing Yuan Lin , Sheah Chen
IPC分类号： G01R27/26 , H01L21/302 , G01L9/12
CPC分类号： G01L9/0073 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49002
摘要： A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds the first and second electrodes and is disposed on the substrate. The movable frame surrounds the sensing device. Some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. The sensing device and the first electrode are both sensing electrodes. The movable frame is disposed above the second electrode, and cooperates with the second electrode to act as a capacitive driver.
摘要翻译：电容式传感器包括衬底，至少一个第一电极，至少一个第二电极，感测装置，至少一个锚定基座，至少一个可移动框架和多个弹簧构件。第一电极和第二电极设置在基板上，锚固体围绕第一和第二电极并且设置在基板上。可动框架围绕感测装置。一些弹簧构件连接可动框架和感测装置，而另一个弹簧构件连接可动框架和锚固基座。感测装置和第一电极都是感测电极。可移动框架设置在第二电极上方，并与第二电极配合以用作电容式驱动器。

8. 发明申请

US20110018075A1 STRUCTURE AND FABRICATION METHOD OF A SENSING DEVICE 有权
标题翻译：感应装置的结构和制造方法
公开(公告)号：US20110018075A1
公开(公告)日：2011-01-27
申请号：US12572277
申请日：2009-10-02
申请人： Lung-Tai Chen , Yu-Wen Hsu , Sheah Chen , Jing-Yuan Lin , Li-Chi Pan , Tzong-Che Ho
发明人： Lung-Tai Chen , Yu-Wen Hsu , Sheah Chen , Jing-Yuan Lin , Li-Chi Pan , Tzong-Che Ho
IPC分类号： H01L29/84 , H01L23/02
CPC分类号： B81B7/007 , B81B2201/0292 , B81B2207/093 , H01L2224/16225
摘要： A sensing device comprises a substrate having an upper surface, a sensor member, at least an external conductive wire, and a standing-ring member. The sensor member, the external conductive wire and the stand-ring member are on the upper surface. The sensor member is located at the central area on the upper surface, and the standing-ring member surrounds the sensor member. The standing-ring member and the sensor member are electrically connected through the at least an external conductive wire.
摘要翻译：感测装置包括具有上表面的基底，传感器构件，至少外部导电线和驻环构件。传感器构件，外部导电线和支架构件在上表面上。传感器构件位于上表面的中央区域，并且立环构件围绕传感器构件。站立环构件和传感器构件通过至少一个外部导线电连接。

9. 发明授权

US4512170A Process and apparatus for strip flatness and tension measurements 失效
标题翻译：带状平面度和张力测量的工艺和设备
公开(公告)号：US4512170A
公开(公告)日：1985-04-23
申请号：US537868
申请日：1983-09-30
申请人： Yu-Wen Hsu
发明人： Yu-Wen Hsu
IPC分类号： G01B7/34 , B21B1/26 , B21B1/28 , B21B3/00 , B21B37/28 , B21B38/02 , G01B21/30 , B21B37/04 , G01L5/04
CPC分类号： B21B38/02 , B21B1/26 , B21B1/28 , B21B2003/001
摘要： A process and apparatus for on-line measurement of unflatness of hot or cold rolled strip products, wherein the longitudinal bending of a shape roll over which the strip passes provides a measure of the unflatness of the strip. Actual values of force, displacement or bending moment near the ends of the shape roll may be compared to theoretically predicted values for a flat product and for product having various out-of-flatness conditions. Preferably, the shape roll is supported at its ends by two pairs of supports, and the measurements at the supports are used in determining roll bending and then strip unflatness. Other conditions such as off-center strip and asymmetric operation of the rolling mill may also be determined from the measurement.
摘要翻译：用于在线测量热轧或冷轧带材产品的不平整性的方法和装置，其中带材通过的形状辊的纵向弯曲提供条带的不平坦度的量度。可以将形状辊端部附近的力，位移或弯曲力的实际值与平面产品和具有各种不平坦度条件的产品的理论预测值进行比较。优选地，形状辊在其端部由两对支撑件支撑，并且在支撑件处的测量用于确定辊弯曲，然后剥离不平坦度。也可以从测量中确定其它条件，例如偏心条和轧机的不对称操作。

10. 发明授权

US09733269B2 Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame 有权
公开(公告)号：US09733269B2
公开(公告)日：2017-08-15
申请号：US14535022
申请日：2014-11-06
申请人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
发明人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC分类号： G01P15/125 , H01L29/84 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0845 , H01L29/84
摘要： The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.

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