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1. 发明授权

US09256912B2 Method of measuring measurement target 有权
标题翻译：测量目标的测量方法
公开(公告)号：US09256912B2
公开(公告)日：2016-02-09
申请号：US12779599
申请日：2010-05-13
申请人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
发明人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
IPC分类号： G06T1/00 , G01B11/06 , G01N21/88 , G01N21/956 , G06T7/00 , G01B11/25 , G01J3/50
CPC分类号： G06T1/0007 , G01B11/0608 , G01B11/2509 , G01J3/50 , G01N21/8806 , G01N21/95684 , G01N2021/95638 , G01N2021/95646 , G01N2201/0635 , G06T7/0008 , G06T7/521 , G06T2207/10024 , G06T2207/10152 , G06T2207/30152
摘要： In order to measure a measurement target on a PCB, height information of the PCB is acquired by using a first image photographed by illuminating a grating pattern light onto the PCB. Then, a first area protruding on the PCB by greater than a reference height is determined as the measurement target by using the height information. Thereafter, color information of the PCB is acquired by using a second image photographed by illuminating light onto the PCB. Then, the first color information of the first area determined as the measurement target out of the color information of the PCB is set as reference color information. Thereafter, the reference color information is compared with color information of an area except for the first area to judge whether the measurement target is formed in the area except for the first area. Thus, the measurement target may be accurately measured.
摘要翻译：为了测量PCB上的测量目标，通过使用通过将光栅图案光照射到PCB上拍摄的第一图像来获取PCB的高度信息。然后，通过使用高度信息，将在PCB上突出大于参考高度的第一区域确定为测量目标。此后，通过使用通过将光照射到PCB上拍摄的第二图像来获取PCB的颜色信息。然后，将作为PCB的颜色信息中的测量对象确定的第一区域的第一颜色信息设置为参考颜色信息。此后，将参考颜色信息与除了第一区域之外的区域的颜色信息进行比较，以判断在除了第一区域之外的区域中是否形成测量对象。因此，可以精确地测量测量对象。

2. 发明授权

US08644590B2 Method of measuring measurement target 有权
标题翻译：测量目标的测量方法
公开(公告)号：US08644590B2
公开(公告)日：2014-02-04
申请号：US13619161
申请日：2012-09-14
申请人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
发明人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
IPC分类号： G06K9/00 , G06T1/00 , G01J3/50
CPC分类号： G06T1/0007 , G01B11/0608 , G01B11/2509 , G01J3/50 , G01N21/8806 , G01N21/95684 , G01N2021/95638 , G01N2021/95646 , G01N2201/0635 , G06T7/0008 , G06T7/521 , G06T2207/10024 , G06T2207/10152 , G06T2207/30152
摘要： In order to measure a measurement target on a PCB, height information of the PCB is acquired by using a first image photographed by illuminating a grating pattern light onto the PCB. Then, a first area protruding on the PCB by greater than a reference height is determined as the measurement target by using the height information. Thereafter, color information of the PCB is acquired by using a second image photographed by illuminating light onto the PCB. Then, the first color information of the first area determined as the measurement target out of the color information of the PCB is set as reference color information. Thereafter, the reference color information is compared with color information of an area except for the first area to judge whether the measurement target is formed in the area except for the first area. Thus, the measurement target may be accurately measured.
摘要翻译：为了测量PCB上的测量目标，通过使用通过将光栅图案光照射到PCB上拍摄的第一图像来获取PCB的高度信息。然后，通过使用高度信息，将在PCB上突出大于参考高度的第一区域确定为测量目标。此后，通过使用通过将光照射到PCB上拍摄的第二图像来获取PCB的颜色信息。然后，将作为PCB的颜色信息中的测量对象确定的第一区域的第一颜色信息设置为参考颜色信息。此后，将参考颜色信息与除了第一区域之外的区域的颜色信息进行比较，以判断在除了第一区域之外的区域中是否形成测量对象。因此，可以精确地测量测量对象。

