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1. 发明授权

US5271516A Isolation structure for contamination sensitive items 失效
标题翻译：污染敏感项目的隔离结构
公开(公告)号：US5271516A
公开(公告)日：1993-12-21
申请号：US950110
申请日：1992-09-24
申请人： Lawrence G. Cook , Robert F. Florence, Jr. , Gary M. Gallagher , Gordon E. Johnson , Robert W. Sargent
发明人： Lawrence G. Cook , Robert F. Florence, Jr. , Gary M. Gallagher , Gordon E. Johnson , Robert W. Sargent
IPC分类号： B65D8/18 , B65D81/18 , B65D81/20 , B65D85/57 , B65D85/86 , F16J13/02 , F16J15/46 , H01L21/673 , F16L55/00
CPC分类号： B65D81/18 , F16J13/02 , F16J15/46 , Y02W30/807
摘要： A reusable isolation structure features an easily cleanable shell having viewing windows formed therein, each protected by a framing ridge or a recess integrally formed in the shell provides protection of contents from contamination, impact, vibration and tampering. Framing ridges or recesses also facilitate stacking of shells. The closure member opening of the shell includes a groove formed around the periphery thereof and is preferably not more than slightly smaller than an interior cross-section of the shell. A door of the isolation structure is dimensioned to fit within the closure member opening and has a resilient seal clamped to the periphery of a backbone by front and rear plates. The front and rear plates cooperate with grooves formed in the backbone to define a preferred form of manifold for coupling pressure or a vacuum to the interior of the resilient seal whereby the resilient seal may be collapsed to allow removal of the door or allowed to expand or pressurized to provide secure closure. Filters and vapor and moisture drains are carried by the door structure. The door also provides a smooth interior surface of the isolation structure of closely controlled and accurately repeatable dimensions. A vacuum plate for handling the door simultaneously provides for evacuation and controlled collapse of the resilient seal as well as containment of contamination of the exterior thereof.

2. 发明授权

US5291923A Door opening system and method 失效
标题翻译：开门系统及方法
公开(公告)号：US5291923A
公开(公告)日：1994-03-08
申请号：US949960
申请日：1992-09-24
申请人： Gary M. Gallagher , Gordon E. Johnson
发明人： Gary M. Gallagher , Gordon E. Johnson
IPC分类号： B65D8/18 , B65D81/20 , B65D85/57 , B65D85/86 , F16J15/46 , H01L21/673 , B65B3/00 , H05K1/00
CPC分类号： H01L21/67376 , F16J15/46
摘要： A reusable isolation structure features an easily cleanable shell. The opening of the shell includes a groove formed around the periphery thereof and is preferably not more than slightly smaller than an interior cross-section of the shell. A closure member (door) of the isolation structure is dimensioned to fit within the opening and has a resilient seal member clamped to the periphery of a backbone by front and rear plates. The front and rear plates cooperate with grooves formed in the backbone to define a preferred form of manifold for coupling pressure or a vacuum to the interior of the resilient seal member whereby the resilient seal member may be collapsed to allow removal of the closure member or allowed to expand or pressurized to provide secure closure member. A vacuum structure for handling the closure member simultaneously provides for evacuation and controlled collapse of the resilient seal member as well as containment of contamination of the exterior thereof.
摘要翻译：可重复使用的隔离结构具有易于清洁的外壳。壳的开口包括围绕其周边形成的凹槽，优选地不大于稍小于壳体的内部横截面。隔离结构的封闭构件（门）的尺寸设计成装配在开口内，并且具有通过前板和后板夹紧到骨架周边的弹性密封构件。前板和后板与形成在骨架中的凹槽配合以限定用于将压力或真空耦合到弹性密封构件内部的优选形式的歧管，由此弹性密封构件可能被折叠以允许移除闭合构件或允许以膨胀或加压以提供安全的封闭构件。用于处理封闭构件的真空结构同时提供弹性密封构件的排空和可控制的塌陷以及容纳其外部污染物。

