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    • 2. 发明授权
    • Optically sensitive device and method
    • 光敏装置及方法
    • US5886374A
    • 1999-03-23
    • US2801
    • 1998-01-05
    • Kurt K. SakamotoPeter J. ZdebelChristopher K. Y. Chun
    • Kurt K. SakamotoPeter J. ZdebelChristopher K. Y. Chun
    • H01L27/144H01L31/062H01L31/075H01L31/105H01L31/113
    • H01L27/1443
    • A process combines a high performance silicon pin diode (60) and other semiconductor devices such as transistors, resistors, and capacitors. The pin diode (60) is formed beneath an epitaxial layer (44) of the device at a depth that maximizes absorption of light having a wavelength greater than approximately 600 nanometers. Devices such as transistors are formed in the epitaxial layer (44). An integrated circuit has a substrate (41), an intrinsically doped layer (42), a buried layer (43), and an epitaxial layer (44). An isolation region (45) isolates an intrinsically doped region (46), a buried layer region (47), and the epitaxial layer region (48). The pin diode (32) has a substrate (41), an intrinsically doped region (46), and a buried layer region (47). A polysilicon region (62) provides a top side contact for the pin diode (60).
    • 一种工艺结合了高性能硅pin二极管(60)和诸如晶体管,电阻器和电容器的其它半导体器件。 pin二极管(60)形成在器件的外延层(44)的下方,其深度使得波长大于约600纳米的光的吸收最大化。 诸如晶体管的器件形成在外延层(44)中。 集成电路具有衬底(41),本征掺杂层(42),掩埋层(43)和外延层(44)。 隔离区域(45)隔离本征掺杂区域(46),掩埋层区域(47)和外延层区域(48)。 pin二极管(32)具有衬底(41),本征掺杂区域(46)和掩埋层区域(47)。 多晶硅区域(62)提供针二极管(60)的顶侧接触。