3. 发明授权

US09275292B2 Shape measurement apparatus and method 有权
标题翻译：形状测量装置及方法
公开(公告)号：US09275292B2
公开(公告)日：2016-03-01
申请号：US12784707
申请日：2010-05-21
申请人： Joong-Ki Jeong , Min-Young Kim , Seung-Jun Lee
发明人： Joong-Ki Jeong , Min-Young Kim , Seung-Jun Lee
IPC分类号： H04N7/18 , G06K9/03 , G01B11/25 , G01N21/956
CPC分类号： G01B11/254 , G01B11/2513 , G01B11/2531 , G01N2021/95638 , G06K9/036
摘要： A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.
摘要翻译：一种形状测量装置，包括支撑目标基板的工作台，包括光源的图案投影部分，部分地透射和遮挡由光源产生的光以产生光栅图像的光栅部分，以及使光栅图像产生的投影透镜部分在目标基板的测量目标上，捕获由目标基板的测量目标反射的光栅图像的图像捕获部分，以及控制工作台，图案投影部分和图像捕获部分的控制部分，计算光栅图像的可靠性指标和与测量对象对应的光栅图像的相位，并且通过使用可靠性指标和相位来检查测量对象。因此，可以提高测量的精度。

4. 发明授权

US09091725B2 Board inspection apparatus and method 有权
标题翻译：板检查装置及方法
公开(公告)号：US09091725B2
公开(公告)日：2015-07-28
申请号：US12829996
申请日：2010-07-02
申请人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee , Bong-Ha Hwang
发明人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee , Bong-Ha Hwang
IPC分类号： G01B11/24 , G01R31/309 , G01B11/25 , G06T7/00 , G06K9/00 , G06K9/46 , G01R31/00
CPC分类号： G01R31/309 , G01B11/2531 , G06T7/521
摘要： An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.
摘要翻译：检查方法包括拍摄测量对象以获取测量对象的每个像素的图像数据，获取测量对象的每个像素的高度数据，获取测量对象的每个像素的可见度数据，至少将所获取的图像数据乘以为每个像素生成结果值的高度数据和可见度数据之一，以及通过使用所产生的结果值来设置终端区域。因此，终端区域可以被准确地确定。

5. 发明授权

US09062966B2 Method of inspecting a three dimensional shape 有权
标题翻译：检查三维形状的方法
公开(公告)号：US09062966B2
公开(公告)日：2015-06-23
申请号：US13017784
申请日：2011-01-31
申请人： Joong-Ki Jeong
发明人： Joong-Ki Jeong
IPC分类号： G01N21/17 , G01N21/19 , G01B15/02 , G01B15/06 , G01B11/24 , G06F19/00
CPC分类号： G01B11/24 , G06F19/00
摘要： In order to inspect a three dimensional shape, a predetermined inspection target component formed on a board is selected as the measurement target, a shape of the inspection target component is acquired, a reference point of the inspection target component is detected, relative location information of a polarity mark formed on the inspection target component with respect to the reference point is acquired, and it is judged whether the inspection target component is good or bad by checking whether the polarity mark exists or not by using the relative location information with respect to the reference point. Thus, the location of the polarity mark may be accurately known, and polarity inspection may be more easily and accurately performed.
摘要翻译：为了检查三维形状，选择形成在板上的预定检查对象部件作为测量对象，获取检查对象部件的形状，检测检查对象部件的基准点，相对位置信息获取相对于基准点形成在检查对象部件上的极性标记，通过使用相对于基准点的相对位置信息，通过检查极性标记是否存在来判断检查对象成分是否良好参照点。因此，可以准确地知道极性标记的位置，并且可以更容易且准确地执行极性检查。

6. 发明申请

US20120120414A1 METHOD OF INSPECTING BOARD 有权
标题翻译：检查板的方法
公开(公告)号：US20120120414A1
公开(公告)日：2012-05-17
申请号：US13295790
申请日：2011-11-14
申请人： Joong-Ki Jeong
发明人： Joong-Ki Jeong
IPC分类号： G01B11/24
CPC分类号： H05K13/08 , G01B11/0608 , G01B11/24 , G01B11/25 , G01B11/2513 , G01B11/2518 , G01N2021/95638 , H05K13/04 , H05K2203/15 , H05K2203/16 , H05K2203/168
摘要： A method of establishing a tip location of a terminal includes establishing a virtual tip line by measuring a height of a board, on which a component having a terminal and a body is mounted, and comparing the measured measurement height with a predetermined reference height, establishing a central line with respect to a width direction of the terminal along a longitudinal direction of the terminal, and establishing a tip location of the terminal by using the measurement height along the central line from an intersection point of the virtual tip line and the central line. Thus, a tip location of a terminal may be more correctly acquired.
摘要翻译：建立终端的尖端位置的方法包括通过测量其上安装有终端和身体的部件的板的高度，并将测量的测量高度与预定参考高度进行比较来建立虚拟尖端线，建立沿着终端的纵向方向相对于终端的宽度方向的中心线，以及通过使用从虚拟尖端线和中心线的交点的沿着中心线的测量高度来建立终端的尖端位置。因此，可以更正确地获取终端的提示位置。

