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    • 2. 发明申请
    • METHODS AND APPARATUS FOR OPERATING AN INKJET PRINTING SYSTEM
    • 一种喷墨打印系统的操作方法和装置
    • US20070256709A1
    • 2007-11-08
    • US11741722
    • 2007-04-28
    • QUANYUAN SHANGShinichi KuritaLizhong Sun
    • QUANYUAN SHANGShinichi KuritaLizhong Sun
    • B08B7/04B08B13/00B08B3/08B08B7/00
    • B41J2/1606B41J2/16552B41J2202/03B41J2202/09Y10T29/49
    • The invention provides a method of operating a inkjet printing system that may include a print head parking structure and a print head cleaning station. A print head parking structure may include a solvent and/or nozzle surface treatment bath for inkjet print heads. Print heads may be returned to the print head parking structure after a substrate has been printed, after one or more printing passes, and/or frequently enough to prevent ink from drying on or clogging the print heads. Once sealed within the print head parking structure, the print heads (or a portion thereof) may be dipped in a solvent bath to dissolve or wash away any ink that has been deposited on the print heads. The print heads may be coated with a surface treatment that improves jetting reliability. The print heads may be dried and moved to the print head cleaning station where they may be wiped and pre-jetting may be performed.
    • 本发明提供了一种操作可包括打印头停车结构和打印头清洁站的喷墨打印系统的方法。 打印头停车结构可以包括用于喷墨打印头的溶剂和/或喷嘴表面处理槽。 在印刷一个或多个印刷之后,和/或经常足以防止油墨干燥或堵塞打印头,印刷头可以在印刷基板之后返回打印头停车结构。 一旦密封在打印头停车结构中,打印头(或其一部分)可以浸入溶剂浴中以溶解或洗去已经沉积在打印头上的任何油墨。 打印头可以涂覆有提高喷射可靠性的表面处理。 打印头可以被干燥并移动到打印头清洁站,在那里可以擦拭并且可以进行预喷射。
    • 3. 发明申请
    • METHOD FOR DECHUCKING A SUBSTRATE
    • 用于去除衬底的方法
    • US20070062454A1
    • 2007-03-22
    • US11555981
    • 2006-11-02
    • QUANYUAN SHANGWilliam HarshbargerRobert GreeneIchiro Shimizu
    • QUANYUAN SHANGWilliam HarshbargerRobert GreeneIchiro Shimizu
    • C23F1/00C23C16/00
    • H01L21/68742C23C16/458
    • A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.
    • 提供了一种用于对基板进行脱扣的基板支撑组件和方法。 在一个实施例中,支撑组件包括具有支撑表面的基板支撑件,第一组提升销和可移动地设置穿过基板支撑件的一个或多个其他提升销。 当销处于致动位置时,第一组提升销和一个或多个提升销从支撑表面突出。 当处于致动位置时,第一组提升销与支撑表面比一个或多个其他提升销突出较长的距离。 在本发明的另一方面,提供了一种用于从基板支撑件去除基板的方法。 在一个实施例中,该方法包括以下步骤:将第一组提升销投影在衬底支撑件的表面之上的第一距离处,并且将第二组提升销投影在衬底支撑件的表面上方的第二距离处,该第二组提升销小于 第一个距离。