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    • 4. 发明授权
    • Surface analysis using ellipsometry
    • 使用椭偏仪进行表面分析
    • US06453263B1
    • 2002-09-17
    • US09548941
    • 2000-04-13
    • Vittorio SirtoriLorenza LombardiMichele MonopoliFranco Zambon
    • Vittorio SirtoriLorenza LombardiMichele MonopoliFranco Zambon
    • G01B1302
    • G01B11/303G01B11/0641
    • A method and system for estimating the roughness and the contamination of a surface. A preferred embodiment of the present invention makes use of a mathematical model which gives indications of the metal roughness, expressed as the ratio of metal volume to air volume, and the contamination thickness values of a metal substrate (e.g. gold) for a determined contamination (e.g. organic). This model is based on a series of tables which represent the expected values of &psgr;, i.e. the ratio between the amplitudes of the incident beam on the two polarization planes multiplied by the ratio of the amplitudes of the reflected beam on the polarization planes, and &Dgr;, i.e. the difference between the phases on the two polarization planes of the incident beam and the reflected beam, for a gold substrate having a predetermined roughness and a predetermined type of contamination (organic). Each table is built for a roughness value &phgr; expressed as the ratio of metal volume to air volume and gives the values of &psgr; and &Dgr; for a range of possible contaminations expressed as thickness of the contaminant film. Each table shows, for a predetermined value of &phgr;, the expected values of &psgr; and &Dgr; for an organic contaminant film having a thickness of 0, 10 . . . 100 Angstrom.
    • 用于估计表面的粗糙度和污染的方法和系统。 本发明的优选实施例利用一种数学模型,该数学模型给出了金属粗糙度的指示,其表示为金属体积与空气体积的比率以及用于确定的污染物的金属基底(例如金)的污染物厚度值( 例如有机)。 该模型基于一系列表示psi的期望值的表,即在两个偏振面上的入射光束的振幅乘以反射光束在偏振面上的幅度的比率和DELTA 即对于具有预定粗糙度的金基板和预定类型的污染(有机的)的入射光束和反射光束的两个偏振面上的相位之间的差异。 每个表都是用一个表示为金属体积与空气体积的比率的粗糙度值phi构成的,并给出了以污染物膜厚度表示的可能污染范围的psi和DELTA值。 对于预定值的phi,每个表显示厚度为0,10的有机污染膜的psi和DELTA的期望值。 。 。 100埃。