7. 发明申请

US20110002529A1 METHOD FOR INSPECTING MEASUREMENT OBJECT 有权
标题翻译：检查测量对象的方法
公开(公告)号：US20110002529A1
公开(公告)日：2011-01-06
申请号：US12829670
申请日：2010-07-02
申请人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee
发明人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01B11/25 , G01B11/2531 , G06K9/6202 , G06T7/521
摘要： An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.
摘要翻译：一种用于检查安装在基板上的装置的检查方法，包括：生成装置的形状模板，通过投影部分将光栅图案光投影到基板上，获取每个像素的高度信息，生成对应于每个像素，并将对比度图与形状模板进行比较。因此，可以精确地提取测量对象。

8. 发明申请

US20080279458A1 Imaging system for shape measurement of partially-specular object and method thereof 审中-公开
标题翻译：用于部分镜面物体形状测量的成像系统及其方法
公开(公告)号：US20080279458A1
公开(公告)日：2008-11-13
申请号：US12068645
申请日：2008-02-08
申请人： Deok-Hwa Hong , Joong-Ki Jeong , Hyung-Suck Cho
发明人： Deok-Hwa Hong , Joong-Ki Jeong , Hyung-Suck Cho
IPC分类号： G06K9/76
CPC分类号： G01B11/25 , G06T7/521 , H01L27/14625 , H01L27/148
摘要： The present invention can perform the optical measurement in the partially-specular object by preventing a generation of light saturation and blooming for an object with partially-specular characteristics by lowering the transmittance of specular lobe through the spatial light modulator. Therefore, the present invention can widen the measurement range up to the partially-specular object in the state where the advantages of the active optical measurement method of contactless, rapid measurement, and high precision are maintained.
摘要翻译：本发明可以通过降低通过空间光调制器的镜面波的透射率来防止产生具有部分镜面特性的物体的光饱和度和光晕，从而对部分镜面物体进行光学测量。因此，本发明可以在保持非接触，快速测量和高精度的有源光学测量方法的优点的状态下，将测量范围扩大到部分镜面物体。

9. 发明授权

US08369603B2 Method for inspecting measurement object 有权
公开(公告)号：US08369603B2
公开(公告)日：2013-02-05
申请号：US12829670
申请日：2010-07-02
申请人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee
发明人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee
IPC分类号： G06K9/00 , G03F9/00
CPC分类号： G06T7/001 , G01B11/25 , G01B11/2531 , G06K9/6202 , G06T7/521
摘要： An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.

10. 发明申请

US20120127461A1 METHOD OF INSPECTING A SUBSTRATE 有权
标题翻译：检查基板的方法
公开(公告)号：US20120127461A1
公开(公告)日：2012-05-24
申请号：US13299959
申请日：2011-11-18
申请人： Joong-Ki Jeong
发明人： Joong-Ki Jeong
IPC分类号： G01N21/00
CPC分类号： G01B11/2527 , G01B11/0608
摘要： A method of inspecting a substrate is disclosed. The method of inspecting a substrate, comprises: obtaining phase data per projecting part with regard to a substrate, by projecting pattern beam onto the substrate having a target object formed thereon through a plurality of projecting parts in sequence; obtaining height data per projecting part with regard to the substrate by using the phase data per the projecting part; setting up a projecting part with highest reliability in the a plurality of projecting parts to be a reference projecting part; modifying height data of remaining projecting part, referenced by height data of the reference projecting part; and obtaining integrated height data by using the modified height data.
摘要翻译：公开了一种检查基板的方法。检查基板的方法包括：通过依次通过多个突出部分将图案光束投射到其上形成有目标物体的基板上，获得相对于基板的每个突出部分的相位数据; 通过使用每个突出部分的相位数据获得关于基板的每个突出部分的高度数据; 在多个突出部分中设置具有最高可靠性的突出部分作为基准突出部分; 修改由参考突出部分的高度数据引用的剩余突出部分的高度数据; 并通过使用修改的高度数据获得集成的高度数据。

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