3. 发明授权

US06187182B1 Filter cartridge assembly for a gas purging system 失效
标题翻译：用于气体净化系统的滤芯组件
公开(公告)号：US06187182B1
公开(公告)日：2001-02-13
申请号：US09127278
申请日：1998-07-31
申请人： Gerald D. Reynolds , Gary M. Gallagher , John Burns , Mark V. Smith
发明人： Gerald D. Reynolds , Gary M. Gallagher , John Burns , Mark V. Smith
IPC分类号： B01D5100
CPC分类号： B01D46/10 , B01D46/0004 , B01D46/0087 , F16K15/026 , Y10T137/7931 , Y10T137/7936
摘要： The filter cartridge assembly has a valve body having an interior flow passage, a filter across the interior flow passage, and a check valve assembly in the valve body. The filter removes particulates as small as 0.003 microns. A check valve element adjacent to a valve seat in the interior flow passage has a check valve poppet and a stem. The check valve poppet has a relatively narrow neck, and the check valve poppet is tapered inwardly from the outlet end toward the neck at an oblique angle relative to the longitudinal axis of the valve body that is substantially equal to the oblique angle of the annular valve seat.
摘要翻译：滤芯组件具有阀体，其具有内部流动通道，穿过内部流动通道的过滤器和阀体中的止回阀组件。过滤器去除小至0.003微米的微粒。与内部流路中的阀座相邻的止回阀元件具有止回阀提升阀和阀杆。止回阀提升阀具有相对窄的颈部，并且止回阀提升阀从出口端向颈部以相对于阀体的纵向轴线倾斜的角度向内渐缩，该角度基本上等于环形阀的倾斜角度座位。

4. 发明授权

US06663148B2 System for preventing improper insertion of FOUP door into FOUP 有权
公开(公告)号：US06663148B2
公开(公告)日：2003-12-16
申请号：US10020761
申请日：2001-12-13
申请人： Anthony C. Bonora , Gary M. Gallagher , Michael Ng
发明人： Anthony C. Bonora , Gary M. Gallagher , Michael Ng
IPC分类号： E05C106
CPC分类号： H01L21/67373 , Y10S292/12 , Y10T292/0964
摘要： An apparatus for preventing improper engagement of a pod door and a pod. Specifically, misalignment of at least one latch finger connected t the pod door with latch engagement slots in the pod prevents a pod door from mechanically engaging a pod.

5. 发明授权

US5755332A Enclosed sealable purgible semiconductor wafer holder 失效
公开(公告)号：US5755332A
公开(公告)日：1998-05-26
申请号：US712140
申请日：1996-09-11
申请人： James E. Holliday , Gary M. Gallagher
发明人： James E. Holliday , Gary M. Gallagher
IPC分类号： B65D85/00 , B65D85/86 , H01L21/673 , B65D85/42
CPC分类号： H01L21/67294 , H01L21/67376 , H01L21/67393 , Y10S414/138
摘要： An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.

6. 发明授权

US5472086A Enclosed sealable purgible semiconductor wafer holder 失效
标题翻译：封闭的可密封可变半导体晶片支架
公开(公告)号：US5472086A
公开(公告)日：1995-12-05
申请号：US209227
申请日：1994-03-11
申请人： James E. Holliday , Gary M. Gallagher
发明人： James E. Holliday , Gary M. Gallagher
IPC分类号： B65D85/00 , B65D85/86 , H01L21/673 , B65D85/42
CPC分类号： H01L21/67294 , H01L21/67376 , H01L21/67393 , Y10S414/138
摘要： An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.
摘要翻译：描述了封闭的半导体晶片保持器和提供简单，低成本和非突出的半导体晶片的隔离控制的盖。所述盖包括密封周边，当与所述半导体晶片保持器接合时，产生气密密封。保持器还包括附接到保持器的清洗装置，其允许惰性气体主动地缓和吹入密封的半导体晶片保持器。

