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    • 2. 发明授权
    • Shape measurement apparatus and method
    • 形状测量装置及方法
    • US09275292B2
    • 2016-03-01
    • US12784707
    • 2010-05-21
    • Joong-Ki JeongMin-Young KimSeung-Jun Lee
    • Joong-Ki JeongMin-Young KimSeung-Jun Lee
    • H04N7/18G06K9/03G01B11/25G01N21/956
    • G01B11/254G01B11/2513G01B11/2531G01N2021/95638G06K9/036
    • A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.
    • 一种形状测量装置,包括支撑目标基板的工作台,包括光源的图案投影部分,部分地透射和遮挡由光源产生的光以产生光栅图像的光栅部分,以及使光栅图像产生的投影透镜部分 在目标基板的测量目标上,捕获由目标基板的测量目标反射的光栅图像的图像捕获部分,以及控制工作台,图案投影部分和图像捕获部分的控制部分,计算 光栅图像的可靠性指标和与测量对象对应的光栅图像的相位,并且通过使用可靠性指标和相位来检查测量对象。 因此,可以提高测量的精度。
    • 5. 发明申请
    • METHOD OF INSPECTING A SUBSTRATE
    • 检查基板的方法
    • US20120127486A1
    • 2012-05-24
    • US13300023
    • 2011-11-18
    • Hee-Tae KimMin-Young Kim
    • Hee-Tae KimMin-Young Kim
    • G01B11/06
    • G01B11/2531G01B11/2527
    • A method of inspecting a substrate is disclosed. The method of inspecting a substrate, comprises: obtaining phase data per projecting part with regard to a substrate, by projecting pattern beam onto the substrate having a target object formed thereon through a plurality of projecting parts in sequence; obtaining height data per projecting part with regard to the substrate by using the phase data per the projecting part; compensating tilt of the height data by using the height data per projecting part; modifying the tilt-compensated height data per projecting part; and obtaining integrated height data by using the modified height data.
    • 公开了一种检查基板的方法。 检查基板的方法包括:通过依次通过多个突出部分将图案光束投射到其上形成有目标物体的基板上,获得相对于基板的每个突出部分的相位数据; 通过使用每个突出部分的相位数据获得关于基板的每个突出部分的高度数据; 通过使用每个突出部分的高度数据来补偿高度数据的倾斜度; 修改每个突出部分的倾斜补偿高度数据; 并通过使用修改的高度数据获得集成的高度数据。
    • 10. 发明申请
    • INSPECTION METHOD
    • 检查方法
    • US20120130666A1
    • 2012-05-24
    • US13302895
    • 2011-11-22
    • Soo-Young ChoBong-Ha HwangMin-Young Kim
    • Soo-Young ChoBong-Ha HwangMin-Young Kim
    • G06F19/00
    • G01N21/95684G01N21/956G01N2021/95638
    • In order to inspect a board, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a conversion condition is established for the measurement area, and a conversion relation is acquired according to a distortion degree between reference data and measurement data. Thereafter, validity of the conversion relation is verified by using at least one of verifying that a comparison feature object satisfies the conversion relation, verifying that a verification feature object selected from feature objects satisfies the conversion relation and verifying that a pad formed on the board satisfies the conversion relation. Then, the conversion condition is confirmed, and an inspection area for inspecting a measurement target is set according to the confirmed conversion condition. Thus, an inspection area may be correctly set so that distortion is compensated for.
    • 为了检查电路板,在电路板上设置测量区域,并且获取测量区域的参考数据和测量数据。 然后,对于测量区域建立转换条件,并且根据参考数据和测量数据之间的失真度获取转换关系。 此后,通过使用验证比较特征对象满足转换关系中的至少一个来验证转换关系的有效性,验证从特征对象中选择的验证特征对象是否满足转换关系,并且验证板上形成的垫满足 转换关系。 然后,确认转换条件,根据确认的转换条件设定检查对象的检查区域。 因此,可以正确地设置检查区域,从而补偿失真。