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    • 1. 发明申请
    • Silicon-Based Light Emitting Diode for Enhancing Light Extraction Efficiency and Method of Fabricating the Same
    • 用于提高光提取效率的硅基发光二极管及其制造方法
    • US20080303018A1
    • 2008-12-11
    • US12096764
    • 2006-03-14
    • Kyung Hyun KimNae Man ParkChul HuhTae Youb KimJae Heon ShinKwan Sik ChoGun Yong Sung
    • Kyung Hyun KimNae Man ParkChul HuhTae Youb KimJae Heon ShinKwan Sik ChoGun Yong Sung
    • H01L29/06H01L21/00
    • H01L33/44H01L33/10H01L33/20H01L33/22H01L33/34H01L33/38H01L2933/0091
    • Due to the indirect transition characteristic of silicon semiconductors, the light extraction efficiency of a silicon-based light emitting diode is lower than that of a compound semiconductor-based light emitting diode. For this reason, there are difficulties in practically using and commercializing silicon-based light emitting diodes developed so far. Provided is a silicon-based light emitting including: a substrate with a lower electrode layer on a lower surface thereof; a lower doped layer that is formed on an upper surface of the substrate and supplies carriers to an emitting layer; the emitting layer that is a silicon semiconductor layer including silicon quantum dots or nanodots formed on the lower doped layer and has a light-emitting characteristic; an upper doped layer that is formed on the emitting layer and supplies carriers to the emitting layer; an upper electrode layer formed on the upper doped layer; and a surface structure including a surface pattern formed on the upper electrode layer, a surface structure including an upper electrode pattern and an upper doped pattern formed by patterning the upper electrode layer and the upper doped layer, or a surface structure including the surface pattern, the upper electrode pattern, and upper doped pattern, wherein the surface structure enhances the light extraction efficiency of light emitted from the emitting layer according to geometric optics.
    • 由于硅半导体的间接跃迁特性,硅基发光二极管的光提取效率低于基于化合物半导体的发光二极管的光提取效率。 因此,实际上使用和商业化目前为止开发的硅基发光二极管存在困难。 本发明提供一种硅基发光体,具有:下表面具有下电极层的基板; 下部掺杂层,其形成在所述衬底的上表面上并将载体提供给发光层; 所述发光层是包含形成在所述下掺杂层上的硅量子点或纳米点的具有发光特性的硅半导体层; 上部掺杂层,其形成在所述发光层上并将载流子提供给所述发光层; 形成在上掺杂层上的上电极层; 以及包括形成在上电极层上的表面图案的表面结构,包括通过图案化上电极层和上掺杂层形成的上电极图案和上掺杂图案的表面结构,或包括表面图案的表面结构, 上电极图案和上掺杂图案,其中表面结构根据几何光学增强了从发光层发射的光的光提取效率。
    • 2. 发明授权
    • Silicon-based light emitting diode for enhancing light extraction efficiency and method of fabricating the same
    • 用于提高光提取效率的硅基发光二极管及其制造方法
    • US07772587B2
    • 2010-08-10
    • US12096764
    • 2006-03-14
    • Kyung Hyun KimNae Man ParkChul HuhTae Youb KimJae Heon ShinKwan Sik ChoGun Yong Sung
    • Kyung Hyun KimNae Man ParkChul HuhTae Youb KimJae Heon ShinKwan Sik ChoGun Yong Sung
    • H01L29/06H01L21/00
    • H01L33/44H01L33/10H01L33/20H01L33/22H01L33/34H01L33/38H01L2933/0091
    • Due to the indirect transition characteristic of silicon semiconductors, the light extraction efficiency of a silicon-based light emitting diode is lower than that of a compound semiconductor-based light emitting diode. For this reason, there are difficulties in practically using and commercializing silicon-based light emitting diodes developed so far. Provided is a silicon-based light emitting including: a substrate with a lower electrode layer on a lower surface thereof; a lower doped layer that is formed on an upper surface of the substrate and supplies carriers to an emitting layer; the emitting layer that is a silicon semiconductor layer including silicon quantum dots or nanodots formed on the lower doped layer and has a light-emitting characteristic; an upper doped layer that is formed on the emitting layer and supplies carriers to the emitting layer; an upper electrode layer formed on the upper doped layer; and a surface structure including a surface pattern formed on the upper electrode layer, a surface structure including an upper electrode pattern and an upper doped pattern formed by patterning the upper electrode layer and the upper doped layer, or a surface structure including the surface pattern, the upper electrode pattern, and upper doped pattern, wherein the surface structure enhances the light extraction efficiency of light emitted from the emitting layer according to geometric optics.
