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1. 发明授权

US08415884B2 Stable surface wave plasma source 有权
标题翻译：稳定的表面波等离子体源
公开(公告)号：US08415884B2
公开(公告)日：2013-04-09
申请号：US12555080
申请日：2009-09-08
申请人： Lee Chen , Jianping Zhao , Ronald V. Bravenec , Merritt Funk
发明人： Lee Chen , Jianping Zhao , Ronald V. Bravenec , Merritt Funk
IPC分类号： H05B31/26
CPC分类号： H05H1/46 , H01J37/32192 , H01J37/3222 , H01L21/67005 , H01Q13/10
摘要： A surface wave plasma (SWP) source is described. The SWP source comprises an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave launcher adjacent the plasma. The EM wave launcher comprises a slot antenna having a plurality of slots. The SWP source further comprises a first recess configuration formed in the plasma surface, wherein the first recess configuration is substantially aligned with a first arrangement of slots in the plurality of slots, and a second recess configuration formed in the plasma surface, wherein the second recess configuration is either partly aligned with a second arrangement of slots in the plurality of slots or not aligned with the second arrangement of slots in the plurality of slots. A power coupling system is coupled to the EM wave launcher and configured to provide the EM energy to the EM wave launcher for forming the plasma.
摘要翻译：描述了表面波等离子体（SWP）源。 SWP源包括电磁（EM）波发射器，其被配置为通过在邻近等离子体的EM波发射器的等离子体表面上产生表面波来将期望的EM波模式中的EM能量耦合到等离子体。 EM波发射器包括具有多个槽的缝隙天线。 SWP源还包括形成在等离子体表面中的第一凹陷构型，其中第一凹槽构型基本上与多个槽中的槽的第一布置对准，以及形成在等离子体表面中的第二凹槽构型，其中第二凹槽配置部分地与多个槽中的槽的第二布置部分对准或者不与多个槽中的槽的第二布置对准。功率耦合系统耦合到EM波发射器并且被配置为向用于形成等离子体的EM波发射器提供EM能量。

2. 发明授权

US09111727B2 Plasma tuning rods in microwave resonator plasma sources 有权
标题翻译：微波谐振器等离子体源中的等离子体调谐棒
公开(公告)号：US09111727B2
公开(公告)日：2015-08-18
申请号：US13249560
申请日：2011-09-30
申请人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihiko Iwao , Peter L.G. Ventzek
发明人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihiko Iwao , Peter L.G. Ventzek
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01J37/32
CPC分类号： H01J37/32256 , H01J37/32247 , H01J37/32935 , H01L22/00
摘要： The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.
摘要翻译：本发明提供了多个谐振器子系统。谐振器子系统可以包括一个或多个谐振腔，其被配置为通过在与等离子体相邻的谐振腔中产生谐振微波能量将所期望的EM波模式中的电磁（EM）能量耦合到等离子体。谐振器子系统可以使用一个或多个接口子系统耦合到处理室，并且可以包括一个或多个谐振腔，并且每个谐振腔可以具有耦合到其上的多个等离子体调谐棒。一些等离子体调谐杆可被配置成将EM能量从一个或多个谐振腔耦合到处理室内的处理空间。

3. 发明授权

US08721833B2 Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof 有权
标题翻译：包含铁电材料的可变电容室部件及其制造和使用方法
公开(公告)号：US08721833B2
公开(公告)日：2014-05-13
申请号：US13366341
申请日：2012-02-05
申请人： Zhiying Chen , Jianping Zhao , Lee Chen , Merritt Funk , Radha Sundararajan
发明人： Zhiying Chen , Jianping Zhao , Lee Chen , Merritt Funk , Radha Sundararajan
IPC分类号： H01L21/306
CPC分类号： H01J37/32495 , H01J37/32504
摘要： A replaceable chamber element for use in a plasma processing system, such as a plasma etching system, is described. The replaceable chamber element includes a chamber component configured to be exposed to plasma in a plasma processing system, wherein the chamber component is fabricated of a ferroelectric material.
摘要翻译：描述了用于诸如等离子体蚀刻系统的等离子体处理系统中的可替换室元件。可替换室元件包括腔室部件，其被构造成在等离子体处理系统中暴露于等离子体，其中室部件由铁电材料制成。

4. 发明授权

US08847159B2 Ion energy analyzer 有权
标题翻译：离子能量分析仪
公开(公告)号：US08847159B2
公开(公告)日：2014-09-30
申请号：US13433071
申请日：2012-03-28
申请人： Lee Chen , Barton Lane , Merritt Funk , Jianping Zhao , Radha Sundararajan
发明人： Lee Chen , Barton Lane , Merritt Funk , Jianping Zhao , Radha Sundararajan
IPC分类号： G01T1/185 , H01J49/48 , H01J37/32 , H05H1/00
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： An ion energy analyzer for determining an ion energy distribution of a plasma and comprising an entrance grid, a selection grid, and an ion collector. The entrance grid includes a first plurality of openings dimensioned to be less than a Debye length for the plasma. The ion collector is coupled to the entrance grid via a first voltage source. The selection grid is positioned between the entrance grid and the ion collector and is coupled to the entrance grid via a second voltage source. An ion current meter is coupled to the ion collector to measure an ion flux onto the ion collector and transmit a signal related thereto.
摘要翻译：一种用于确定等离子体的离子能量分布并包括入口格栅，选择栅格和离子收集器的离子能量分析器。入口格栅包括尺寸小于等离子体的德拜长度的第一多个开口。离子收集器通过第一电压源耦合到入口电网。选择网格位于入口格栅和离子收集器之间，并通过第二电压源耦合到入口格栅。离子电流计耦合到离子收集器以测量离子收集器上的离子通量并传输与其相关的信号。

