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1. 发明授权

US07041608B2 Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices 有权
标题翻译：在制造诸如OLED器件的电子器件的导电电极上提供碳氟化合物层
公开(公告)号：US07041608B2
公开(公告)日：2006-05-09
申请号：US10773744
申请日：2004-02-06
申请人： Kurt D. Sieber , Jeremy M. Grace , Michael J. Heinsler , Jeffrey P. Spindler
发明人： Kurt D. Sieber , Jeremy M. Grace , Michael J. Heinsler , Jeffrey P. Spindler
IPC分类号： H01L21/31 , H01L21/44
CPC分类号： H01L51/56 , H01L21/0212 , H01L21/3127 , H01L21/31683 , H01L51/0021 , H01L51/5088 , H01L51/5206
摘要： A method of making an electronic device in which a conductive electrode has been formed over a substrate including using a liquid to clean the conductive electrode, heating in a processing station the conductive electrode to a temperature which dries the conductive electrode and thereby removes residual cleaning liquid applied during the cleaning step, and providing an oxidizing plasma in the processing station to modify the properties of the conductive electrode. The method also includes producing a fluorocarbon plasma in the processing station to form a fluorocarbon layer over the modified conductive electrode, and further processing the structure to produce the electronic device.
摘要翻译：一种制造电子器件的方法，其中在包括使用液体清洁导电电极的基板上形成导电电极，在处理站中将导电电极加热至干燥导电电极的温度，从而去除残留的清洗液在清洁步骤期间施加，并且在处理站中提供氧化等离子体以改变导电电极的性质。该方法还包括在处理站中生产氟碳等离子体，以在改性的导电电极上形成碳氟化合物层，并进一步处理该结构以制造电子器件。

2. 发明授权

US06565930B1 High-efficiency plasma treatment of paper 失效
标题翻译：高效等离子体处理纸张
公开(公告)号：US06565930B1
公开(公告)日：2003-05-20
申请号：US09574772
申请日：2000-05-19
申请人： Jeremy M. Grace , Louis J. Gerenser , Christine J. Landry-Coltrain , Kurt D. Sieber , Michael J. Heinsler , Dennis R. Freeman
发明人： Jeremy M. Grace , Louis J. Gerenser , Christine J. Landry-Coltrain , Kurt D. Sieber , Michael J. Heinsler , Dennis R. Freeman
IPC分类号： C08F252
CPC分类号： G03C1/915 , B29C59/14 , B29K2067/00 , B29L2031/7644 , B41M5/508
摘要： A method and apparatus are taught for treating paper webs for obtaining the proper surface characteristics to promote adhesion of nonphotosensitive coating materials and/or layers typically coated thereon. The web is passed through a high-voltage sheath region or dark space of the plasma generated by a powered electrode residing in a discharge zone. The frequency of the driving voltage must be above a lower bound dictated by the properties of the paper support and the plasma, and it must be below an upper bound beyond which the sheath voltages drop significantly and it is observed that the benefits of this approach diminish. The dark space is generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is at least as great as the surface area of the treatment electrode. A power supply is included for driving the treatment electrode with an oscillating high voltage at a frequency less than about 2 MHz and greater than 1/tc where tc is the charging time of a web surface exposed to a rms ion current in the plasma.
摘要翻译：教导了一种处理纸幅以获得适当的表面特性以促进通常涂覆在其上的非感光涂层材料和/或层的粘附的方法和装置。纸幅通过位于放电区域的动力电极产生的等离子体的高压鞘区域或暗空间。驱动电压的频率必须高于由纸支架和等离子体的性质决定的下限，并且必须低于上限，超过该上限，护套电压显着下降，并且观察到该方法的好处减少了。黑暗空间由处理区域中的处理电极产生。在所述处理区域中具有至少与处理电极的表面积一样大的对电极。包括用于以小于约2MHz和大于1 / tc的频率的振荡高电压驱动处理电极的电源，其中tc是暴露于等离子体中的有效电离离子电流的幅材表面的充电时间。