    • 由于硅半导体的间接跃迁特性,硅基发光二极管的光提取效率低于基于化合物半导体的发光二极管的光提取效率。 因此,实际上使用和商业化目前为止开发的硅基发光二极管存在困难。 本发明提供一种硅基发光体,具有:下表面具有下电极层的基板; 下部掺杂层,其形成在所述衬底的上表面上并将载体提供给发光层; 所述发光层是包含形成在所述下掺杂层上的硅量子点或纳米点的具有发光特性的硅半导体层; 上部掺杂层,其形成在所述发光层上并将载流子提供给所述发光层; 形成在上掺杂层上的上电极层; 以及包括形成在上电极层上的表面图案的表面结构,包括通过图案化上电极层和上掺杂层形成的上电极图案和上掺杂图案的表面结构,或包括表面图案的表面结构, 上电极图案和上掺杂图案,其中表面结构根据几何光学增强了从发光层发射的光的光提取效率。
    • 7. 发明授权
    • Biosensor and method of manufacturing the same
    • 生物传感器及其制造方法
    • US08022444B2
    • 2011-09-20
    • US12195305
    • 2008-08-20
    • Tae Youb KimNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • Tae Youb KimNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • H01L27/085H01L27/14H01L21/00
    • G01N27/4146G01N27/4145Y10S977/71Y10S977/742Y10S977/963
    • Provided are a biosensor with a silicon nanowire and a method of manufacturing the same, and more particularly, a biosensor with a silicon nanowire including a defect region formed by irradiation of an electron beam, and a method of manufacturing the same. The biosensor includes: a silicon substrate; a source region disposed on the silicon substrate; a drain region disposed on the silicon substrate; and a silicon nanowire disposed on the source region and the drain region, and having a defect region formed by irradiation of an electron beam. Therefore, by irradiating a certain region of a high-concentration doped silicon nanowire with an electron beam to lower electron mobility in the certain region, it is possible to maintain a low contact resistance between the silicon nanowire and a metal electrode and to lower operation current of a biomaterial detection part, thereby improving sensitivity of the biosensor.
    • 本发明提供一种具有硅纳米线的生物传感器及其制造方法,更具体地,涉及具有通过电子束照射形成的缺陷区域的硅纳米线的生物传感器及其制造方法。 生物传感器包括:硅衬底; 设置在所述硅基板上的源极区域; 设置在所述硅基板上的漏极区域; 以及设置在源极区域和漏极区域上的硅纳米线,并且具有通过电子束的照射而形成的缺陷区域。 因此,通过用特定的区域照射具有电子束的高浓度掺杂的硅纳米线的特定区域来降低电子迁移率,可以保持硅纳米线与金属电极之间的低接触电阻并降低工作电流 的生物材料检测部件,从而提高生物传感器的灵敏度。
    • 8. 发明申请
    • BIOSENSOR AND METHOD OF MANUFACTURING THE SAME
    • 生物传感器及其制造方法
    • US20090152597A1
    • 2009-06-18
    • US12195305
    • 2008-08-20
    • Tae Youb KIMNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • Tae Youb KIMNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • H01L29/12H01L21/00
    • G01N27/4146G01N27/4145Y10S977/71Y10S977/742Y10S977/963
    • Provided are a biosensor with a silicon nanowire and a method of manufacturing the same, and more particularly, a biosensor with a silicon nanowire including a defect region formed by irradiation of an electron beam, and a method of manufacturing the same. The biosensor includes: a silicon substrate; a source region disposed on the silicon substrate; a drain region disposed on the silicon substrate; and a silicon nanowire disposed on the source region and the drain region, and having a defect region formed by irradiation of an electron beam. Therefore, by irradiating a certain region of a high-concentration doped silicon nanowire with an electron beam to lower electron mobility in the certain region, it is possible to maintain a low contact resistance between the silicon nanowire and a metal electrode and to lower operation current of a biomaterial detection part, thereby improving sensitivity of the biosensor.
