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1. 发明授权

US06270580B1 Modified material deposition sequence for reduced detect densities in semiconductor manufacturing 有权
公开(公告)号：US06270580B1
公开(公告)日：2001-08-07
申请号：US09291138
申请日：1999-04-12
申请人： Lan Vu , Dennis C. Swartz , Jeff Watts
发明人： Lan Vu , Dennis C. Swartz , Jeff Watts
IPC分类号： C23C1600
摘要： A method and apparatus for forming high-quality deposited material layers in semiconductor manufacturing are provided. In the method, the initial stages of a deposition are performed with no current flowing through substrate heater filaments. Current is restored to the heater filaments when needed to maintain the substrate within an acceptable range around a target or setpoint temperature. When an on/off temperature controller is used, the method may be implemented without disturbing the normal operation of the controller, by monitoring the heater filament current and beginning a deposition just after the current has been turned off by the controller. Current may also be removed from the heater filaments at the end of the deposition, so that concentrations of deposition species may equilibrate without the presence of heater currents. Performing as much of the deposition as possible with the substrate heater current off is believed to reduce defect formation which may be associated with magnetic fields and outgassing resulting from heater filament operation. A substrate heater design is provided in which heater filaments are eliminated and the substrate is heated using a heated, circulating fluid.

2. 发明申请

US20060230446A1 Hybrid SSL/IPSec network management system 审中-公开
标题翻译：混合SSL / IPSec网络管理系统
公开(公告)号：US20060230446A1
公开(公告)日：2006-10-12
申请号：US11100304
申请日：2005-04-06
申请人： Lan Vu
发明人： Lan Vu
IPC分类号： G06F15/16
CPC分类号： H04L63/0272 , H04L63/166
摘要： System and method for operating, via the Internet, a distributed network in which an SSL VPN is employed to establish and manage an IPSec VPN. During network creation, an SSL VPN is first established between a master server and each node. Using a common routing table and a common SSL key table maintained by the master server, each node may selectively establish an IPSec VPN with other nodes. Once established, each node maintains a respective segment of a distributed IPSec key table. Periodically, each client and each server, other than the master server, cooperates with the master server to refresh the master and local copies of the common routing and common SSL key tables, and the local segment of the distributed IPSec key table. In the event a change has occurred in either the routing or key information for any server, all pending IPSec VPN connections with that server must be reestablished, using the information in the refreshed local copies of the common routing and common SSL key tables The master server controls the network configuration by assigning to each node permissible IPSec connections. By updating and maintaining copies of the common routing and common SSL key tables at multiple nodes in the network, and local segments of the distributed IPSec key table, the network can quickly recover and rebuild itself in the event that an SSL or IPSec connection with any node is lost.
摘要翻译：通过因特网操作一个使用SSL VPN建立和管理IPSec VPN的分布式网络的系统和方法。在网络创建过程中，首先在主服务器和每个节点之间建立SSL VPN。使用由主服务器维护的公共路由表和公共SSL密钥表，每个节点可以选择性地与其他节点建立IPSec VPN。一旦建立，每个节点维护分布式IPSec密钥表的相应段。定期地，除了主服务器之外，每个客户端和每个服务器与主服务器配合来刷新公共路由和普通SSL密钥表以及分布式IPSec密钥表的本地段的主和本地副本。如果任何服务器的路由或密钥信息发生更改，则必须重新建立与该服务器的所有未决IPSec VPN连接，使用公用路由和公用SSL密钥表刷新的本地副本中的信息主服务器通过为每个节点分配允许的IPSec连接来控制网络配置。通过在网络中的多个节点以及分布式IPSec密钥表的本地段更新和维护普通路由和普通SSL密钥表的副本，网络可以在与任何一个SSL或IPSec连接的SSL或IPSec连接的情况下快速恢复和重建节点丢失。

3. 发明申请

US20070233874A1 System and method for multi-tier multi-casting over the Internet 审中-公开
标题翻译：通过互联网进行多层多播的系统和方法
公开(公告)号：US20070233874A1
公开(公告)日：2007-10-04
申请号：US11809582
申请日：2007-05-31
申请人： Lan Vu
发明人： Lan Vu
IPC分类号： G06F15/173
CPC分类号： H04L65/4076 , H04L12/1854 , H04L12/1868 , H04L12/1881 , H04L29/06027 , H04L69/329
摘要： System and method adapted to multi-cast over the Internet using multiple tiers of servers. Preferably, the content server transmits content to servers in the next lower tier, which may include one or more client servers, using multi-cast, but may use uni-cast. Preferably, each server in all intermediate tiers transmits content to the servers in the next lower tier, which may include one or more client servers, using multi-cast, but may use uni-cast. Each client server transmits to its clients using multi-cast. The quality of a live cast received by each client server may be improved using the more efficient UDP/IP for downloading the bulk of the content and compensating for the occasional lost segments of data using the more reliable TCP/IP.
摘要翻译：适用于使用多层服务器在Internet上多播的系统和方法。优选地，内容服务器使用多播方式将内容发送到下一个较低层的服务器，其可以包括一个或多个客户端服务器，但可以使用单播。优选地，所有中间层中的每个服务器将内容发送到下一个较低层的服务器，其可以包括使用多播的一个或多个客户端服务器，但可以使用单播。每个客户端服务器使用多播发送给客户端。可以使用更有效的UDP / IP来下载大部分内容并使用更可靠的TCP / IP来补偿偶然丢失的数据段，从而可以提高每个客户端服务器接收到的现场演出的质量。

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