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    • 1. 发明授权
    • Method of purging photoresist from semiconductor wafer coating apparatus
    • 从半导体晶片涂布装置中清除光致抗蚀剂的方法
    • US07144601B2
    • 2006-12-05
    • US11103536
    • 2005-04-12
    • Kwang-Ho LeeJung-Hong KimJong-Hwa Lee
    • Kwang-Ho LeeJung-Hong KimJong-Hwa Lee
    • B05D5/00
    • H01L21/67253H01L21/6715
    • The purging of photoresist from a supply device of semiconductor coating equipment is automatically executed in a controlled manner. The equipment employs a plurality of photoresist bottles for storing the same kind of photoresist. A plurality of supply pipes are respectively connected to the photoresist bottles, respectively. A valve system selectively opens and closes the supply pipes in response to control signals generated by a main controller. A dispense pump forces the photoresist in the open supply pipe through a nozzle. A purge start button issues a purge start command signal to the controller when the button is pressed. The controller then controls the valve system and the dispense pump so as to automatically purge the photoresist according to a sequence effected using a timer.
    • 从半导体涂布设备的供给装置中清除光致抗蚀剂以受控的方式自动执行。 该设备采用多个光致抗蚀剂瓶来存储相同类型的光致抗蚀剂。 分别将多个供给管连接到光致抗蚀剂瓶。 阀系统响应于由主控制器产生的控制信号选择性地打开和关闭供应管。 分配泵通过喷嘴迫使打开的供应管中的光致抗蚀剂。 当按下按钮时,清除启动按钮会向控制器发出清除启动命令信号。 然后,控制器控制阀系统和分配泵,以便根据使用计时器执行的顺序自动清除光致抗蚀剂。
    • 2. 发明申请
    • Photoresist purge control of semiconductor wafer coating equipment
    • 半导体晶片涂层设备的光电阻清除控制
    • US20050175787A1
    • 2005-08-11
    • US11103536
    • 2005-04-12
    • Kwang-Ho LeeJung-Hong KimJong-Hwa Lee
    • Kwang-Ho LeeJung-Hong KimJong-Hwa Lee
    • G03F7/16B05C11/10H01L21/00H01L21/027B05D7/00
    • H01L21/67253H01L21/6715
    • The purging of photoresist from a supply device of semiconductor coating equipment is automatically executed in a controlled manner. The equipment employs a plurality of photoresist bottles for storing the same kind of photoresist. A plurality of supply pipes are respectively connected to the photoresist bottles, respectively. A valve system selectively opens and closes the supply pipes in response to control signals generated by a main controller. A dispense pump forces the photoresist in the open supply pipe through a nozzle. A purge start button issues a purge start command signal to the controller when the button is pressed. The controller then controls the valve system and the dispense pump so as to automatically purge the photoresist according to a sequence effected using a timer.
    • 从半导体涂布设备的供给装置中清除光致抗蚀剂以受控的方式自动执行。 该设备采用多个光致抗蚀剂瓶来存储相同类型的光致抗蚀剂。 分别将多个供给管连接到光致抗蚀剂瓶。 阀系统响应于由主控制器产生的控制信号选择性地打开和关闭供应管。 分配泵通过喷嘴迫使打开的供应管中的光致抗蚀剂。 当按下按钮时,清除启动按钮会向控制器发出清除启动命令信号。 然后,控制器控制阀系统和分配泵,以便根据使用计时器执行的顺序自动清除光致抗蚀剂。
    • 9. 发明授权
    • Indoor local area network system using ultra wide-band communication system
    • 室内局域网系统采用超宽带通信系统
    • US07366150B2
    • 2008-04-29
    • US10658630
    • 2003-09-09
    • Sang-Il LeeYun-Je OhJong-Hun LeeJong-Hwa LeeSeo-Won KwonYun-Kyung Oh
    • Sang-Il LeeYun-Je OhJong-Hun LeeJong-Hwa LeeSeo-Won KwonYun-Kyung Oh
    • H04Q7/24H04Q7/20H04B10/20H04J14/00
    • H04B10/25752H04B1/7163
    • An indoor local area network (LAN) system using an ultra wide-band (UWB) communication system is provided. The indoor LAN system includes at least one remote terminal including a UWB module for converting input digital data to be transmitted into an analog signal of an ultra wide-bandwidth and wirelessly transmitting the converted analog signal via an antenna of the remote terminal. The UWB module receives an analog signal of the ultra wide-bandwidth via the antenna and converts the received analog signal into a digital signal. The indoor LAN system further includes at least one access point for performing USB-based wireless communication with the remote terminal in a corresponding area. The access point is adapted to receive the analog signal of the ultra wide-bandwidth transmitted from the remote terminal and convert the received analog signal into an optical signal.
    • 提供了一种使用超宽带(UWB)通信系统的室内局域网(LAN)系统。 室内LAN系统包括至少一个远程终端,其包括用于将要发送的输入数字数据转换成超宽带的模拟信号的UWB模块,并且经由远程终端的天线无线地发送转换的模拟信号。 UWB模块通过天线接收超宽带的模拟信号,并将接收到的模拟信号转换为数字信号。 室内LAN系统还包括用于在相应区域中与远程终端进行基于USB的无线通信的至少一个接入点。 接入点适于接收从远程终端发送的超宽带的模拟信号,并将接收到的模拟信号转换为光信号。