    • 本发明提供一种具有硅纳米线的生物传感器及其制造方法,更具体地,涉及具有通过电子束照射形成的缺陷区域的硅纳米线的生物传感器及其制造方法。 生物传感器包括:硅衬底; 设置在所述硅基板上的源极区域; 设置在所述硅基板上的漏极区域; 以及设置在源极区域和漏极区域上的硅纳米线,并且具有通过电子束的照射而形成的缺陷区域。 因此,通过用特定的区域照射具有电子束的高浓度掺杂的硅纳米线的特定区域来降低电子迁移率,可以保持硅纳米线与金属电极之间的低接触电阻并降低工作电流 的生物材料检测部件,从而提高生物传感器的灵敏度。
    • 9. 发明授权
    • Silicon-based light emitting diode
    • 硅基发光二极管
    • US06998643B2
    • 2006-02-14
    • US10923230
    • 2004-08-20
    • Taeyoub KimNae Man ParkGun Yong Sung
    • Taeyoub KimNae Man ParkGun Yong Sung
    • H01L27/15
    • H01L33/34H01L33/105H01L33/24H01L33/465
    • A silicon-based light emitting diode simultaneously adopts doping layers and Distributed Bragg Reflector (DBR). The silicon-based light emitting diode includes an active layer having mutually opposing a first side and a second side. A first reflecting portion faces with the first side of the active layer, and a second reflecting portion faces with the second side of the active layer. A first doping layer is interposed between the active layer and the first reflecting portion. A second doping layer is interposed between the active layer and the second reflecting portion. A first electrode is electrically connectable to the first doping layer, and a second electrode is electrically connectable to the second doping layer. Here, At least one of the first reflecting portion and the second reflecting portion has the DBR that is formed by alternately stacking two kinds of differently composed silicon-containing insulating layers and a gate.
    • 硅基发光二极管同时采用掺杂层和分布式布拉格反射器(DBR)。 硅基发光二极管包括具有相对于第一侧和第二侧的有源层。 第一反射部分面向有源层的第一侧,并且第二反射部分面向有源层的第二侧。 第一掺杂层介于有源层和第一反射部分之间。 第二掺杂层介于有源层和第二反射部分之间。 第一电极可电连接到第一掺杂层,第二电极可电连接到第二掺杂层。 这里,第一反射部和第二反射部中的至少一个具有通过交替堆叠两种不同构成的含硅绝缘层和栅极而形成的DBR。
    • 10. 发明授权
    • Method for fabricating light-emitting diode using nanosize nitride semiconductor multiple quantum wells
    • 使用纳米尺度氮化物半导体多量子阱制造发光二极管的方法
    • US06773946B2
    • 2004-08-10
    • US10330336
    • 2002-12-30
    • Yong Tae MoonNae Man ParkBaek Hyun KimSeong Ju Park
    • Yong Tae MoonNae Man ParkBaek Hyun KimSeong Ju Park
    • H01L2100
    • H01L33/32H01L21/02381H01L21/02458H01L21/02488H01L21/02507H01L21/02513H01L21/0254H01L21/02601H01L21/0262H01L33/08H01L33/18H01L33/24
    • Disclosed is a nanosized III-nitride compound semiconductor multiple quantum well light-emitting diode, comprising a silicon substrate (100), and an amorphous silicon nitride layer (base) (200) formed on the substrate and including III-nitride compound semiconductor nano grains (230) spontaneously formed therein. The nanosized nitride semiconductor multiple quantum well light-emitting diode and the fabrication method thereof according to the present invention are free from the problems of the conventional III-nitride compound semiconductor epitaxial thin film growth on silicon substrates. Accordingly, a high-quality nanosized III-nitride compound semiconductor multiple quantum well light-emitting diode having no crystalline defect can be provided. Furthermore, the nanosized multiple quantum well light-emitting diode according to the present invention does not require a p-type GaN thin film so that there is no possibility of causing crack that is a problem in the conventional method of fabricating a III-nitride compound semiconductor light-emitting diode using III-nitride epitaxial thin films grown on silicon substrates. In addition, the number of processes of fabricating the diode is remarkably reduced to result in an economical and productive light-emitting diode fabrication process.
    • 公开了一种纳米尺寸的III族氮化物化合物半导体多量子阱发光二极管,包括硅衬底(100)和形成在衬底上的非晶氮化硅层(基底)(200),并且包括III族氮化物半导体纳米晶粒 (230)自发形成。 根据本发明的纳米尺寸氮化物半导体多量子阱发光二极管及其制造方法没有在硅衬底上常规III族氮化物化合物半导体外延薄膜生长的问题。 因此,可以提供不具有结晶缺陷的高质量的纳米级III族氮化物化合物半导体多量子阱发光二极管。 此外,根据本发明的纳米尺度多量子阱发光二极管不需要p型GaN薄膜,因此不存在在制造III族氮化物化合物的常规方法中存在问题的可能性 使用在硅衬底上生长的III族氮化物外延薄膜的半导体发光二极管。 此外,制造二极管的工艺的数量显着减少,从而导致经济和高效的发光二极管制造工艺。