3. 发明授权

US06399159B1 High-efficiency plasma treatment of polyolefins 失效
标题翻译：高效等离子体处理聚烯烃
公开(公告)号：US06399159B1
公开(公告)日：2002-06-04
申请号：US09575490
申请日：2000-05-19
申请人： Jeremy M. Grace , Louis J. Gerenser , Kurt D. Sieber , Michael J. Heinsler , Hengzhong K. Zhuang , Dennis R. Freeman , Mark M. Romach
发明人： Jeremy M. Grace , Louis J. Gerenser , Kurt D. Sieber , Michael J. Heinsler , Hengzhong K. Zhuang , Dennis R. Freeman , Mark M. Romach
IPC分类号： H05H100
CPC分类号： G03C1/915 , B29C59/14 , B29K2067/00 , B29L2031/7644 , B41M5/508
摘要： A method and apparatus are taught for treating polyolefin containing or polyolefin-coated webs or laminates for obtaining the proper surface characteristics to promote adhesion of photosensitive coating materials and/or layers typically coated thereon. The web is passed through a high-voltage sheath region or dark space of the plasma generated by a powered electrode residing in a discharge zone. The frequency of the driving voltage must be above a lower bound dictated by the properties of the paper support and the plasma, and it must be below an upper bound beyond which the sheath voltages drop significantly and it is observed that the benefits of this approach diminish. The dark space is generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is at least as great as the surface area of the treatment electrode. A power supply is included for driving the treatment electrode with an oscillating high voltage at a frequency less than about 2 MHz and greater than 1/tc where tc is the charging time of a web surface exposed to a rms ion current in the plasma.
摘要翻译：教导了一种用于处理含聚烯烃或聚烯烃涂布的卷筒纸或层压板以获得适当的表面特性以促进通常涂覆在其上的感光涂层材料和/或层的粘合的方法和装置。纸幅通过位于放电区域的动力电极产生的等离子体的高压鞘区域或暗空间。驱动电压的频率必须高于由纸支架和等离子体的性质决定的下限，并且必须低于上限，超过该上限，护套电压显着下降，并且观察到该方法的好处减少了。黑暗空间由处理区域中的处理电极产生。在所述处理区域中具有至少与处理电极的表面积一样大的对电极。包括用于以小于约2MHz和大于1 / tc的频率的振荡高电压驱动处理电极的电源，其中tc是暴露于等离子体中的有效电离离子电流的幅材表面的充电时间。

4. 发明授权

US06603121B2 High-efficiency plasma treatment of paper 失效
标题翻译：高效等离子体处理纸张
公开(公告)号：US06603121B2
公开(公告)日：2003-08-05
申请号：US10246864
申请日：2002-09-19
申请人： Jeremy M. Grace , Louis J. Gerenser , Christine J. Landry-Coltrain , Kurt D. Sieber , Michael J. Heinsler , Dennis R. Freeman
发明人： Jeremy M. Grace , Louis J. Gerenser , Christine J. Landry-Coltrain , Kurt D. Sieber , Michael J. Heinsler , Dennis R. Freeman
IPC分类号： H01T1904
CPC分类号： D21H25/04 , D21H23/30 , G03C1/915
摘要： An apparatus for treating paper web materials with a plasma, said apparatus comprising a dark space generated by a treatment electrode in a treatment zone. There is a counter electrode having a surface area in said treatment zone which is not greater than a surface area of said counter electrode. A power supply is included for driving either said treatment electrode or said counter electrode with an oscillating high voltage at a frequency less than about 2 MHz and greater than 1/tc where tc is the charging time of a web surface exposed to a rms ion current in the plasma.
摘要翻译：一种用等离子体处理纸幅材料的装置，所述装置包括由处理区域中的处理电极产生的暗空间。在所述处理区域中具有不大于所述对置电极的表面积的对电极。包括用于以小于约2MHz和大于1 / tc的频率的振荡高电压驱动所述处理电极或所述对电极的电源，其中tc是暴露于均方根离子电流的卷材表面的充电时间在等离子体中。

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