5. 发明申请

US20120248311A1 ION ENERGY ANALYZER AND METHODS OF MANUFACTURING THE SAME 有权
标题翻译：离子能分析仪及其制造方法
公开(公告)号：US20120248311A1
公开(公告)日：2012-10-04
申请号：US13433088
申请日：2012-03-28
申请人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
发明人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
IPC分类号： G01T1/16 , B23K31/02 , H01S4/00
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： A process by which an ion energy analyzer is manufactured includes processing a first substrate to form an entrance grid having a first channel and a first plurality of openings extending therethrough. A second substrate is processed to form a selection grid having a second channel therein and a second plurality of openings extending therethrough. A third substrate is processed to form an ion collector having a third channel therein. The entrance grid is operably coupled to, and electrically isolated from, the selection grid, which is, in turn, operably coupled to, and electrically isolated from, the ion collector.
摘要翻译：制造离子能量分析器的过程包括处理第一基底以形成具有第一通道和延伸穿过其中的第一多个开口的入口格栅。处理第二衬底以形成其中具有第二通道的选择栅格和延伸穿过其中的第二多个开口。处理第三衬底以形成其中具有第三通道的离子收集器。入口栅格可操作地耦合到选择栅格并与之电隔离，所述选择栅格又可操作地耦合到离子收集器并与电离隔离。

6. 发明申请

US20110039355A1 Plasma Generation Controlled by Gravity-Induced Gas-Diffusion Separation (GIGDS) Techniques 有权
标题翻译：通过重力诱导气体扩散分离（GIGDS）技术控制的等离子体发生
公开(公告)号：US20110039355A1
公开(公告)日：2011-02-17
申请号：US12853771
申请日：2010-08-10
申请人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihisa Nozawa
发明人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihisa Nozawa
IPC分类号： H01L21/66
CPC分类号： H01J37/3244 , H01J37/32192 , H01L21/31116 , H01L21/32137
摘要： The invention can provide apparatus and methods of processing a substrate using plasma generation by gravity-induced gas-diffusion separation techniques. By adding or using gases including inert and process gases with different gravities (i.e., ratio between the molecular weight of a gaseous constituent and a reference molecular weight), a two-zone or multiple-zone plasma can be formed, in which one kind of gas can be highly constrained near a plasma generation region and another kind of gas can be largely separated from the aforementioned gas due to differential gravity induced diffusion and is constrained more closer to a wafer process region than the aforementioned gas.
摘要翻译：本发明可以提供使用通过重力引起的气体扩散分离技术的等离子体生成来处理衬底的装置和方法。通过添加或使用气体，包括不同重量的惰性气体和工艺气体（即气态成分的分子量与参考分子量之间的比例），可以形成两区或多区等离子体，其中一种气体可以在等离子体产生区域附近被高度约束，并且由于差分重力感应扩散，另一种气体可以与上述气体大大分离，并且比上述气体更受限于更接近于晶片工艺区域。

7. 发明授权

US08816281B2 Ion energy analyzer and methods of manufacturing the same 有权
标题翻译：离子能量分析仪及其制造方法
公开(公告)号：US08816281B2
公开(公告)日：2014-08-26
申请号：US13433088
申请日：2012-03-28
申请人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
发明人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
IPC分类号： G01T1/16 , H01J37/32 , H05H1/00 , H01J49/48
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： A process by which an ion energy analyzer is manufactured includes processing a first substrate to form an entrance grid having a first channel and a first plurality of openings extending therethrough. A second substrate is processed to form a selection grid having a second channel therein and a second plurality of openings extending therethrough. A third substrate is processed to form an ion collector having a third channel therein. The entrance grid is operably coupled to, and electrically isolated from, the selection grid, which is, in turn, operably coupled to, and electrically isolated from, the ion collector.
摘要翻译：制造离子能量分析器的过程包括处理第一基底以形成具有第一通道和延伸穿过其中的第一多个开口的入口格栅。处理第二衬底以形成其中具有第二通道的选择栅格和延伸穿过其中的第二多个开口。处理第三衬底以形成其中具有第三通道的离子收集器。入口栅格可操作地耦合到选择栅格并与之电隔离，所述选择栅格又可操作地耦合到离子收集器并与电离隔离。