7. 发明授权

US5452795A Actuated rotary retainer for silicone wafer box 失效
标题翻译：硅胶晶圆盒的旋转保持器
公开(公告)号：US5452795A
公开(公告)日：1995-09-26
申请号：US334949
申请日：1994-11-07
申请人： Gary M. Gallagher , Boyd C. Wittman
发明人： Gary M. Gallagher , Boyd C. Wittman
IPC分类号： H01L21/673 , B65D85/00 , B65D85/48
CPC分类号： H01L21/67369
摘要： A semi-conductor transport container is described, which includes a box, a door and an actuated rotary retainer attached to the sidewall of the box to thereby prevent movement of the wafers within a wafer cassette during transportation and storage. The rotary retainer includes flexible fingers that apply a slight force against the wafers when the box is engaged with the box. The rotary retainer is simple, requires less moving parts, and rotates automatically, completely away from the wafers when the box is disengaged from the door. Also, the box seals with the door, when engaged with a door, thereby creating a particle free storage area.
摘要翻译：描述了半导体运输容器，其包括附接到箱的侧壁的盒，门和致动的旋转保持器，从而防止在运输和存储期间晶片在晶片盒内的移动。旋转保持器包括柔性指状物，当盒子与盒子接合时，该指状物对晶片施加小的力。旋转保持器简单，需要较少的移动部件，并且当盒子与门脱开时，自动旋转，完全远离晶片。此外，当与门接合时，盒子与门密封，从而产生无颗粒的存储区域。

8. 发明授权

US5295522A Gas purge system for isolation enclosure for contamination sensitive items 失效
标题翻译：用于污染敏感物品的隔离外壳的气体净化系统
公开(公告)号：US5295522A
公开(公告)日：1994-03-22
申请号：US949959
申请日：1992-09-24
申请人： Robert L. DeAngelis , Gary M. Gallagher
发明人： Robert L. DeAngelis , Gary M. Gallagher
IPC分类号： B65B55/00 , B65D8/18 , B65D81/20 , B65D85/57 , B65D85/86 , H01L21/02 , H01L21/673 , B65B1/04 , H05K1/00
CPC分类号： H01L21/67376 , Y10S414/139
摘要： A reusable isolation enclosure has a closure member adapted for purging gases from the enclosure. The closure member includes filters and vapor and moisture drains. Replacement of ambient environmental gases in the sealed enclosure is provided. A purge gas is provided by the gas replacement system which quickly connects to the enclosure and quickly disconnects from the enclosure. Suction cups surrounding the ends of gas connection lines form the interface to the filter membrane and form a sealed connection with the closure member. No other mechanical connection than the suction cups is required. The outlets and inlets of the purging system and the exhausting system are automatically disconnected by a spring valve when the isolation container to be purged is removed. When the closure member of the isolation enclosure is placed upon the purge system the weight of the package compresses the valve spring opening the valves, permitting the purge gas to flow. An empty isolation enclosure has insufficient weight to open the spring actuated valve system. Only enclosures carrying the weight of a product are purged. A flow indicator for measuring the rate of flow of gas through the quick connection means is connected thereto.
摘要翻译：可重复使用的隔离外壳具有适于从外壳吹扫气体的封闭构件。封闭构件包括过滤器和蒸汽和水分排水管。提供了更换密封外壳中的周围环境气体。吹扫气体由气体更换系统提供，其快速连接到外壳并且快速地与外壳断开连接。围绕气体连接管线的端部的吸入杯形成与过滤膜的接口，并与封闭构件形成密封连接。不需要除吸盘外的其他机械连接。当要清除的隔离容器被移除时，清洗系统和排气系统的出口和进口将被弹簧阀自动断开。当隔离罩的封闭构件放置在吹扫系统上时，该包装件的重量压缩打开阀的阀弹簧，允许净化气体流动。一个空的隔离外壳没有足够的重量来打开弹簧启动的阀门系统。只有携带产品重量的外壳才被清除。用于测量通过快速连接装置的气体流量的流量指示器被连接到其上。

9. 外观设计

USD376688S Semiconductor wafer cassette transport box 失效
公开(公告)号：USD376688S
公开(公告)日：1996-12-24
申请号：US32529
申请日：1994-12-20
申请人： Gary M. Gallagher , Boyd C. Wittman , Edmund B. Neumann
设计人： Gary M. Gallagher , Boyd C. Wittman , Edmund B. Neumann

10. 外观设计

USD368802S 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment 失效
公开(公告)号：USD368802S
公开(公告)日：1996-04-16
申请号：US29711
申请日：1994-10-13
申请人： Gary M. Gallagher , Brian S. Wiseman , Boyd C. Wittman
设计人： Gary M. Gallagher , Brian S. Wiseman , Boyd C. Wittman

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