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    • 10. 发明授权
    • Method for making borderless wordline for DRAM cell
    • 为DRAM单元制作无边界字线的方法
    • US6121128A
    • 2000-09-19
    • US398659
    • 1999-09-17
    • Mark C. HakeySteven J. HolmesDavid V. HorakWendell P. Noble, Jr.
    • Mark C. HakeySteven J. HolmesDavid V. HorakWendell P. Noble, Jr.
    • H01L21/8242H01L21/4763
    • H01L27/10873H01L27/10891Y10S257/905Y10S257/907Y10S257/908
    • A semiconductor structure and method of making the same are disclosed which includes a DRAM cell which has a transistor which includes a gate. The gate includes an individual segment of gate conductor such as polysilicon on a thin dielectric material. The transistor further has a single crystal semiconductor substrate having a source/drain region. An active conducting wordline is deposited on top of and electrically contacting a segment gate conductor, the wordline being a conductive material having a top and sidewalls. Electrically insulating material completely surrounds the active wordline except where the active wordline contacts the segment gate conductor. The insulating material surrounding the active wordline includes silicon nitride overlying the top and surrounding a portion of the sidewalls thereof, and silicon dioxide surrounds the remainder of the side walls of the active wordline. A bitline contact contacts the source/drain region and the insulating material surrounding the active wordline to thereby make the bitline contact borderless to the wordline. A fully encased passing wordline is also provided which is spaced from and insulated from the segment gate conductor and the active wordline.
    • 公开了一种半导体结构及其制造方法,其包括具有包括栅极的晶体管的DRAM单元。 栅极包括在薄介电材料上的诸如多晶硅的栅极导体的单独段。 晶体管还具有具有源/漏区的单晶半导体衬底。 主动导电字线沉积在分段栅极导体的顶部并与其电接触,该字线是具有顶部和侧壁的导电材料。 电绝缘材料完全围绕有源字线,除了有源字线接触分段栅极导体之外。 围绕有源字线的绝缘材料包括覆盖顶部并且围绕其侧壁的一部分的氮化硅,并且二氧化硅围绕有源字线的侧壁的其余部分。 位线触点接触源极/漏极区域和围绕有源字线的绝缘材料,从而使位线接触到字线。 还提供了完全封装的通过字线,其与分段栅极导体和有源字线间隔开并与之隔绝。