8. 发明授权

US08323521B2 Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques 有权
标题翻译：通过重力诱导的气体扩散分离（GIGDS）技术控制的等离子体发生
公开(公告)号：US08323521B2
公开(公告)日：2012-12-04
申请号：US12853771
申请日：2010-08-10
申请人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihisa Nozawa
发明人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihisa Nozawa
IPC分类号： H01L21/66
CPC分类号： H01J37/3244 , H01J37/32192 , H01L21/31116 , H01L21/32137
摘要： The invention can provide apparatus and methods of processing a substrate using plasma generation by gravity-induced gas-diffusion separation techniques. By adding or using gases including inert and process gases with different gravities (i.e., ratio between the molecular weight of a gaseous constituent and a reference molecular weight), a two-zone or multiple-zone plasma can be formed, in which one kind of gas can be highly constrained near a plasma generation region and another kind of gas can be largely separated from the aforementioned gas due to differential gravity induced diffusion and is constrained more closer to a wafer process region than the aforementioned gas.
摘要翻译：本发明可以提供使用通过重力引起的气体扩散分离技术的等离子体生成来处理衬底的装置和方法。通过添加或使用气体，包括不同重量的惰性气体和工艺气体（即气态成分的分子量与参考分子量之间的比例），可以形成两区或多区等离子体，其中一种气体可以在等离子体产生区域附近被高度约束，并且由于差分重力感应扩散，另一种气体可以与上述气体大大分离，并且比上述气体更受限于更接近于晶片工艺区域。

9. 发明申请

US20120248322A1 METHODS OF ELECTRICAL SIGNALING IN AN ION ENERGY ANALYZER 有权
标题翻译：离子能量分析仪中电子信号的方法
公开(公告)号：US20120248322A1
公开(公告)日：2012-10-04
申请号：US13433078
申请日：2012-03-28
申请人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
发明人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
IPC分类号： G01T1/185
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： A method of generating a signal representing with an ion energy analyzer for use in determining an ion energy distribution of a plasma. The ion energy analyzer, used for determining an ion energy distribution of a plasma, includes a first grid and a second grid that is spaced away from and electrically isolated from the first grid. The first grid forms a first surface of the ion energy analyzer and is positioned to be exposed to the plasma. The first grid includes a first plurality of openings, which are dimensioned to be less than a Debye length for the plasma. A voltage source and an ion current meter are operably coupled to the second grid, the latter of which is configured to measure an ion flux onto the ion collector and to transmit a signal that represents the measured ion flux. The method includes selectively and variably biasing the second grid relative to the first grid.
摘要翻译：一种产生用离子能分析仪表示的信号的方法，用于确定等离子体的离子能量分布。用于确定等离子体的离子能量分布的离子能量分析器包括与第一格栅隔开并与之隔离的第一格栅和第二栅格。第一栅格形成离子能量分析器的第一表面并定位成暴露于等离子体。第一栅格包括第一多个开口，其尺寸被设计成小于等离子体的德拜长度。电压源和离子电流计可操作地耦合到第二栅极，第二栅极被配置为测量离子收集器上的离子通量并传输表示所测量的离子通量的信号。该方法包括相对于第一格栅选择性地和可变地偏置第二格栅。

10. 发明授权

US09087677B2 Methods of electrical signaling in an ion energy analyzer 有权
标题翻译：离子能量分析仪中电信号的方法
公开(公告)号：US09087677B2
公开(公告)日：2015-07-21
申请号：US13433078
申请日：2012-03-28
申请人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
发明人： Merritt Funk , Lee Chen , Barton Lane , Jianping Zhao , Radha Sundararajan
IPC分类号： H01J3/14 , H01J37/32 , H01J49/48 , H05H1/00
CPC分类号： H01J37/32935 , H01J49/488 , H05H1/0081 , Y10T29/49002
摘要： A method of generating a signal representing with an ion energy analyzer for use in determining an ion energy distribution of a plasma. The ion energy analyzer, used for determining an ion energy distribution of a plasma, includes a first grid and a second grid that is spaced away from and electrically isolated from the first grid. The first grid forms a first surface of the ion energy analyzer and is positioned to be exposed to the plasma. The first grid includes a first plurality of openings, which are dimensioned to be less than a Debye length for the plasma. A voltage source and an ion current meter are operably coupled to the second grid, the latter of which is configured to measure an ion flux onto the ion collector and to transmit a signal that represents the measured ion flux. The method includes selectively and variably biasing the second grid relative to the first grid.
摘要翻译：一种产生用离子能量分析仪表示的用于确定等离子体的离子能量分布的信号的方法。用于确定等离子体的离子能量分布的离子能量分析器包括与第一格栅隔开并与之隔离的第一格栅和第二栅格。第一栅格形成离子能量分析器的第一表面并定位成暴露于等离子体。第一栅格包括第一多个开口，其尺寸被设计成小于等离子体的德拜长度。电压源和离子电流计可操作地耦合到第二栅极，第二栅极被配置为测量离子收集器上的离子通量并传输表示所测量的离子通量的信号。该方法包括相对于第一格栅选择性地和可变地偏置第二格栅。

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