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    • 1. 发明授权
    • Detecting surface pits
    • 检测表面凹坑
    • US07295300B1
    • 2007-11-13
    • US11237257
    • 2005-09-28
    • Laurie BechtlerVamsi VelidandlaSteven W. Meeks
    • Laurie BechtlerVamsi VelidandlaSteven W. Meeks
    • G01N21/00
    • G01N21/9501G01N21/94G01N21/9503G01N2021/218
    • A system to detect pits in a surface comprises first and second radiation targeting assemblies to target a second radiation beam onto a surface, a first radiation collecting assembly that collects radiation scattered from the surface, a processor coupled to the first radiation collecting assembly, a memory module coupled to the processor and comprising logic instructions which, when executed by the processor, configure the processor to generate a first signal from radiation scattered from the first radiation beam, generate a second signal from radiation scattered from the second radiation beam, record the first signal and the second signal at an array of different positions on the surface, calculate a median value for the first signal and the second signal over the array of different positions on the surface, and use the first signal, the second signal, and the median value to detect pits in the surface.
    • 用于检测表面中的凹坑的系统包括将第二辐射束瞄准到表面上的第一和第二辐射瞄准组件,收集从表面散射的辐射的第一辐射收集组件,耦合到第一辐射收集组件的处理器,存储器 模块,其耦合到所述处理器并且包括逻辑指令,所述逻辑指令在被所述处理器执行时配置所述处理器以从所述第一辐射束散射的辐射生成第一信号,从所述第二辐射束散射的辐射产生第二信号, 信号和表面上不同位置的阵列上的第二信号,计算表面上不同位置阵列上的第一信号和第二信号的中值,并使用第一信号,第二信号和中值 值以检测表面中的凹坑。