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    • 9. 发明授权
    • Positive-working radiation-sensitive mixture
    • 正面工作的辐射敏感混合物
    • US5783354A
    • 1998-07-21
    • US711016
    • 1996-09-09
    • Reinhold SchwalmDirk FunhoffHorst Binder
    • Reinhold SchwalmDirk FunhoffHorst Binder
    • G03F7/004G03F7/039H01L21/027
    • G03F7/0045G03F7/039Y10S430/106Y10S430/111
    • A positive-working radiation-sensitive mixture essentially consists of (a.sub.1) at least one water-insoluble, organic polymeric binder which contains acid-labile groups and becomes soluble in aqueous alkaline solutions as a result of the action of acid, or (a.sub.2.1) a polymeric binder which is insoluble in water and soluble in aqueous alkaline solutions and (a.sub.2.2) a low molecular weight organic compound whose solubility and aqueous alkaline developer is increased as a result of the action of acid, and (b) at least one organic compound which produces an acid under the action of actinic radiation, and, if required, (c) one or more further organic compounds which differ from (b), at least one of the components (a.sub.1), (a.sub.2.1), (a.sub.2.2), (b) and (c) containing a bonded group of the general formula (I) --O.sup..crclbar. N.sup..sym. R.sub.4, or component (c) being of the formula (II) ##STR1## The radiation-sensitive mixture is suitable for the production of relief structures.
    • 正面工作的辐射敏感混合物基本上由(a1)至少一种含有酸不稳定基团的水不溶性有机聚合物粘合剂组成,并且由于酸的作用而变得可溶于碱性水溶液,或(a2)。 1)聚合物粘合剂,其不溶于水并且可溶于碱性水溶液,和(a2.2)由于酸的作用,其溶解度和含水碱性显影剂增加的低分子量有机化合物,和(b)在 至少一种在光化辐射的作用下产生酸的有机化合物,如果需要,(c)一种或多种与(b),至少一种组分(a1),(a2.1)不同的其它有机化合物 )(a)-O( - )N(+)R 4,或(c)成分为式(II)的键合基团的化合物(a2.2),(b)和(c) (II)辐射敏感混合物适用于浮雕结构的生产。