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1. 发明授权

US06672820B1 Semiconductor processing apparatus having linear conveyer system 失效
标题翻译：具有线性输送系统的半导体处理装置
公开(公告)号：US06672820B1
公开(公告)日：2004-01-06
申请号：US08990107
申请日：1997-12-15
申请人： Kyle Hanson , Mark Dix , Daniel J. Woodruff , Wayne J. Schmidt , Kevin W. Coyle
发明人： Kyle Hanson , Mark Dix , Daniel J. Woodruff , Wayne J. Schmidt , Kevin W. Coyle
IPC分类号： B65H500
CPC分类号： H01L21/681 , C25D7/12 , C25D17/001 , H01L21/6715 , H01L21/67173 , H01L21/67196 , H01L21/67259 , H01L21/67742 , H01L21/67769 , H01L21/67781
摘要： A transport system for manipulating a semiconductor wafer in a processing tool is set forth. The system includes a transport unit guide disposed within the processing tool for supporting a wafer transfer unit as the unit moves between a first position and a second position. The transport unit guide comprises a frame, a lateral guide rail mounted on the frame, and a series of magnetic segments arranged upon the transport unit guide proximate the lateral guide rail. The wafer transfer unit includes a tram translatably attached to the lateral guide rail and a wafer transfer arm assembly for manipulating the semiconductor wafer. An electromagnet is mounted on the tram in cooperative relation with the magnetic segments for moving the transfer unit along the guide rail. Actuators are used for controlling the position of the transfer unit and transfer arm assembly, and sensors are used for determining the position of the transfer unit and the transfer arm assembly. A controller is disposed remote of the wafer transfer unit and directs the movement of the transfer unit and transfer arm assembly in response to the sensors using the actuators. A communication link is established between the actuators, sensors and controller. Preferably, the communication link is a fiber optic link.
摘要翻译：阐述了在处理工具中操纵半导体晶片的传送系统。该系统包括设置在处理工具内的传送单元引导件，用于当单元在第一位置和第二位置之间移动时支撑晶片传送单元。运输单元引导件包括框架，安装在框架上的横向导轨以及布置在靠近横向导轨的传送单元引导件上的一系列磁性段。晶片传送单元包括可平移地附接到横向导轨的电车和用于操纵半导体晶片的晶片传送臂组件。一个电磁铁与磁性部件协调地安装在电车上，用于沿着导轨移动传送单元。驱动器用于控制传送单元和传送臂组件的位置，传感器用于确定传送单元和传送臂组件的位置。控制器设置在远离晶片传送单元的位置，并响应于使用致动器的传感器引导传送单元和传送臂组件的移动。在执行器，传感器和控制器之间建立通信链路。优选地，通信链路是光纤链路。

2. 发明授权

US06654122B1 Semiconductor processing apparatus having lift and tilt mechanism 失效
公开(公告)号：US06654122B1
公开(公告)日：2003-11-25
申请号：US09618707
申请日：2000-07-18
申请人： Kyle Hanson , Mark Dix , Vladimir Zila , Daniel J. Woodruff
发明人： Kyle Hanson , Mark Dix , Vladimir Zila , Daniel J. Woodruff
IPC分类号： G01B1114
CPC分类号： H01L21/67259 , H01L21/67173 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67769 , H01L21/67781
摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.

3. 发明授权

US06645355B2 Semiconductor processing apparatus having lift and tilt mechanism 失效
标题翻译：具有升降机构的半导体处理装置
公开(公告)号：US06645355B2
公开(公告)日：2003-11-11
申请号：US09944828
申请日：2001-08-31
申请人： Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
发明人： Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
IPC分类号： C25D1700
CPC分类号： H01L21/67769 , H01L21/67173 , H01L21/6719 , H01L21/67196 , H01L21/67259 , H01L21/67742 , H01L21/67781
摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
摘要翻译：阐述了用于半导体晶片处理装置的提升/倾斜组件。提升/倾斜组件包括包括固定框架和可移动框架的线性导轨。用于接收多个半导体晶片的嵌座可旋转地连接到可移动框架。当它由与可线性方式耦合的电动机用可移动框架驱动时，嵌套在晶片水平取向和晶片垂直取向之间旋转。当嵌套处于晶片垂直方向时，连接到嵌套的杠杆提供与巢的真垂直的偏移。

4. 发明授权

US07002698B2 Semiconductor processing apparatus having lift and tilt mechanism 失效
公开(公告)号：US07002698B2
公开(公告)日：2006-02-21
申请号：US10721057
申请日：2003-11-24
申请人： Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
发明人： Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
IPC分类号： G01B11/14
CPC分类号： H01L21/67259 , H01L21/67173 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67769 , H01L21/67781
摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.

5. 发明授权

US06091498A Semiconductor processing apparatus having lift and tilt mechanism 失效
标题翻译：具有升降机构的半导体处理装置
公开(公告)号：US06091498A
公开(公告)日：2000-07-18
申请号：US991062
申请日：1997-12-15
申请人： Kyle Hanson , Mark Dix , Vladimir Zila , Daniel J. Woodruff
发明人： Kyle Hanson , Mark Dix , Vladimir Zila , Daniel J. Woodruff
IPC分类号： B65G49/07 , B25J9/06 , C25D7/12 , H01L21/00 , H01L21/677 , H01L21/68 , H01L21/687 , G01B11/14 , G01N21/00
CPC分类号： H01L21/67259 , H01L21/67173 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67769 , H01L21/67781
摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide/actuator comprising a fixed frame and a movable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the movable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
摘要翻译：阐述了用于半导体晶片处理装置的提升/倾斜组件。提升/倾斜组件包括具有固定框架和可移动框架的线性导向/致动器。用于接收多个半导体晶片的嵌套可旋转地连接到可移动框架。当它由与可线性方式耦合的电动机用可移动框架驱动时，嵌套在晶片水平取向和晶片垂直取向之间旋转。当嵌套处于晶片垂直方向时，连接到嵌套的杠杆提供与巢的真垂直的偏移。

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