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    • 9. 发明授权
    • Silicon deposition process
    • 硅沉积工艺
    • US4590024A
    • 1986-05-20
    • US594456
    • 1984-03-29
    • Israel A. LeskM. John Rice, Jr.Kalluri R. Sarma
    • Israel A. LeskM. John Rice, Jr.Kalluri R. Sarma
    • C30B13/00
    • C30B29/06C30B13/00
    • An improved process is disclosed for the deposition in a reactor vessel of silicon on the interior walls of the reactor vessel and for the subsequent separation of the silicon from those walls. The reactor vessel has a generally rectangular cross section and is formed of a refractory material from which the deposited silicon separates by thermal expansion shear separation during cool down of the vessel and the deposited silicon. To improve the output of the deposition system, a plurality of partitions are provided in the reactor vessel and integral with the reactor walls. These partitions act as additional deposition surfaces, increasing the number of silicon sheets deposited as well as increasing the efficiency of the chemical reaction.
    • 公开了一种改进的方法,用于沉积在反应器容器的内壁上的硅的反应器容器中,并且随后将硅与这些壁分离。 反应器容器具有大致矩形的横截面,并且由耐热材料形成,沉积的硅通过在容器和沉积的硅冷却期间的热膨胀剪切分离而分离。 为了提高沉积系统的输出,在反应器容器中提供多个隔板并与反应器壁成一体。 这些隔板作为附加的沉积表面,增加沉积的硅片的数量以及提高化学反应的效率。
    • 10. 发明授权
    • Method of semiconductor solar energy device fabrication
    • 半导体太阳能装置制造方法
    • US4131488A
    • 1978-12-26
    • US792438
    • 1977-04-25
    • Israel A. LeskRobert A. Pryor
    • Israel A. LeskRobert A. Pryor
    • H01L21/265H01L21/266H01L21/306H01L21/308H01L31/0216H01L31/0236H01L21/263H01L31/04
    • H01L21/308H01L21/2652H01L21/266H01L21/30608H01L31/02168H01L31/022425H01L31/02363Y02E10/50
    • This disclosure relates to a semiconductor solar energy device which is of the PN-type and utilizes a dielectric anti-reflective coating on the side of the device that faces the sunlight. The fabrication techniques used in making this semiconductor device include the use of a rough or textured pyramid shaped silicon surface beneath the anti-reflective coating to increase solar cell efficiency. Also, ion implantation is used to form the PN junction in the device. The ion implanted region located on the side of the device that is subjected to the sunlight is configured in order to permit metal ohmic contact to be made thereto without shorting through the doped region during sintering of the metal contacts to the semiconductor substrate. The dielectric anti-reflective coating, in one embodiment, is a composite of silicon dioxide and silicon nitride layers. The device is designed to permit solder contacts to be made to the P and N regions thereof without possibility of shorting to semiconductor regions of opposite type conductivity.
    • 本公开涉及一种半导体太阳能装置,其为PN型并且利用面向阳光的装置侧面上的介电抗反射涂层。 用于制造该半导体器件的制造技术包括在抗反射涂层下面使用粗糙或纹理的金字塔形硅表面以增加太阳能电池效率。 此外,离子注入用于在器件中形成PN结。 配置在受到太阳光的器件侧的离子注入区域被配置为允许金属欧姆接触,而不会在金属触点烧结到半导体衬底期间通过掺杂区短路。 在一个实施例中,介电抗反射涂层是二氧化硅和氮化硅层的复合材料。 该器件被设计成允许对其P和N区域进行焊接接触,而不会短路到相反导电类型的半导体区域。